12/19/2011	12:03:06 AM	Main Vac valve closed
12/19/2011	12:03:18 AM	Main Vac valve opened
12/19/2011	1:00:01 AM	Main Vac valve closed
12/19/2011	1:00:17 AM	Main Vac valve opened
12/19/2011	1:00:36 AM	Recipe started at 1:00 AM
12/19/2011	1:00:36 AM	Helium valve closed
12/19/2011	1:00:36 AM	H2 valve closed
12/19/2011	1:00:36 AM	BCl3 valve closed
12/19/2011	1:00:36 AM	PH3 valve closed
12/19/2011	1:00:36 AM	SiCl4 pre valve closed
12/19/2011	1:00:36 AM	SiCl4 post valve closed
12/19/2011	1:00:36 AM	Main Vac valve closed
12/19/2011	1:00:36 AM	Bypass valve closed
12/19/2011	1:00:36 AM	Bubbler valve closed
12/19/2011	1:00:36 AM	Helium MFC set to  0.000000
12/19/2011	1:00:36 AM	H2 MFC set to  0.000000
12/19/2011	1:00:36 AM	BCl3 MFC set to  0.000000
12/19/2011	1:00:36 AM	PHl3 MFC set to  0.000000
12/19/2011	1:00:36 AM	SiCl4 MFC set to  0.000000
12/19/2011	1:00:36 AM	Bypass solenoid MFC set to  0.000000
12/19/2011	1:00:36 AM	Tube furnace set to 0
12/19/2011	1:00:39 AM	Helium valve closed
12/19/2011	1:00:39 AM	BCl3 valve closed
12/19/2011	1:00:39 AM	PH3 valve closed
12/19/2011	1:00:39 AM	SiCl4 pre valve closed
12/19/2011	1:00:39 AM	SiCl4 post valve closed
12/19/2011	1:00:39 AM	Main Vac valve closed
12/19/2011	1:00:39 AM	Bypass valve closed
12/19/2011	1:00:39 AM	Bubbler valve closed
12/19/2011	1:00:39 AM	H2 valve opened
12/19/2011	1:00:39 AM	Helium MFC set to  0.000000
12/19/2011	1:00:39 AM	H2 MFC set to  500.000000
12/19/2011	1:00:39 AM	BCl3 MFC set to  0.000000
12/19/2011	1:00:39 AM	PHl3 MFC set to  0.000000
12/19/2011	1:00:39 AM	SiCl4 MFC set to  0.000000
12/19/2011	1:00:39 AM	Bypass solenoid MFC set to  0.000000
12/19/2011	1:00:39 AM	Tube furnace set to 0
12/19/2011	1:01:47 AM	Helium valve closed
12/19/2011	1:01:47 AM	BCl3 valve closed
12/19/2011	1:01:47 AM	PH3 valve closed
12/19/2011	1:01:47 AM	SiCl4 pre valve closed
12/19/2011	1:01:47 AM	SiCl4 post valve closed
12/19/2011	1:01:47 AM	Main Vac valve closed
12/19/2011	1:01:47 AM	Bypass valve closed
12/19/2011	1:01:47 AM	H2 valve opened
12/19/2011	1:01:47 AM	Bubbler valve opened
12/19/2011	1:01:47 AM	Helium MFC set to  0.000000
12/19/2011	1:01:47 AM	H2 MFC set to  500.000000
12/19/2011	1:01:47 AM	BCl3 MFC set to  0.000000
12/19/2011	1:01:47 AM	PHl3 MFC set to  0.000000
12/19/2011	1:01:47 AM	SiCl4 MFC set to  0.000000
12/19/2011	1:01:47 AM	Bypass solenoid MFC set to  0.000000
12/19/2011	1:01:47 AM	Tube furnace set to 0
12/19/2011	1:01:48 AM	Helium valve closed
12/19/2011	1:01:48 AM	BCl3 valve closed
12/19/2011	1:01:48 AM	PH3 valve closed
12/19/2011	1:01:48 AM	SiCl4 pre valve closed
12/19/2011	1:01:48 AM	SiCl4 post valve closed
12/19/2011	1:01:48 AM	Main Vac valve closed
12/19/2011	1:01:48 AM	Bypass valve closed
12/19/2011	1:01:48 AM	H2 valve opened
12/19/2011	1:01:48 AM	Bubbler valve opened
12/19/2011	1:01:48 AM	Helium MFC set to  0.000000
12/19/2011	1:01:48 AM	H2 MFC set to  500.000000
12/19/2011	1:01:48 AM	BCl3 MFC set to  0.000000
12/19/2011	1:01:48 AM	PHl3 MFC set to  0.000000
12/19/2011	1:01:48 AM	SiCl4 MFC set to  0.000000
12/19/2011	1:01:48 AM	Bypass solenoid MFC set to  0.000000
12/19/2011	1:01:49 AM	Tube furnace set to 1000
12/19/2011	1:21:48 AM	Helium valve closed
12/19/2011	1:21:48 AM	BCl3 valve closed
12/19/2011	1:21:48 AM	PH3 valve closed
12/19/2011	1:21:48 AM	Main Vac valve closed
12/19/2011	1:21:48 AM	Bypass valve closed
12/19/2011	1:21:48 AM	H2 valve opened
12/19/2011	1:21:48 AM	SiCl4 pre valve opened
12/19/2011	1:21:48 AM	SiCl4 post valve opened
12/19/2011	1:21:48 AM	Bubbler valve opened
12/19/2011	1:21:48 AM	Helium MFC set to  0.000000
12/19/2011	1:21:48 AM	H2 MFC set to  500.000000
12/19/2011	1:21:48 AM	BCl3 MFC set to  0.000000
12/19/2011	1:21:48 AM	PHl3 MFC set to  0.000000
12/19/2011	1:21:48 AM	SiCl4 MFC set to  50.000000
12/19/2011	1:21:48 AM	Bypass solenoid MFC set to  0.000000
12/19/2011	1:21:49 AM	Tube furnace set to 1000
12/19/2011	1:55:09 AM	Helium valve closed
12/19/2011	1:55:09 AM	BCl3 valve closed
12/19/2011	1:55:09 AM	PH3 valve closed
12/19/2011	1:55:09 AM	SiCl4 pre valve closed
12/19/2011	1:55:09 AM	SiCl4 post valve closed
12/19/2011	1:55:09 AM	Main Vac valve closed
12/19/2011	1:55:09 AM	Bypass valve closed
12/19/2011	1:55:09 AM	H2 valve opened
12/19/2011	1:55:09 AM	Bubbler valve opened
12/19/2011	1:55:09 AM	Helium MFC set to  0.000000
12/19/2011	1:55:09 AM	H2 MFC set to  500.000000
12/19/2011	1:55:09 AM	BCl3 MFC set to  0.000000
12/19/2011	1:55:09 AM	PHl3 MFC set to  0.000000
12/19/2011	1:55:09 AM	SiCl4 MFC set to  0.000000
12/19/2011	1:55:09 AM	Bypass solenoid MFC set to  0.000000
12/19/2011	1:55:09 AM	Tube furnace set to 950
12/19/2011	2:00:09 AM	Helium valve closed
12/19/2011	2:00:09 AM	BCl3 valve closed
12/19/2011	2:00:09 AM	PH3 valve closed
12/19/2011	2:00:09 AM	SiCl4 pre valve closed
12/19/2011	2:00:09 AM	SiCl4 post valve closed
12/19/2011	2:00:09 AM	Main Vac valve closed
12/19/2011	2:00:09 AM	Bypass valve closed
12/19/2011	2:00:09 AM	H2 valve opened
12/19/2011	2:00:09 AM	Bubbler valve opened
12/19/2011	2:00:09 AM	Helium MFC set to  0.000000
12/19/2011	2:00:09 AM	H2 MFC set to  500.000000
12/19/2011	2:00:09 AM	BCl3 MFC set to  0.000000
12/19/2011	2:00:09 AM	PHl3 MFC set to  0.000000
12/19/2011	2:00:09 AM	SiCl4 MFC set to  0.000000
12/19/2011	2:00:09 AM	Bypass solenoid MFC set to  0.000000
12/19/2011	2:00:09 AM	Tube furnace set to 850
12/19/2011	2:05:09 AM	H2 valve closed
12/19/2011	2:05:09 AM	BCl3 valve closed
12/19/2011	2:05:09 AM	PH3 valve closed
12/19/2011	2:05:09 AM	SiCl4 pre valve closed
12/19/2011	2:05:09 AM	SiCl4 post valve closed
12/19/2011	2:05:09 AM	Main Vac valve closed
12/19/2011	2:05:09 AM	Bypass valve closed
12/19/2011	2:05:09 AM	Helium valve opened
12/19/2011	2:05:09 AM	Bubbler valve opened
12/19/2011	2:05:09 AM	Helium MFC set to  500.000000
12/19/2011	2:05:09 AM	H2 MFC set to  0.000000
12/19/2011	2:05:09 AM	BCl3 MFC set to  0.000000
12/19/2011	2:05:09 AM	PHl3 MFC set to  0.000000
12/19/2011	2:05:09 AM	SiCl4 MFC set to  0.000000
12/19/2011	2:05:09 AM	Bypass solenoid MFC set to  0.000000
12/19/2011	2:05:09 AM	Tube furnace set to 0
12/19/2011	2:35:57 AM	Helium valve closed
12/19/2011	2:35:57 AM	H2 valve closed
12/19/2011	2:35:57 AM	BCl3 valve closed
12/19/2011	2:35:57 AM	PH3 valve closed
12/19/2011	2:35:57 AM	SiCl4 pre valve closed
12/19/2011	2:35:57 AM	SiCl4 post valve closed
12/19/2011	2:35:57 AM	Main Vac valve closed
12/19/2011	2:35:57 AM	Bypass valve closed
12/19/2011	2:35:57 AM	Bubbler valve closed
12/19/2011	2:35:57 AM	Helium MFC set to  0.000000
12/19/2011	2:35:57 AM	H2 MFC set to  0.000000
12/19/2011	2:35:57 AM	BCl3 MFC set to  0.000000
12/19/2011	2:35:57 AM	PHl3 MFC set to  0.000000
12/19/2011	2:35:57 AM	SiCl4 MFC set to  0.000000
12/19/2011	2:35:57 AM	Bypass solenoid MFC set to  0.000000
12/19/2011	2:35:57 AM	Tube furnace set to 0
12/19/2011	2:35:58 AM	Run finished at 2:35 AM
12/19/2011	2:39:18 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/19/2011	2:39:19 AM	Recipe started at 2:39 AM
12/19/2011	2:39:19 AM	Helium valve closed
12/19/2011	2:39:19 AM	H2 valve closed
12/19/2011	2:39:19 AM	BCl3 valve closed
12/19/2011	2:39:19 AM	PH3 valve closed
12/19/2011	2:39:19 AM	SiCl4 pre valve closed
12/19/2011	2:39:19 AM	SiCl4 post valve closed
12/19/2011	2:39:19 AM	Main Vac valve closed
12/19/2011	2:39:19 AM	Bubbler valve closed
12/19/2011	2:39:19 AM	Bypass valve opened
12/19/2011	2:39:19 AM	Helium MFC set to  0.000000
12/19/2011	2:39:19 AM	H2 MFC set to  0.000000
12/19/2011	2:39:19 AM	BCl3 MFC set to  0.000000
12/19/2011	2:39:19 AM	PHl3 MFC set to  0.000000
12/19/2011	2:39:19 AM	SiCl4 MFC set to  0.000000
12/19/2011	2:39:19 AM	Bypass solenoid MFC set to  0.000000
12/19/2011	2:39:19 AM	Tube furnace set to 0
12/19/2011	2:42:45 AM	Helium valve closed
12/19/2011	2:42:45 AM	H2 valve closed
12/19/2011	2:42:45 AM	BCl3 valve closed
12/19/2011	2:42:45 AM	PH3 valve closed
12/19/2011	2:42:45 AM	SiCl4 pre valve closed
12/19/2011	2:42:45 AM	SiCl4 post valve closed
12/19/2011	2:42:45 AM	Main Vac valve closed
12/19/2011	2:42:45 AM	Bubbler valve closed
12/19/2011	2:42:45 AM	Bypass valve opened
12/19/2011	2:42:45 AM	Helium MFC set to  0.000000
12/19/2011	2:42:45 AM	H2 MFC set to  0.000000
12/19/2011	2:42:45 AM	BCl3 MFC set to  0.000000
12/19/2011	2:42:45 AM	PHl3 MFC set to  0.000000
12/19/2011	2:42:45 AM	SiCl4 MFC set to  0.000000
12/19/2011	2:42:45 AM	Bypass solenoid MFC set to  0.000000
12/19/2011	2:42:45 AM	Tube furnace set to 0
12/19/2011	2:43:45 AM	Helium valve closed
12/19/2011	2:43:45 AM	H2 valve closed
12/19/2011	2:43:45 AM	BCl3 valve closed
12/19/2011	2:43:45 AM	PH3 valve closed
12/19/2011	2:43:45 AM	SiCl4 pre valve closed
12/19/2011	2:43:45 AM	SiCl4 post valve closed
12/19/2011	2:43:45 AM	Bypass valve closed
12/19/2011	2:43:45 AM	Bubbler valve closed
12/19/2011	2:43:45 AM	Main Vac valve opened
12/19/2011	2:43:45 AM	Helium MFC set to  0.000000
12/19/2011	2:43:45 AM	H2 MFC set to  0.000000
12/19/2011	2:43:45 AM	BCl3 MFC set to  0.000000
12/19/2011	2:43:45 AM	PHl3 MFC set to  0.000000
12/19/2011	2:43:45 AM	SiCl4 MFC set to  0.000000
12/19/2011	2:43:45 AM	Bypass solenoid MFC set to  0.000000
12/19/2011	2:43:45 AM	Tube furnace set to 0
12/19/2011	2:43:46 AM	Run finished at 2:43 AM
12/19/2011	2:43:46 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/19/2011	9:10:39 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/19/2011	9:10:40 AM	Recipe started at 9:10 AM
12/19/2011	9:10:40 AM	Helium valve closed
12/19/2011	9:10:40 AM	H2 valve closed
12/19/2011	9:10:40 AM	BCl3 valve closed
12/19/2011	9:10:40 AM	PH3 valve closed
12/19/2011	9:10:40 AM	SiCl4 pre valve closed
12/19/2011	9:10:40 AM	SiCl4 post valve closed
12/19/2011	9:10:40 AM	Main Vac valve closed
12/19/2011	9:10:40 AM	Bypass valve closed
12/19/2011	9:10:40 AM	Bubbler valve closed
12/19/2011	9:10:40 AM	Helium MFC set to  0.000000
12/19/2011	9:10:40 AM	H2 MFC set to  0.000000
12/19/2011	9:10:40 AM	BCl3 MFC set to  0.000000
12/19/2011	9:10:40 AM	PHl3 MFC set to  0.000000
12/19/2011	9:10:40 AM	SiCl4 MFC set to  0.000000
12/19/2011	9:10:40 AM	Bypass solenoid MFC set to  0.000000
12/19/2011	9:10:40 AM	Tube furnace set to 0
12/19/2011	9:10:43 AM	H2 valve closed
12/19/2011	9:10:43 AM	BCl3 valve closed
12/19/2011	9:10:43 AM	PH3 valve closed
12/19/2011	9:10:43 AM	SiCl4 pre valve closed
12/19/2011	9:10:43 AM	SiCl4 post valve closed
12/19/2011	9:10:43 AM	Main Vac valve closed
12/19/2011	9:10:43 AM	Bypass valve closed
12/19/2011	9:10:43 AM	Bubbler valve closed
12/19/2011	9:10:43 AM	Helium valve opened
12/19/2011	9:10:43 AM	Helium MFC set to  500.000000
12/19/2011	9:10:43 AM	H2 MFC set to  0.000000
12/19/2011	9:10:43 AM	BCl3 MFC set to  0.000000
12/19/2011	9:10:43 AM	PHl3 MFC set to  0.000000
12/19/2011	9:10:43 AM	SiCl4 MFC set to  0.000000
12/19/2011	9:10:43 AM	Bypass solenoid MFC set to  0.000000
12/19/2011	9:10:43 AM	Tube furnace set to 0
12/19/2011	9:11:48 AM	Helium valve closed
12/19/2011	9:11:48 AM	H2 valve closed
12/19/2011	9:11:48 AM	BCl3 valve closed
12/19/2011	9:11:48 AM	PH3 valve closed
12/19/2011	9:11:48 AM	SiCl4 pre valve closed
12/19/2011	9:11:48 AM	SiCl4 post valve closed
12/19/2011	9:11:48 AM	Main Vac valve closed
12/19/2011	9:11:48 AM	Bypass valve closed
12/19/2011	9:11:48 AM	Bubbler valve closed
12/19/2011	9:11:48 AM	Helium MFC set to  0.000000
12/19/2011	9:11:48 AM	H2 MFC set to  0.000000
12/19/2011	9:11:48 AM	BCl3 MFC set to  0.000000
12/19/2011	9:11:48 AM	PHl3 MFC set to  0.000000
12/19/2011	9:11:48 AM	SiCl4 MFC set to  0.000000
12/19/2011	9:11:48 AM	Bypass solenoid MFC set to  0.000000
12/19/2011	9:11:48 AM	Tube furnace set to 0
12/19/2011	9:11:49 AM	Run finished at 9:11 AM
12/19/2011	9:11:49 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/19/2011	9:13:39 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/19/2011	9:13:40 AM	Recipe started at 9:13 AM
12/19/2011	9:13:40 AM	Helium valve closed
12/19/2011	9:13:40 AM	H2 valve closed
12/19/2011	9:13:40 AM	BCl3 valve closed
12/19/2011	9:13:40 AM	PH3 valve closed
12/19/2011	9:13:40 AM	SiCl4 pre valve closed
12/19/2011	9:13:40 AM	SiCl4 post valve closed
12/19/2011	9:13:40 AM	Main Vac valve closed
12/19/2011	9:13:40 AM	Bubbler valve closed
12/19/2011	9:13:40 AM	Bypass valve opened
12/19/2011	9:13:40 AM	Helium MFC set to  0.000000
12/19/2011	9:13:40 AM	H2 MFC set to  0.000000
12/19/2011	9:13:40 AM	BCl3 MFC set to  0.000000
12/19/2011	9:13:40 AM	PHl3 MFC set to  0.000000
12/19/2011	9:13:40 AM	SiCl4 MFC set to  0.000000
12/19/2011	9:13:40 AM	Bypass solenoid MFC set to  0.000000
12/19/2011	9:13:40 AM	Tube furnace set to 0
12/19/2011	9:14:49 AM	Helium valve closed
12/19/2011	9:14:49 AM	H2 valve closed
12/19/2011	9:14:49 AM	BCl3 valve closed
12/19/2011	9:14:49 AM	PH3 valve closed
12/19/2011	9:14:49 AM	SiCl4 pre valve closed
12/19/2011	9:14:49 AM	SiCl4 post valve closed
12/19/2011	9:14:49 AM	Main Vac valve closed
12/19/2011	9:14:49 AM	Bubbler valve closed
12/19/2011	9:14:49 AM	Bypass valve opened
12/19/2011	9:14:49 AM	Helium MFC set to  0.000000
12/19/2011	9:14:49 AM	H2 MFC set to  0.000000
12/19/2011	9:14:49 AM	BCl3 MFC set to  0.000000
12/19/2011	9:14:49 AM	PHl3 MFC set to  0.000000
12/19/2011	9:14:49 AM	SiCl4 MFC set to  0.000000
12/19/2011	9:14:49 AM	Bypass solenoid MFC set to  0.000000
12/19/2011	9:14:49 AM	Tube furnace set to 0
12/19/2011	9:14:51 AM	Helium valve closed
12/19/2011	9:14:51 AM	H2 valve closed
12/19/2011	9:14:51 AM	BCl3 valve closed
12/19/2011	9:14:51 AM	PH3 valve closed
12/19/2011	9:14:51 AM	SiCl4 pre valve closed
12/19/2011	9:14:51 AM	SiCl4 post valve closed
12/19/2011	9:14:51 AM	Bypass valve closed
12/19/2011	9:14:51 AM	Bubbler valve closed
12/19/2011	9:14:51 AM	Main Vac valve opened
12/19/2011	9:14:51 AM	Helium MFC set to  0.000000
12/19/2011	9:14:51 AM	H2 MFC set to  0.000000
12/19/2011	9:14:51 AM	BCl3 MFC set to  0.000000
12/19/2011	9:14:51 AM	PHl3 MFC set to  0.000000
12/19/2011	9:14:51 AM	SiCl4 MFC set to  0.000000
12/19/2011	9:14:51 AM	Bypass solenoid MFC set to  0.000000
12/19/2011	9:14:51 AM	Tube furnace set to 0
12/19/2011	9:14:52 AM	Run finished at 9:14 AM
12/19/2011	9:14:52 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/19/2011	9:23:02 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
12/19/2011	9:23:14 AM	Recipe started at 9:23 AM
12/19/2011	9:23:14 AM	Helium valve closed
12/19/2011	9:23:14 AM	H2 valve closed
12/19/2011	9:23:14 AM	BCl3 valve closed
12/19/2011	9:23:14 AM	PH3 valve closed
12/19/2011	9:23:14 AM	SiCl4 pre valve closed
12/19/2011	9:23:14 AM	SiCl4 post valve closed
12/19/2011	9:23:14 AM	Main Vac valve closed
12/19/2011	9:23:14 AM	Bubbler valve closed
12/19/2011	9:23:14 AM	Bypass valve opened
12/19/2011	9:23:14 AM	Helium MFC set to  0.000000
12/19/2011	9:23:14 AM	H2 MFC set to  0.000000
12/19/2011	9:23:15 AM	BCl3 MFC set to  0.000000
12/19/2011	9:23:15 AM	PHl3 MFC set to  0.000000
12/19/2011	9:23:15 AM	SiCl4 MFC set to  0.000000
12/19/2011	9:23:15 AM	Bypass solenoid MFC set to  0.000000
12/19/2011	9:23:15 AM	Tube furnace set to 0
12/19/2011	9:23:16 AM	Helium valve closed
12/19/2011	9:23:16 AM	H2 valve closed
12/19/2011	9:23:16 AM	BCl3 valve closed
12/19/2011	9:23:16 AM	PH3 valve closed
12/19/2011	9:23:16 AM	SiCl4 pre valve closed
12/19/2011	9:23:16 AM	SiCl4 post valve closed
12/19/2011	9:23:16 AM	Main Vac valve closed
12/19/2011	9:23:16 AM	Bubbler valve closed
12/19/2011	9:23:16 AM	Bypass valve opened
12/19/2011	9:23:16 AM	Helium MFC set to  0.000000
12/19/2011	9:23:16 AM	H2 MFC set to  0.000000
12/19/2011	9:23:16 AM	BCl3 MFC set to  0.000000
12/19/2011	9:23:16 AM	PHl3 MFC set to  0.000000
12/19/2011	9:23:16 AM	SiCl4 MFC set to  0.000000
12/19/2011	9:23:16 AM	Bypass solenoid MFC set to  0.000000
12/19/2011	9:23:16 AM	Tube furnace set to 0
12/19/2011	9:23:17 AM	Helium valve closed
12/19/2011	9:23:17 AM	H2 valve closed
12/19/2011	9:23:17 AM	BCl3 valve closed
12/19/2011	9:23:17 AM	PH3 valve closed
12/19/2011	9:23:17 AM	SiCl4 pre valve closed
12/19/2011	9:23:17 AM	SiCl4 post valve closed
12/19/2011	9:23:17 AM	Bypass valve closed
12/19/2011	9:23:17 AM	Bubbler valve closed
12/19/2011	9:23:17 AM	Main Vac valve opened
12/19/2011	9:23:17 AM	Helium MFC set to  0.000000
12/19/2011	9:23:17 AM	H2 MFC set to  0.000000
12/19/2011	9:23:17 AM	BCl3 MFC set to  0.000000
12/19/2011	9:23:17 AM	PHl3 MFC set to  0.000000
12/19/2011	9:23:17 AM	SiCl4 MFC set to  0.000000
12/19/2011	9:23:17 AM	Bypass solenoid MFC set to  0.000000
12/19/2011	9:23:17 AM	Tube furnace set to 0
12/19/2011	9:23:19 AM	H2 valve closed
12/19/2011	9:23:19 AM	BCl3 valve closed
12/19/2011	9:23:19 AM	PH3 valve closed
12/19/2011	9:23:19 AM	SiCl4 pre valve closed
12/19/2011	9:23:19 AM	SiCl4 post valve closed
12/19/2011	9:23:19 AM	Bypass valve closed
12/19/2011	9:23:19 AM	Bubbler valve closed
12/19/2011	9:23:19 AM	Helium valve opened
12/19/2011	9:23:19 AM	Main Vac valve opened
12/19/2011	9:23:19 AM	Helium MFC set to  20.000000
12/19/2011	9:23:19 AM	H2 MFC set to  0.000000
12/19/2011	9:23:19 AM	BCl3 MFC set to  0.000000
12/19/2011	9:23:19 AM	PHl3 MFC set to  0.000000
12/19/2011	9:23:19 AM	SiCl4 MFC set to  0.000000
12/19/2011	9:23:19 AM	Bypass solenoid MFC set to  0.000000
12/19/2011	9:23:19 AM	Tube furnace set to 0
12/19/2011	9:23:49 AM	Helium valve closed
12/19/2011	9:23:49 AM	H2 valve closed
12/19/2011	9:23:49 AM	BCl3 valve closed
12/19/2011	9:23:49 AM	PH3 valve closed
12/19/2011	9:23:49 AM	SiCl4 pre valve closed
12/19/2011	9:23:49 AM	SiCl4 post valve closed
12/19/2011	9:23:49 AM	Bypass valve closed
12/19/2011	9:23:49 AM	Bubbler valve closed
12/19/2011	9:23:49 AM	Main Vac valve opened
12/19/2011	9:23:49 AM	Helium MFC set to  0.000000
12/19/2011	9:23:49 AM	H2 MFC set to  0.000000
12/19/2011	9:23:49 AM	BCl3 MFC set to  0.000000
12/19/2011	9:23:49 AM	PHl3 MFC set to  0.000000
12/19/2011	9:23:49 AM	SiCl4 MFC set to  0.000000
12/19/2011	9:23:49 AM	Bypass solenoid MFC set to  0.000000
12/19/2011	9:23:49 AM	Tube furnace set to 0
12/19/2011	9:24:19 AM	H2 valve closed
12/19/2011	9:24:19 AM	BCl3 valve closed
12/19/2011	9:24:19 AM	PH3 valve closed
12/19/2011	9:24:19 AM	SiCl4 pre valve closed
12/19/2011	9:24:19 AM	SiCl4 post valve closed
12/19/2011	9:24:19 AM	Bypass valve closed
12/19/2011	9:24:19 AM	Bubbler valve closed
12/19/2011	9:24:19 AM	Helium valve opened
12/19/2011	9:24:19 AM	Main Vac valve opened
12/19/2011	9:24:19 AM	Helium MFC set to  20.000000
12/19/2011	9:24:19 AM	H2 MFC set to  0.000000
12/19/2011	9:24:19 AM	BCl3 MFC set to  0.000000
12/19/2011	9:24:19 AM	PHl3 MFC set to  0.000000
12/19/2011	9:24:19 AM	SiCl4 MFC set to  0.000000
12/19/2011	9:24:19 AM	Bypass solenoid MFC set to  0.000000
12/19/2011	9:24:19 AM	Tube furnace set to 0
12/19/2011	9:24:49 AM	Helium valve closed
12/19/2011	9:24:49 AM	H2 valve closed
12/19/2011	9:24:49 AM	BCl3 valve closed
12/19/2011	9:24:49 AM	PH3 valve closed
12/19/2011	9:24:49 AM	SiCl4 pre valve closed
12/19/2011	9:24:49 AM	SiCl4 post valve closed
12/19/2011	9:24:49 AM	Bypass valve closed
12/19/2011	9:24:49 AM	Bubbler valve closed
12/19/2011	9:24:49 AM	Main Vac valve opened
12/19/2011	9:24:49 AM	Helium MFC set to  0.000000
12/19/2011	9:24:49 AM	H2 MFC set to  0.000000
12/19/2011	9:24:49 AM	BCl3 MFC set to  0.000000
12/19/2011	9:24:49 AM	PHl3 MFC set to  0.000000
12/19/2011	9:24:49 AM	SiCl4 MFC set to  0.000000
12/19/2011	9:24:49 AM	Bypass solenoid MFC set to  0.000000
12/19/2011	9:24:49 AM	Tube furnace set to 0
12/19/2011	9:25:19 AM	H2 valve closed
12/19/2011	9:25:19 AM	BCl3 valve closed
12/19/2011	9:25:19 AM	PH3 valve closed
12/19/2011	9:25:19 AM	SiCl4 pre valve closed
12/19/2011	9:25:19 AM	SiCl4 post valve closed
12/19/2011	9:25:19 AM	Bypass valve closed
12/19/2011	9:25:19 AM	Bubbler valve closed
12/19/2011	9:25:19 AM	Helium valve opened
12/19/2011	9:25:19 AM	Main Vac valve opened
12/19/2011	9:25:19 AM	Helium MFC set to  20.000000
12/19/2011	9:25:19 AM	H2 MFC set to  0.000000
12/19/2011	9:25:19 AM	BCl3 MFC set to  0.000000
12/19/2011	9:25:19 AM	PHl3 MFC set to  0.000000
12/19/2011	9:25:19 AM	SiCl4 MFC set to  0.000000
12/19/2011	9:25:19 AM	Bypass solenoid MFC set to  0.000000
12/19/2011	9:25:20 AM	Tube furnace set to 0
12/19/2011	9:25:50 AM	Helium valve closed
12/19/2011	9:25:50 AM	H2 valve closed
12/19/2011	9:25:50 AM	BCl3 valve closed
12/19/2011	9:25:50 AM	PH3 valve closed
12/19/2011	9:25:50 AM	SiCl4 pre valve closed
12/19/2011	9:25:50 AM	SiCl4 post valve closed
12/19/2011	9:25:50 AM	Bypass valve closed
12/19/2011	9:25:50 AM	Bubbler valve closed
12/19/2011	9:25:50 AM	Main Vac valve opened
12/19/2011	9:25:50 AM	Helium MFC set to  0.000000
12/19/2011	9:25:50 AM	H2 MFC set to  0.000000
12/19/2011	9:25:50 AM	BCl3 MFC set to  0.000000
12/19/2011	9:25:50 AM	PHl3 MFC set to  0.000000
12/19/2011	9:25:50 AM	SiCl4 MFC set to  0.000000
12/19/2011	9:25:50 AM	Bypass solenoid MFC set to  0.000000
12/19/2011	9:25:50 AM	Tube furnace set to 0
12/19/2011	9:26:20 AM	H2 valve closed
12/19/2011	9:26:20 AM	BCl3 valve closed
12/19/2011	9:26:20 AM	PH3 valve closed
12/19/2011	9:26:20 AM	SiCl4 pre valve closed
12/19/2011	9:26:20 AM	SiCl4 post valve closed
12/19/2011	9:26:20 AM	Bypass valve closed
12/19/2011	9:26:20 AM	Bubbler valve closed
12/19/2011	9:26:20 AM	Helium valve opened
12/19/2011	9:26:20 AM	Main Vac valve opened
12/19/2011	9:26:20 AM	Helium MFC set to  20.000000
12/19/2011	9:26:20 AM	H2 MFC set to  0.000000
12/19/2011	9:26:20 AM	BCl3 MFC set to  0.000000
12/19/2011	9:26:20 AM	PHl3 MFC set to  0.000000
12/19/2011	9:26:20 AM	SiCl4 MFC set to  0.000000
12/19/2011	9:26:20 AM	Bypass solenoid MFC set to  0.000000
12/19/2011	9:26:20 AM	Tube furnace set to 0
12/19/2011	9:26:50 AM	Helium valve closed
12/19/2011	9:26:50 AM	H2 valve closed
12/19/2011	9:26:50 AM	BCl3 valve closed
12/19/2011	9:26:50 AM	PH3 valve closed
12/19/2011	9:26:50 AM	SiCl4 pre valve closed
12/19/2011	9:26:50 AM	SiCl4 post valve closed
12/19/2011	9:26:50 AM	Bypass valve closed
12/19/2011	9:26:50 AM	Bubbler valve closed
12/19/2011	9:26:50 AM	Main Vac valve opened
12/19/2011	9:26:50 AM	Helium MFC set to  0.000000
12/19/2011	9:26:50 AM	H2 MFC set to  0.000000
12/19/2011	9:26:50 AM	BCl3 MFC set to  0.000000
12/19/2011	9:26:50 AM	PHl3 MFC set to  0.000000
12/19/2011	9:26:50 AM	SiCl4 MFC set to  0.000000
12/19/2011	9:26:50 AM	Bypass solenoid MFC set to  0.000000
12/19/2011	9:26:50 AM	Tube furnace set to 0
12/19/2011	9:27:20 AM	H2 valve closed
12/19/2011	9:27:20 AM	BCl3 valve closed
12/19/2011	9:27:20 AM	PH3 valve closed
12/19/2011	9:27:20 AM	SiCl4 pre valve closed
12/19/2011	9:27:20 AM	SiCl4 post valve closed
12/19/2011	9:27:20 AM	Bypass valve closed
12/19/2011	9:27:20 AM	Bubbler valve closed
12/19/2011	9:27:20 AM	Helium valve opened
12/19/2011	9:27:20 AM	Main Vac valve opened
12/19/2011	9:27:20 AM	Helium MFC set to  20.000000
12/19/2011	9:27:20 AM	H2 MFC set to  0.000000
12/19/2011	9:27:20 AM	BCl3 MFC set to  0.000000
12/19/2011	9:27:20 AM	PHl3 MFC set to  0.000000
12/19/2011	9:27:20 AM	SiCl4 MFC set to  0.000000
12/19/2011	9:27:20 AM	Bypass solenoid MFC set to  0.000000
12/19/2011	9:27:20 AM	Tube furnace set to 0
12/19/2011	9:27:50 AM	Helium valve closed
12/19/2011	9:27:50 AM	H2 valve closed
12/19/2011	9:27:50 AM	BCl3 valve closed
12/19/2011	9:27:50 AM	PH3 valve closed
12/19/2011	9:27:50 AM	SiCl4 pre valve closed
12/19/2011	9:27:50 AM	SiCl4 post valve closed
12/19/2011	9:27:50 AM	Bypass valve closed
12/19/2011	9:27:50 AM	Bubbler valve closed
12/19/2011	9:27:50 AM	Main Vac valve opened
12/19/2011	9:27:50 AM	Helium MFC set to  0.000000
12/19/2011	9:27:50 AM	H2 MFC set to  0.000000
12/19/2011	9:27:50 AM	BCl3 MFC set to  0.000000
12/19/2011	9:27:50 AM	PHl3 MFC set to  0.000000
12/19/2011	9:27:50 AM	SiCl4 MFC set to  0.000000
12/19/2011	9:27:50 AM	Bypass solenoid MFC set to  0.000000
12/19/2011	9:27:51 AM	Tube furnace set to 0
12/19/2011	9:28:21 AM	H2 valve closed
12/19/2011	9:28:21 AM	BCl3 valve closed
12/19/2011	9:28:21 AM	PH3 valve closed
12/19/2011	9:28:21 AM	SiCl4 pre valve closed
12/19/2011	9:28:21 AM	SiCl4 post valve closed
12/19/2011	9:28:21 AM	Bypass valve closed
12/19/2011	9:28:21 AM	Bubbler valve closed
12/19/2011	9:28:21 AM	Helium valve opened
12/19/2011	9:28:21 AM	Main Vac valve opened
12/19/2011	9:28:21 AM	Helium MFC set to  20.000000
12/19/2011	9:28:21 AM	H2 MFC set to  0.000000
12/19/2011	9:28:21 AM	BCl3 MFC set to  0.000000
12/19/2011	9:28:21 AM	PHl3 MFC set to  0.000000
12/19/2011	9:28:21 AM	SiCl4 MFC set to  0.000000
12/19/2011	9:28:21 AM	Bypass solenoid MFC set to  0.000000
12/19/2011	9:28:21 AM	Tube furnace set to 0
12/19/2011	9:28:51 AM	Helium valve closed
12/19/2011	9:28:51 AM	H2 valve closed
12/19/2011	9:28:51 AM	BCl3 valve closed
12/19/2011	9:28:51 AM	PH3 valve closed
12/19/2011	9:28:51 AM	SiCl4 pre valve closed
12/19/2011	9:28:51 AM	SiCl4 post valve closed
12/19/2011	9:28:51 AM	Bypass valve closed
12/19/2011	9:28:51 AM	Bubbler valve closed
12/19/2011	9:28:51 AM	Main Vac valve opened
12/19/2011	9:28:51 AM	Helium MFC set to  0.000000
12/19/2011	9:28:51 AM	H2 MFC set to  0.000000
12/19/2011	9:28:51 AM	BCl3 MFC set to  0.000000
12/19/2011	9:28:51 AM	PHl3 MFC set to  0.000000
12/19/2011	9:28:51 AM	SiCl4 MFC set to  0.000000
12/19/2011	9:28:51 AM	Bypass solenoid MFC set to  0.000000
12/19/2011	9:28:51 AM	Tube furnace set to 0
12/19/2011	9:29:21 AM	H2 valve closed
12/19/2011	9:29:21 AM	BCl3 valve closed
12/19/2011	9:29:21 AM	PH3 valve closed
12/19/2011	9:29:21 AM	SiCl4 pre valve closed
12/19/2011	9:29:21 AM	SiCl4 post valve closed
12/19/2011	9:29:21 AM	Bypass valve closed
12/19/2011	9:29:21 AM	Bubbler valve closed
12/19/2011	9:29:21 AM	Helium valve opened
12/19/2011	9:29:21 AM	Main Vac valve opened
12/19/2011	9:29:21 AM	Helium MFC set to  20.000000
12/19/2011	9:29:21 AM	H2 MFC set to  0.000000
12/19/2011	9:29:21 AM	BCl3 MFC set to  0.000000
12/19/2011	9:29:21 AM	PHl3 MFC set to  0.000000
12/19/2011	9:29:21 AM	SiCl4 MFC set to  0.000000
12/19/2011	9:29:21 AM	Bypass solenoid MFC set to  0.000000
12/19/2011	9:29:21 AM	Tube furnace set to 0
12/19/2011	9:29:51 AM	Helium valve closed
12/19/2011	9:29:51 AM	H2 valve closed
12/19/2011	9:29:51 AM	BCl3 valve closed
12/19/2011	9:29:51 AM	PH3 valve closed
12/19/2011	9:29:51 AM	SiCl4 pre valve closed
12/19/2011	9:29:51 AM	SiCl4 post valve closed
12/19/2011	9:29:51 AM	Bypass valve closed
12/19/2011	9:29:51 AM	Bubbler valve closed
12/19/2011	9:29:51 AM	Main Vac valve opened
12/19/2011	9:29:51 AM	Helium MFC set to  0.000000
12/19/2011	9:29:51 AM	H2 MFC set to  0.000000
12/19/2011	9:29:51 AM	BCl3 MFC set to  0.000000
12/19/2011	9:29:51 AM	PHl3 MFC set to  0.000000
12/19/2011	9:29:51 AM	SiCl4 MFC set to  0.000000
12/19/2011	9:29:51 AM	Bypass solenoid MFC set to  0.000000
12/19/2011	9:29:51 AM	Tube furnace set to 0
12/19/2011	9:30:21 AM	H2 valve closed
12/19/2011	9:30:21 AM	BCl3 valve closed
12/19/2011	9:30:21 AM	PH3 valve closed
12/19/2011	9:30:21 AM	SiCl4 pre valve closed
12/19/2011	9:30:21 AM	SiCl4 post valve closed
12/19/2011	9:30:21 AM	Bypass valve closed
12/19/2011	9:30:21 AM	Bubbler valve closed
12/19/2011	9:30:21 AM	Helium valve opened
12/19/2011	9:30:21 AM	Main Vac valve opened
12/19/2011	9:30:21 AM	Helium MFC set to  20.000000
12/19/2011	9:30:21 AM	H2 MFC set to  0.000000
12/19/2011	9:30:21 AM	BCl3 MFC set to  0.000000
12/19/2011	9:30:21 AM	PHl3 MFC set to  0.000000
12/19/2011	9:30:21 AM	SiCl4 MFC set to  0.000000
12/19/2011	9:30:21 AM	Bypass solenoid MFC set to  0.000000
12/19/2011	9:30:21 AM	Tube furnace set to 0
12/19/2011	9:30:52 AM	Helium valve closed
12/19/2011	9:30:52 AM	H2 valve closed
12/19/2011	9:30:52 AM	BCl3 valve closed
12/19/2011	9:30:52 AM	PH3 valve closed
12/19/2011	9:30:52 AM	SiCl4 pre valve closed
12/19/2011	9:30:52 AM	SiCl4 post valve closed
12/19/2011	9:30:52 AM	Bypass valve closed
12/19/2011	9:30:52 AM	Bubbler valve closed
12/19/2011	9:30:52 AM	Main Vac valve opened
12/19/2011	9:30:52 AM	Helium MFC set to  0.000000
12/19/2011	9:30:52 AM	H2 MFC set to  0.000000
12/19/2011	9:30:52 AM	BCl3 MFC set to  0.000000
12/19/2011	9:30:52 AM	PHl3 MFC set to  0.000000
12/19/2011	9:30:52 AM	SiCl4 MFC set to  0.000000
12/19/2011	9:30:52 AM	Bypass solenoid MFC set to  0.000000
12/19/2011	9:30:52 AM	Tube furnace set to 0
12/19/2011	9:31:22 AM	H2 valve closed
12/19/2011	9:31:22 AM	BCl3 valve closed
12/19/2011	9:31:22 AM	PH3 valve closed
12/19/2011	9:31:22 AM	SiCl4 pre valve closed
12/19/2011	9:31:22 AM	SiCl4 post valve closed
12/19/2011	9:31:22 AM	Bypass valve closed
12/19/2011	9:31:22 AM	Bubbler valve closed
12/19/2011	9:31:22 AM	Helium valve opened
12/19/2011	9:31:22 AM	Main Vac valve opened
12/19/2011	9:31:22 AM	Helium MFC set to  20.000000
12/19/2011	9:31:22 AM	H2 MFC set to  0.000000
12/19/2011	9:31:22 AM	BCl3 MFC set to  0.000000
12/19/2011	9:31:22 AM	PHl3 MFC set to  0.000000
12/19/2011	9:31:22 AM	SiCl4 MFC set to  0.000000
12/19/2011	9:31:22 AM	Bypass solenoid MFC set to  0.000000
12/19/2011	9:31:22 AM	Tube furnace set to 0
12/19/2011	9:31:52 AM	Helium valve closed
12/19/2011	9:31:52 AM	H2 valve closed
12/19/2011	9:31:52 AM	BCl3 valve closed
12/19/2011	9:31:52 AM	PH3 valve closed
12/19/2011	9:31:52 AM	SiCl4 pre valve closed
12/19/2011	9:31:52 AM	SiCl4 post valve closed
12/19/2011	9:31:52 AM	Bypass valve closed
12/19/2011	9:31:52 AM	Bubbler valve closed
12/19/2011	9:31:52 AM	Main Vac valve opened
12/19/2011	9:31:52 AM	Helium MFC set to  0.000000
12/19/2011	9:31:52 AM	H2 MFC set to  0.000000
12/19/2011	9:31:52 AM	BCl3 MFC set to  0.000000
12/19/2011	9:31:52 AM	PHl3 MFC set to  0.000000
12/19/2011	9:31:52 AM	SiCl4 MFC set to  0.000000
12/19/2011	9:31:52 AM	Bypass solenoid MFC set to  0.000000
12/19/2011	9:31:52 AM	Tube furnace set to 0
12/19/2011	9:32:22 AM	H2 valve closed
12/19/2011	9:32:22 AM	BCl3 valve closed
12/19/2011	9:32:22 AM	PH3 valve closed
12/19/2011	9:32:22 AM	SiCl4 pre valve closed
12/19/2011	9:32:22 AM	SiCl4 post valve closed
12/19/2011	9:32:22 AM	Bypass valve closed
12/19/2011	9:32:22 AM	Bubbler valve closed
12/19/2011	9:32:22 AM	Helium valve opened
12/19/2011	9:32:22 AM	Main Vac valve opened
12/19/2011	9:32:22 AM	Helium MFC set to  20.000000
12/19/2011	9:32:22 AM	H2 MFC set to  0.000000
12/19/2011	9:32:22 AM	BCl3 MFC set to  0.000000
12/19/2011	9:32:22 AM	PHl3 MFC set to  0.000000
12/19/2011	9:32:22 AM	SiCl4 MFC set to  0.000000
12/19/2011	9:32:22 AM	Bypass solenoid MFC set to  0.000000
12/19/2011	9:32:22 AM	Tube furnace set to 0
12/19/2011	9:32:52 AM	Helium valve closed
12/19/2011	9:32:52 AM	H2 valve closed
12/19/2011	9:32:52 AM	BCl3 valve closed
12/19/2011	9:32:52 AM	PH3 valve closed
12/19/2011	9:32:52 AM	SiCl4 pre valve closed
12/19/2011	9:32:52 AM	SiCl4 post valve closed
12/19/2011	9:32:52 AM	Bypass valve closed
12/19/2011	9:32:52 AM	Bubbler valve closed
12/19/2011	9:32:52 AM	Main Vac valve opened
12/19/2011	9:32:52 AM	Helium MFC set to  0.000000
12/19/2011	9:32:52 AM	H2 MFC set to  0.000000
12/19/2011	9:32:52 AM	BCl3 MFC set to  0.000000
12/19/2011	9:32:52 AM	PHl3 MFC set to  0.000000
12/19/2011	9:32:52 AM	SiCl4 MFC set to  0.000000
12/19/2011	9:32:52 AM	Bypass solenoid MFC set to  0.000000
12/19/2011	9:32:52 AM	Tube furnace set to 0
12/19/2011	9:32:53 AM	Run finished at 9:32 AM
12/19/2011	9:32:54 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
12/19/2011	9:45:36 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
12/19/2011	9:45:49 AM	Recipe started at 9:45 AM
12/19/2011	9:45:49 AM	Helium valve closed
12/19/2011	9:45:49 AM	H2 valve closed
12/19/2011	9:45:49 AM	BCl3 valve closed
12/19/2011	9:45:49 AM	PH3 valve closed
12/19/2011	9:45:49 AM	SiCl4 pre valve closed
12/19/2011	9:45:49 AM	SiCl4 post valve closed
12/19/2011	9:45:49 AM	Main Vac valve closed
12/19/2011	9:45:49 AM	Bubbler valve closed
12/19/2011	9:45:49 AM	Bypass valve opened
12/19/2011	9:45:49 AM	Helium MFC set to  0.000000
12/19/2011	9:45:49 AM	H2 MFC set to  0.000000
12/19/2011	9:45:49 AM	BCl3 MFC set to  0.000000
12/19/2011	9:45:49 AM	PHl3 MFC set to  0.000000
12/19/2011	9:45:49 AM	SiCl4 MFC set to  0.000000
12/19/2011	9:45:49 AM	Bypass solenoid MFC set to  0.000000
12/19/2011	9:45:49 AM	Tube furnace set to 0
12/19/2011	9:45:50 AM	Helium valve closed
12/19/2011	9:45:50 AM	H2 valve closed
12/19/2011	9:45:50 AM	BCl3 valve closed
12/19/2011	9:45:50 AM	PH3 valve closed
12/19/2011	9:45:50 AM	SiCl4 pre valve closed
12/19/2011	9:45:50 AM	SiCl4 post valve closed
12/19/2011	9:45:50 AM	Main Vac valve closed
12/19/2011	9:45:50 AM	Bubbler valve closed
12/19/2011	9:45:50 AM	Bypass valve opened
12/19/2011	9:45:50 AM	Helium MFC set to  0.000000
12/19/2011	9:45:50 AM	H2 MFC set to  0.000000
12/19/2011	9:45:50 AM	BCl3 MFC set to  0.000000
12/19/2011	9:45:50 AM	PHl3 MFC set to  0.000000
12/19/2011	9:45:50 AM	SiCl4 MFC set to  0.000000
12/19/2011	9:45:50 AM	Bypass solenoid MFC set to  0.000000
12/19/2011	9:45:50 AM	Tube furnace set to 0
12/19/2011	9:45:50 AM	Helium valve closed
12/19/2011	9:45:50 AM	H2 valve closed
12/19/2011	9:45:50 AM	BCl3 valve closed
12/19/2011	9:45:50 AM	PH3 valve closed
12/19/2011	9:45:50 AM	SiCl4 pre valve closed
12/19/2011	9:45:51 AM	SiCl4 post valve closed
12/19/2011	9:45:51 AM	Bypass valve closed
12/19/2011	9:45:51 AM	Bubbler valve closed
12/19/2011	9:45:51 AM	Main Vac valve opened
12/19/2011	9:45:51 AM	Helium MFC set to  0.000000
12/19/2011	9:45:51 AM	H2 MFC set to  0.000000
12/19/2011	9:45:51 AM	BCl3 MFC set to  0.000000
12/19/2011	9:45:51 AM	PHl3 MFC set to  0.000000
12/19/2011	9:45:51 AM	SiCl4 MFC set to  0.000000
12/19/2011	9:45:51 AM	Bypass solenoid MFC set to  0.000000
12/19/2011	9:45:51 AM	Tube furnace set to 0
12/19/2011	9:45:53 AM	H2 valve closed
12/19/2011	9:45:53 AM	BCl3 valve closed
12/19/2011	9:45:53 AM	PH3 valve closed
12/19/2011	9:45:53 AM	SiCl4 pre valve closed
12/19/2011	9:45:53 AM	SiCl4 post valve closed
12/19/2011	9:45:53 AM	Bypass valve closed
12/19/2011	9:45:53 AM	Bubbler valve closed
12/19/2011	9:45:53 AM	Helium valve opened
12/19/2011	9:45:53 AM	Main Vac valve opened
12/19/2011	9:45:53 AM	Helium MFC set to  20.000000
12/19/2011	9:45:53 AM	H2 MFC set to  0.000000
12/19/2011	9:45:53 AM	BCl3 MFC set to  0.000000
12/19/2011	9:45:53 AM	PHl3 MFC set to  0.000000
12/19/2011	9:45:53 AM	SiCl4 MFC set to  0.000000
12/19/2011	9:45:53 AM	Bypass solenoid MFC set to  0.000000
12/19/2011	9:45:53 AM	Tube furnace set to 0
12/19/2011	9:46:23 AM	Helium valve closed
12/19/2011	9:46:23 AM	H2 valve closed
12/19/2011	9:46:23 AM	BCl3 valve closed
12/19/2011	9:46:23 AM	PH3 valve closed
12/19/2011	9:46:23 AM	SiCl4 pre valve closed
12/19/2011	9:46:23 AM	SiCl4 post valve closed
12/19/2011	9:46:23 AM	Bypass valve closed
12/19/2011	9:46:23 AM	Bubbler valve closed
12/19/2011	9:46:23 AM	Main Vac valve opened
12/19/2011	9:46:23 AM	Helium MFC set to  0.000000
12/19/2011	9:46:23 AM	H2 MFC set to  0.000000
12/19/2011	9:46:23 AM	BCl3 MFC set to  0.000000
12/19/2011	9:46:23 AM	PHl3 MFC set to  0.000000
12/19/2011	9:46:23 AM	SiCl4 MFC set to  0.000000
12/19/2011	9:46:23 AM	Bypass solenoid MFC set to  0.000000
12/19/2011	9:46:23 AM	Tube furnace set to 0
12/19/2011	9:46:53 AM	H2 valve closed
12/19/2011	9:46:53 AM	BCl3 valve closed
12/19/2011	9:46:53 AM	PH3 valve closed
12/19/2011	9:46:53 AM	SiCl4 pre valve closed
12/19/2011	9:46:53 AM	SiCl4 post valve closed
12/19/2011	9:46:53 AM	Bypass valve closed
12/19/2011	9:46:53 AM	Bubbler valve closed
12/19/2011	9:46:53 AM	Helium valve opened
12/19/2011	9:46:53 AM	Main Vac valve opened
12/19/2011	9:46:53 AM	Helium MFC set to  20.000000
12/19/2011	9:46:53 AM	H2 MFC set to  0.000000
12/19/2011	9:46:53 AM	BCl3 MFC set to  0.000000
12/19/2011	9:46:53 AM	PHl3 MFC set to  0.000000
12/19/2011	9:46:53 AM	SiCl4 MFC set to  0.000000
12/19/2011	9:46:53 AM	Bypass solenoid MFC set to  0.000000
12/19/2011	9:46:53 AM	Tube furnace set to 0
12/19/2011	9:47:23 AM	Helium valve closed
12/19/2011	9:47:23 AM	H2 valve closed
12/19/2011	9:47:23 AM	BCl3 valve closed
12/19/2011	9:47:23 AM	PH3 valve closed
12/19/2011	9:47:23 AM	SiCl4 pre valve closed
12/19/2011	9:47:23 AM	SiCl4 post valve closed
12/19/2011	9:47:23 AM	Bypass valve closed
12/19/2011	9:47:23 AM	Bubbler valve closed
12/19/2011	9:47:23 AM	Main Vac valve opened
12/19/2011	9:47:23 AM	Helium MFC set to  0.000000
12/19/2011	9:47:23 AM	H2 MFC set to  0.000000
12/19/2011	9:47:23 AM	BCl3 MFC set to  0.000000
12/19/2011	9:47:23 AM	PHl3 MFC set to  0.000000
12/19/2011	9:47:23 AM	SiCl4 MFC set to  0.000000
12/19/2011	9:47:23 AM	Bypass solenoid MFC set to  0.000000
12/19/2011	9:47:23 AM	Tube furnace set to 0
12/19/2011	9:47:53 AM	H2 valve closed
12/19/2011	9:47:53 AM	BCl3 valve closed
12/19/2011	9:47:53 AM	PH3 valve closed
12/19/2011	9:47:53 AM	SiCl4 pre valve closed
12/19/2011	9:47:53 AM	SiCl4 post valve closed
12/19/2011	9:47:53 AM	Bypass valve closed
12/19/2011	9:47:53 AM	Bubbler valve closed
12/19/2011	9:47:53 AM	Helium valve opened
12/19/2011	9:47:53 AM	Main Vac valve opened
12/19/2011	9:47:53 AM	Helium MFC set to  20.000000
12/19/2011	9:47:54 AM	H2 MFC set to  0.000000
12/19/2011	9:47:54 AM	BCl3 MFC set to  0.000000
12/19/2011	9:47:54 AM	PHl3 MFC set to  0.000000
12/19/2011	9:47:54 AM	SiCl4 MFC set to  0.000000
12/19/2011	9:47:54 AM	Bypass solenoid MFC set to  0.000000
12/19/2011	9:47:54 AM	Tube furnace set to 0
12/19/2011	9:48:24 AM	Helium valve closed
12/19/2011	9:48:24 AM	H2 valve closed
12/19/2011	9:48:24 AM	BCl3 valve closed
12/19/2011	9:48:24 AM	PH3 valve closed
12/19/2011	9:48:24 AM	SiCl4 pre valve closed
12/19/2011	9:48:24 AM	SiCl4 post valve closed
12/19/2011	9:48:24 AM	Bypass valve closed
12/19/2011	9:48:24 AM	Bubbler valve closed
12/19/2011	9:48:24 AM	Main Vac valve opened
12/19/2011	9:48:24 AM	Helium MFC set to  0.000000
12/19/2011	9:48:24 AM	H2 MFC set to  0.000000
12/19/2011	9:48:24 AM	BCl3 MFC set to  0.000000
12/19/2011	9:48:24 AM	PHl3 MFC set to  0.000000
12/19/2011	9:48:24 AM	SiCl4 MFC set to  0.000000
12/19/2011	9:48:24 AM	Bypass solenoid MFC set to  0.000000
12/19/2011	9:48:24 AM	Tube furnace set to 0
12/19/2011	9:48:54 AM	H2 valve closed
12/19/2011	9:48:54 AM	BCl3 valve closed
12/19/2011	9:48:54 AM	PH3 valve closed
12/19/2011	9:48:54 AM	SiCl4 pre valve closed
12/19/2011	9:48:54 AM	SiCl4 post valve closed
12/19/2011	9:48:54 AM	Bypass valve closed
12/19/2011	9:48:54 AM	Bubbler valve closed
12/19/2011	9:48:54 AM	Helium valve opened
12/19/2011	9:48:54 AM	Main Vac valve opened
12/19/2011	9:48:54 AM	Helium MFC set to  20.000000
12/19/2011	9:48:54 AM	H2 MFC set to  0.000000
12/19/2011	9:48:54 AM	BCl3 MFC set to  0.000000
12/19/2011	9:48:54 AM	PHl3 MFC set to  0.000000
12/19/2011	9:48:54 AM	SiCl4 MFC set to  0.000000
12/19/2011	9:48:54 AM	Bypass solenoid MFC set to  0.000000
12/19/2011	9:48:54 AM	Tube furnace set to 0
12/19/2011	9:49:24 AM	Helium valve closed
12/19/2011	9:49:24 AM	H2 valve closed
12/19/2011	9:49:24 AM	BCl3 valve closed
12/19/2011	9:49:24 AM	PH3 valve closed
12/19/2011	9:49:24 AM	SiCl4 pre valve closed
12/19/2011	9:49:24 AM	SiCl4 post valve closed
12/19/2011	9:49:24 AM	Bypass valve closed
12/19/2011	9:49:24 AM	Bubbler valve closed
12/19/2011	9:49:24 AM	Main Vac valve opened
12/19/2011	9:49:24 AM	Helium MFC set to  0.000000
12/19/2011	9:49:24 AM	H2 MFC set to  0.000000
12/19/2011	9:49:24 AM	BCl3 MFC set to  0.000000
12/19/2011	9:49:24 AM	PHl3 MFC set to  0.000000
12/19/2011	9:49:24 AM	SiCl4 MFC set to  0.000000
12/19/2011	9:49:24 AM	Bypass solenoid MFC set to  0.000000
12/19/2011	9:49:24 AM	Tube furnace set to 0
12/19/2011	9:49:54 AM	H2 valve closed
12/19/2011	9:49:54 AM	BCl3 valve closed
12/19/2011	9:49:54 AM	PH3 valve closed
12/19/2011	9:49:54 AM	SiCl4 pre valve closed
12/19/2011	9:49:54 AM	SiCl4 post valve closed
12/19/2011	9:49:54 AM	Bypass valve closed
12/19/2011	9:49:54 AM	Bubbler valve closed
12/19/2011	9:49:54 AM	Helium valve opened
12/19/2011	9:49:54 AM	Main Vac valve opened
12/19/2011	9:49:54 AM	Helium MFC set to  20.000000
12/19/2011	9:49:54 AM	H2 MFC set to  0.000000
12/19/2011	9:49:54 AM	BCl3 MFC set to  0.000000
12/19/2011	9:49:54 AM	PHl3 MFC set to  0.000000
12/19/2011	9:49:54 AM	SiCl4 MFC set to  0.000000
12/19/2011	9:49:54 AM	Bypass solenoid MFC set to  0.000000
12/19/2011	9:49:54 AM	Tube furnace set to 0
12/19/2011	9:50:24 AM	Helium valve closed
12/19/2011	9:50:24 AM	H2 valve closed
12/19/2011	9:50:24 AM	BCl3 valve closed
12/19/2011	9:50:24 AM	PH3 valve closed
12/19/2011	9:50:24 AM	SiCl4 pre valve closed
12/19/2011	9:50:24 AM	SiCl4 post valve closed
12/19/2011	9:50:24 AM	Bypass valve closed
12/19/2011	9:50:24 AM	Bubbler valve closed
12/19/2011	9:50:24 AM	Main Vac valve opened
12/19/2011	9:50:24 AM	Helium MFC set to  0.000000
12/19/2011	9:50:24 AM	H2 MFC set to  0.000000
12/19/2011	9:50:24 AM	BCl3 MFC set to  0.000000
12/19/2011	9:50:24 AM	PHl3 MFC set to  0.000000
12/19/2011	9:50:24 AM	SiCl4 MFC set to  0.000000
12/19/2011	9:50:25 AM	Bypass solenoid MFC set to  0.000000
12/19/2011	9:50:25 AM	Tube furnace set to 0
12/19/2011	9:50:55 AM	H2 valve closed
12/19/2011	9:50:55 AM	BCl3 valve closed
12/19/2011	9:50:55 AM	PH3 valve closed
12/19/2011	9:50:55 AM	SiCl4 pre valve closed
12/19/2011	9:50:55 AM	SiCl4 post valve closed
12/19/2011	9:50:55 AM	Bypass valve closed
12/19/2011	9:50:55 AM	Bubbler valve closed
12/19/2011	9:50:55 AM	Helium valve opened
12/19/2011	9:50:55 AM	Main Vac valve opened
12/19/2011	9:50:55 AM	Helium MFC set to  20.000000
12/19/2011	9:50:55 AM	H2 MFC set to  0.000000
12/19/2011	9:50:55 AM	BCl3 MFC set to  0.000000
12/19/2011	9:50:55 AM	PHl3 MFC set to  0.000000
12/19/2011	9:50:55 AM	SiCl4 MFC set to  0.000000
12/19/2011	9:50:55 AM	Bypass solenoid MFC set to  0.000000
12/19/2011	9:50:55 AM	Tube furnace set to 0
12/19/2011	9:51:25 AM	Helium valve closed
12/19/2011	9:51:25 AM	H2 valve closed
12/19/2011	9:51:25 AM	BCl3 valve closed
12/19/2011	9:51:25 AM	PH3 valve closed
12/19/2011	9:51:25 AM	SiCl4 pre valve closed
12/19/2011	9:51:25 AM	SiCl4 post valve closed
12/19/2011	9:51:25 AM	Bypass valve closed
12/19/2011	9:51:25 AM	Bubbler valve closed
12/19/2011	9:51:25 AM	Main Vac valve opened
12/19/2011	9:51:25 AM	Helium MFC set to  0.000000
12/19/2011	9:51:25 AM	H2 MFC set to  0.000000
12/19/2011	9:51:25 AM	BCl3 MFC set to  0.000000
12/19/2011	9:51:25 AM	PHl3 MFC set to  0.000000
12/19/2011	9:51:25 AM	SiCl4 MFC set to  0.000000
12/19/2011	9:51:25 AM	Bypass solenoid MFC set to  0.000000
12/19/2011	9:51:25 AM	Tube furnace set to 0
12/19/2011	9:51:55 AM	H2 valve closed
12/19/2011	9:51:55 AM	BCl3 valve closed
12/19/2011	9:51:55 AM	PH3 valve closed
12/19/2011	9:51:55 AM	SiCl4 pre valve closed
12/19/2011	9:51:55 AM	SiCl4 post valve closed
12/19/2011	9:51:55 AM	Bypass valve closed
12/19/2011	9:51:55 AM	Bubbler valve closed
12/19/2011	9:51:55 AM	Helium valve opened
12/19/2011	9:51:55 AM	Main Vac valve opened
12/19/2011	9:51:55 AM	Helium MFC set to  20.000000
12/19/2011	9:51:55 AM	H2 MFC set to  0.000000
12/19/2011	9:51:55 AM	BCl3 MFC set to  0.000000
12/19/2011	9:51:55 AM	PHl3 MFC set to  0.000000
12/19/2011	9:51:55 AM	SiCl4 MFC set to  0.000000
12/19/2011	9:51:55 AM	Bypass solenoid MFC set to  0.000000
12/19/2011	9:51:55 AM	Tube furnace set to 0
12/19/2011	9:52:25 AM	Helium valve closed
12/19/2011	9:52:25 AM	H2 valve closed
12/19/2011	9:52:25 AM	BCl3 valve closed
12/19/2011	9:52:25 AM	PH3 valve closed
12/19/2011	9:52:25 AM	SiCl4 pre valve closed
12/19/2011	9:52:25 AM	SiCl4 post valve closed
12/19/2011	9:52:25 AM	Bypass valve closed
12/19/2011	9:52:25 AM	Bubbler valve closed
12/19/2011	9:52:25 AM	Main Vac valve opened
12/19/2011	9:52:25 AM	Helium MFC set to  0.000000
12/19/2011	9:52:25 AM	H2 MFC set to  0.000000
12/19/2011	9:52:25 AM	BCl3 MFC set to  0.000000
12/19/2011	9:52:25 AM	PHl3 MFC set to  0.000000
12/19/2011	9:52:25 AM	SiCl4 MFC set to  0.000000
12/19/2011	9:52:25 AM	Bypass solenoid MFC set to  0.000000
12/19/2011	9:52:25 AM	Tube furnace set to 0
12/19/2011	9:52:55 AM	H2 valve closed
12/19/2011	9:52:55 AM	BCl3 valve closed
12/19/2011	9:52:55 AM	PH3 valve closed
12/19/2011	9:52:55 AM	SiCl4 pre valve closed
12/19/2011	9:52:55 AM	SiCl4 post valve closed
12/19/2011	9:52:55 AM	Bypass valve closed
12/19/2011	9:52:55 AM	Bubbler valve closed
12/19/2011	9:52:55 AM	Helium valve opened
12/19/2011	9:52:55 AM	Main Vac valve opened
12/19/2011	9:52:55 AM	Helium MFC set to  20.000000
12/19/2011	9:52:55 AM	H2 MFC set to  0.000000
12/19/2011	9:52:55 AM	BCl3 MFC set to  0.000000
12/19/2011	9:52:55 AM	PHl3 MFC set to  0.000000
12/19/2011	9:52:55 AM	SiCl4 MFC set to  0.000000
12/19/2011	9:52:55 AM	Bypass solenoid MFC set to  0.000000
12/19/2011	9:52:56 AM	Tube furnace set to 0
12/19/2011	9:53:26 AM	Helium valve closed
12/19/2011	9:53:26 AM	H2 valve closed
12/19/2011	9:53:26 AM	BCl3 valve closed
12/19/2011	9:53:26 AM	PH3 valve closed
12/19/2011	9:53:26 AM	SiCl4 pre valve closed
12/19/2011	9:53:26 AM	SiCl4 post valve closed
12/19/2011	9:53:26 AM	Bypass valve closed
12/19/2011	9:53:26 AM	Bubbler valve closed
12/19/2011	9:53:26 AM	Main Vac valve opened
12/19/2011	9:53:26 AM	Helium MFC set to  0.000000
12/19/2011	9:53:26 AM	H2 MFC set to  0.000000
12/19/2011	9:53:26 AM	BCl3 MFC set to  0.000000
12/19/2011	9:53:26 AM	PHl3 MFC set to  0.000000
12/19/2011	9:53:26 AM	SiCl4 MFC set to  0.000000
12/19/2011	9:53:26 AM	Bypass solenoid MFC set to  0.000000
12/19/2011	9:53:26 AM	Tube furnace set to 0
12/19/2011	9:53:56 AM	H2 valve closed
12/19/2011	9:53:56 AM	BCl3 valve closed
12/19/2011	9:53:56 AM	PH3 valve closed
12/19/2011	9:53:56 AM	SiCl4 pre valve closed
12/19/2011	9:53:56 AM	SiCl4 post valve closed
12/19/2011	9:53:56 AM	Bypass valve closed
12/19/2011	9:53:56 AM	Bubbler valve closed
12/19/2011	9:53:56 AM	Helium valve opened
12/19/2011	9:53:56 AM	Main Vac valve opened
12/19/2011	9:53:56 AM	Helium MFC set to  20.000000
12/19/2011	9:53:56 AM	H2 MFC set to  0.000000
12/19/2011	9:53:56 AM	BCl3 MFC set to  0.000000
12/19/2011	9:53:56 AM	PHl3 MFC set to  0.000000
12/19/2011	9:53:56 AM	SiCl4 MFC set to  0.000000
12/19/2011	9:53:56 AM	Bypass solenoid MFC set to  0.000000
12/19/2011	9:53:56 AM	Tube furnace set to 0
12/19/2011	9:54:26 AM	Helium valve closed
12/19/2011	9:54:26 AM	H2 valve closed
12/19/2011	9:54:26 AM	BCl3 valve closed
12/19/2011	9:54:26 AM	PH3 valve closed
12/19/2011	9:54:26 AM	SiCl4 pre valve closed
12/19/2011	9:54:26 AM	SiCl4 post valve closed
12/19/2011	9:54:26 AM	Bypass valve closed
12/19/2011	9:54:26 AM	Bubbler valve closed
12/19/2011	9:54:26 AM	Main Vac valve opened
12/19/2011	9:54:26 AM	Helium MFC set to  0.000000
12/19/2011	9:54:26 AM	H2 MFC set to  0.000000
12/19/2011	9:54:26 AM	BCl3 MFC set to  0.000000
12/19/2011	9:54:26 AM	PHl3 MFC set to  0.000000
12/19/2011	9:54:26 AM	SiCl4 MFC set to  0.000000
12/19/2011	9:54:26 AM	Bypass solenoid MFC set to  0.000000
12/19/2011	9:54:26 AM	Tube furnace set to 0
12/19/2011	9:54:56 AM	H2 valve closed
12/19/2011	9:54:56 AM	BCl3 valve closed
12/19/2011	9:54:56 AM	PH3 valve closed
12/19/2011	9:54:56 AM	SiCl4 pre valve closed
12/19/2011	9:54:56 AM	SiCl4 post valve closed
12/19/2011	9:54:56 AM	Bypass valve closed
12/19/2011	9:54:56 AM	Bubbler valve closed
12/19/2011	9:54:56 AM	Helium valve opened
12/19/2011	9:54:56 AM	Main Vac valve opened
12/19/2011	9:54:56 AM	Helium MFC set to  20.000000
12/19/2011	9:54:56 AM	H2 MFC set to  0.000000
12/19/2011	9:54:56 AM	BCl3 MFC set to  0.000000
12/19/2011	9:54:56 AM	PHl3 MFC set to  0.000000
12/19/2011	9:54:56 AM	SiCl4 MFC set to  0.000000
12/19/2011	9:54:56 AM	Bypass solenoid MFC set to  0.000000
12/19/2011	9:54:56 AM	Tube furnace set to 0
12/19/2011	9:55:26 AM	Helium valve closed
12/19/2011	9:55:27 AM	H2 valve closed
12/19/2011	9:55:27 AM	BCl3 valve closed
12/19/2011	9:55:27 AM	PH3 valve closed
12/19/2011	9:55:27 AM	SiCl4 pre valve closed
12/19/2011	9:55:27 AM	SiCl4 post valve closed
12/19/2011	9:55:27 AM	Bypass valve closed
12/19/2011	9:55:27 AM	Bubbler valve closed
12/19/2011	9:55:27 AM	Main Vac valve opened
12/19/2011	9:55:27 AM	Helium MFC set to  0.000000
12/19/2011	9:55:27 AM	H2 MFC set to  0.000000
12/19/2011	9:55:27 AM	BCl3 MFC set to  0.000000
12/19/2011	9:55:27 AM	PHl3 MFC set to  0.000000
12/19/2011	9:55:27 AM	SiCl4 MFC set to  0.000000
12/19/2011	9:55:27 AM	Bypass solenoid MFC set to  0.000000
12/19/2011	9:55:27 AM	Tube furnace set to 0
12/19/2011	9:55:28 AM	Run finished at 9:55 AM
12/19/2011	9:55:28 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
12/19/2011	9:58:36 AM	Main Vac valve closed
12/19/2011	9:59:05 AM	Main Vac valve opened
12/19/2011	10:03:16 AM	Recipe started at 10:03 AM
12/19/2011	10:03:16 AM	Helium valve closed
12/19/2011	10:03:16 AM	H2 valve closed
12/19/2011	10:03:16 AM	BCl3 valve closed
12/19/2011	10:03:16 AM	PH3 valve closed
12/19/2011	10:03:16 AM	SiCl4 pre valve closed
12/19/2011	10:03:16 AM	SiCl4 post valve closed
12/19/2011	10:03:16 AM	Main Vac valve closed
12/19/2011	10:03:16 AM	Bypass valve closed
12/19/2011	10:03:16 AM	Bubbler valve closed
12/19/2011	10:03:16 AM	Helium MFC set to  0.000000
12/19/2011	10:03:16 AM	H2 MFC set to  0.000000
12/19/2011	10:03:16 AM	BCl3 MFC set to  0.000000
12/19/2011	10:03:16 AM	PHl3 MFC set to  0.000000
12/19/2011	10:03:16 AM	SiCl4 MFC set to  0.000000
12/19/2011	10:03:16 AM	Bypass solenoid MFC set to  0.000000
12/19/2011	10:03:17 AM	Tube furnace set to 0
12/19/2011	10:03:20 AM	Helium valve closed
12/19/2011	10:03:20 AM	BCl3 valve closed
12/19/2011	10:03:20 AM	PH3 valve closed
12/19/2011	10:03:20 AM	SiCl4 pre valve closed
12/19/2011	10:03:20 AM	SiCl4 post valve closed
12/19/2011	10:03:20 AM	Main Vac valve closed
12/19/2011	10:03:20 AM	Bypass valve closed
12/19/2011	10:03:20 AM	Bubbler valve closed
12/19/2011	10:03:20 AM	H2 valve opened
12/19/2011	10:03:20 AM	Helium MFC set to  0.000000
12/19/2011	10:03:20 AM	H2 MFC set to  500.000000
12/19/2011	10:03:20 AM	BCl3 MFC set to  0.000000
12/19/2011	10:03:20 AM	PHl3 MFC set to  0.000000
12/19/2011	10:03:20 AM	SiCl4 MFC set to  0.000000
12/19/2011	10:03:20 AM	Bypass solenoid MFC set to  0.000000
12/19/2011	10:03:20 AM	Tube furnace set to 0
12/19/2011	10:04:27 AM	Helium valve closed
12/19/2011	10:04:27 AM	BCl3 valve closed
12/19/2011	10:04:27 AM	PH3 valve closed
12/19/2011	10:04:27 AM	SiCl4 pre valve closed
12/19/2011	10:04:27 AM	SiCl4 post valve closed
12/19/2011	10:04:27 AM	Main Vac valve closed
12/19/2011	10:04:27 AM	Bypass valve closed
12/19/2011	10:04:28 AM	H2 valve opened
12/19/2011	10:04:28 AM	Bubbler valve opened
12/19/2011	10:04:28 AM	Helium MFC set to  0.000000
12/19/2011	10:04:28 AM	H2 MFC set to  500.000000
12/19/2011	10:04:28 AM	BCl3 MFC set to  0.000000
12/19/2011	10:04:28 AM	PHl3 MFC set to  0.000000
12/19/2011	10:04:28 AM	SiCl4 MFC set to  0.000000
12/19/2011	10:04:28 AM	Bypass solenoid MFC set to  0.000000
12/19/2011	10:04:28 AM	Tube furnace set to 0
12/19/2011	10:04:29 AM	Helium valve closed
12/19/2011	10:04:29 AM	BCl3 valve closed
12/19/2011	10:04:29 AM	PH3 valve closed
12/19/2011	10:04:29 AM	SiCl4 pre valve closed
12/19/2011	10:04:29 AM	SiCl4 post valve closed
12/19/2011	10:04:29 AM	Main Vac valve closed
12/19/2011	10:04:29 AM	Bypass valve closed
12/19/2011	10:04:29 AM	H2 valve opened
12/19/2011	10:04:29 AM	Bubbler valve opened
12/19/2011	10:04:29 AM	Helium MFC set to  0.000000
12/19/2011	10:04:29 AM	H2 MFC set to  500.000000
12/19/2011	10:04:29 AM	BCl3 MFC set to  0.000000
12/19/2011	10:04:29 AM	PHl3 MFC set to  0.000000
12/19/2011	10:04:29 AM	SiCl4 MFC set to  0.000000
12/19/2011	10:04:29 AM	Bypass solenoid MFC set to  0.000000
12/19/2011	10:04:29 AM	Tube furnace set to 950
12/19/2011	10:19:29 AM	Helium valve closed
12/19/2011	10:19:29 AM	PH3 valve closed
12/19/2011	10:19:29 AM	SiCl4 pre valve closed
12/19/2011	10:19:29 AM	SiCl4 post valve closed
12/19/2011	10:19:29 AM	Main Vac valve closed
12/19/2011	10:19:29 AM	Bypass valve closed
12/19/2011	10:19:29 AM	H2 valve opened
12/19/2011	10:19:29 AM	BCl3 valve opened
12/19/2011	10:19:29 AM	Bubbler valve opened
12/19/2011	10:19:29 AM	Helium MFC set to  0.000000
12/19/2011	10:19:29 AM	H2 MFC set to  400.000000
12/19/2011	10:19:29 AM	BCl3 MFC set to  20.000000
12/19/2011	10:19:29 AM	PHl3 MFC set to  0.000000
12/19/2011	10:19:29 AM	SiCl4 MFC set to  0.000000
12/19/2011	10:19:29 AM	Bypass solenoid MFC set to  0.000000
12/19/2011	10:19:29 AM	Tube furnace set to 950
12/19/2011	10:49:29 AM	Helium valve closed
12/19/2011	10:49:29 AM	BCl3 valve closed
12/19/2011	10:49:29 AM	PH3 valve closed
12/19/2011	10:49:29 AM	SiCl4 pre valve closed
12/19/2011	10:49:29 AM	SiCl4 post valve closed
12/19/2011	10:49:29 AM	Main Vac valve closed
12/19/2011	10:49:29 AM	Bypass valve closed
12/19/2011	10:49:29 AM	H2 valve opened
12/19/2011	10:49:29 AM	Bubbler valve opened
12/19/2011	10:49:29 AM	Helium MFC set to  0.000000
12/19/2011	10:49:29 AM	H2 MFC set to  500.000000
12/19/2011	10:49:29 AM	BCl3 MFC set to  0.000000
12/19/2011	10:49:29 AM	PHl3 MFC set to  0.000000
12/19/2011	10:49:29 AM	SiCl4 MFC set to  0.000000
12/19/2011	10:49:29 AM	Bypass solenoid MFC set to  0.000000
12/19/2011	10:49:29 AM	Tube furnace set to 750
12/19/2011	10:54:29 AM	H2 valve closed
12/19/2011	10:54:29 AM	BCl3 valve closed
12/19/2011	10:54:29 AM	PH3 valve closed
12/19/2011	10:54:29 AM	SiCl4 pre valve closed
12/19/2011	10:54:29 AM	SiCl4 post valve closed
12/19/2011	10:54:29 AM	Main Vac valve closed
12/19/2011	10:54:29 AM	Bypass valve closed
12/19/2011	10:54:29 AM	Helium valve opened
12/19/2011	10:54:29 AM	Bubbler valve opened
12/19/2011	10:54:29 AM	Helium MFC set to  500.000000
12/19/2011	10:54:29 AM	H2 MFC set to  0.000000
12/19/2011	10:54:29 AM	BCl3 MFC set to  0.000000
12/19/2011	10:54:29 AM	PHl3 MFC set to  0.000000
12/19/2011	10:54:29 AM	SiCl4 MFC set to  0.000000
12/19/2011	10:54:29 AM	Bypass solenoid MFC set to  0.000000
12/19/2011	10:54:29 AM	Tube furnace set to 0
12/19/2011	11:14:29 AM	Helium valve closed
12/19/2011	11:14:29 AM	H2 valve closed
12/19/2011	11:14:29 AM	BCl3 valve closed
12/19/2011	11:14:29 AM	PH3 valve closed
12/19/2011	11:14:29 AM	SiCl4 pre valve closed
12/19/2011	11:14:29 AM	SiCl4 post valve closed
12/19/2011	11:14:29 AM	Main Vac valve closed
12/19/2011	11:14:29 AM	Bypass valve closed
12/19/2011	11:14:29 AM	Bubbler valve closed
12/19/2011	11:14:29 AM	Helium MFC set to  0.000000
12/19/2011	11:14:29 AM	H2 MFC set to  0.000000
12/19/2011	11:14:29 AM	BCl3 MFC set to  0.000000
12/19/2011	11:14:29 AM	PHl3 MFC set to  0.000000
12/19/2011	11:14:29 AM	SiCl4 MFC set to  0.000000
12/19/2011	11:14:29 AM	Bypass solenoid MFC set to  0.000000
12/19/2011	11:14:30 AM	Tube furnace set to 0
12/19/2011	11:14:31 AM	Run finished at 11:14 AM
12/19/2011	11:20:14 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/19/2011	11:20:15 AM	Recipe started at 11:20 AM
12/19/2011	11:20:15 AM	Helium valve closed
12/19/2011	11:20:15 AM	H2 valve closed
12/19/2011	11:20:15 AM	BCl3 valve closed
12/19/2011	11:20:15 AM	PH3 valve closed
12/19/2011	11:20:15 AM	SiCl4 pre valve closed
12/19/2011	11:20:15 AM	SiCl4 post valve closed
12/19/2011	11:20:15 AM	Main Vac valve closed
12/19/2011	11:20:15 AM	Bypass valve closed
12/19/2011	11:20:15 AM	Bubbler valve closed
12/19/2011	11:20:15 AM	Helium MFC set to  0.000000
12/19/2011	11:20:15 AM	H2 MFC set to  0.000000
12/19/2011	11:20:15 AM	BCl3 MFC set to  0.000000
12/19/2011	11:20:15 AM	PHl3 MFC set to  0.000000
12/19/2011	11:20:15 AM	SiCl4 MFC set to  0.000000
12/19/2011	11:20:15 AM	Bypass solenoid MFC set to  0.000000
12/19/2011	11:20:15 AM	Tube furnace set to 0
12/19/2011	11:20:18 AM	H2 valve closed
12/19/2011	11:20:18 AM	BCl3 valve closed
12/19/2011	11:20:18 AM	PH3 valve closed
12/19/2011	11:20:18 AM	SiCl4 pre valve closed
12/19/2011	11:20:18 AM	SiCl4 post valve closed
12/19/2011	11:20:18 AM	Main Vac valve closed
12/19/2011	11:20:18 AM	Bypass valve closed
12/19/2011	11:20:18 AM	Bubbler valve closed
12/19/2011	11:20:18 AM	Helium valve opened
12/19/2011	11:20:18 AM	Helium MFC set to  500.000000
12/19/2011	11:20:18 AM	H2 MFC set to  0.000000
12/19/2011	11:20:18 AM	BCl3 MFC set to  0.000000
12/19/2011	11:20:18 AM	PHl3 MFC set to  0.000000
12/19/2011	11:20:18 AM	SiCl4 MFC set to  0.000000
12/19/2011	11:20:18 AM	Bypass solenoid MFC set to  0.000000
12/19/2011	11:20:18 AM	Tube furnace set to 0
12/19/2011	11:20:18 AM	Helium valve closed
12/19/2011	11:20:18 AM	H2 valve closed
12/19/2011	11:20:18 AM	BCl3 valve closed
12/19/2011	11:20:18 AM	PH3 valve closed
12/19/2011	11:20:18 AM	SiCl4 pre valve closed
12/19/2011	11:20:18 AM	SiCl4 post valve closed
12/19/2011	11:20:18 AM	Main Vac valve closed
12/19/2011	11:20:18 AM	Bypass valve closed
12/19/2011	11:20:18 AM	Bubbler valve closed
12/19/2011	11:20:18 AM	Helium MFC set to  0.000000
12/19/2011	11:20:18 AM	H2 MFC set to  0.000000
12/19/2011	11:20:18 AM	BCl3 MFC set to  0.000000
12/19/2011	11:20:18 AM	PHl3 MFC set to  0.000000
12/19/2011	11:20:18 AM	SiCl4 MFC set to  0.000000
12/19/2011	11:20:18 AM	Bypass solenoid MFC set to  0.000000
12/19/2011	11:20:18 AM	Tube furnace set to 0
12/19/2011	11:20:19 AM	Run finished at 11:20 AM
12/19/2011	11:20:19 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/19/2011	11:23:08 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/19/2011	11:23:09 AM	Recipe started at 11:23 AM
12/19/2011	11:23:09 AM	Helium valve closed
12/19/2011	11:23:09 AM	H2 valve closed
12/19/2011	11:23:09 AM	BCl3 valve closed
12/19/2011	11:23:09 AM	PH3 valve closed
12/19/2011	11:23:09 AM	SiCl4 pre valve closed
12/19/2011	11:23:09 AM	SiCl4 post valve closed
12/19/2011	11:23:09 AM	Main Vac valve closed
12/19/2011	11:23:09 AM	Bubbler valve closed
12/19/2011	11:23:09 AM	Bypass valve opened
12/19/2011	11:23:09 AM	Helium MFC set to  0.000000
12/19/2011	11:23:09 AM	H2 MFC set to  0.000000
12/19/2011	11:23:09 AM	BCl3 MFC set to  0.000000
12/19/2011	11:23:09 AM	PHl3 MFC set to  0.000000
12/19/2011	11:23:09 AM	SiCl4 MFC set to  0.000000
12/19/2011	11:23:09 AM	Bypass solenoid MFC set to  0.000000
12/19/2011	11:23:09 AM	Tube furnace set to 0
12/19/2011	11:25:28 AM	Helium valve closed
12/19/2011	11:25:28 AM	H2 valve closed
12/19/2011	11:25:28 AM	BCl3 valve closed
12/19/2011	11:25:28 AM	PH3 valve closed
12/19/2011	11:25:28 AM	SiCl4 pre valve closed
12/19/2011	11:25:28 AM	SiCl4 post valve closed
12/19/2011	11:25:28 AM	Main Vac valve closed
12/19/2011	11:25:28 AM	Bubbler valve closed
12/19/2011	11:25:28 AM	Bypass valve opened
12/19/2011	11:25:28 AM	Helium MFC set to  0.000000
12/19/2011	11:25:28 AM	H2 MFC set to  0.000000
12/19/2011	11:25:28 AM	BCl3 MFC set to  0.000000
12/19/2011	11:25:28 AM	PHl3 MFC set to  0.000000
12/19/2011	11:25:28 AM	SiCl4 MFC set to  0.000000
12/19/2011	11:25:28 AM	Bypass solenoid MFC set to  0.000000
12/19/2011	11:25:29 AM	Tube furnace set to 0
12/19/2011	11:25:33 AM	Helium valve closed
12/19/2011	11:25:33 AM	H2 valve closed
12/19/2011	11:25:33 AM	BCl3 valve closed
12/19/2011	11:25:33 AM	PH3 valve closed
12/19/2011	11:25:33 AM	SiCl4 pre valve closed
12/19/2011	11:25:33 AM	SiCl4 post valve closed
12/19/2011	11:25:33 AM	Bypass valve closed
12/19/2011	11:25:33 AM	Bubbler valve closed
12/19/2011	11:25:33 AM	Main Vac valve opened
12/19/2011	11:25:33 AM	Helium MFC set to  0.000000
12/19/2011	11:25:33 AM	H2 MFC set to  0.000000
12/19/2011	11:25:33 AM	BCl3 MFC set to  0.000000
12/19/2011	11:25:33 AM	PHl3 MFC set to  0.000000
12/19/2011	11:25:33 AM	SiCl4 MFC set to  0.000000
12/19/2011	11:25:33 AM	Bypass solenoid MFC set to  0.000000
12/19/2011	11:25:33 AM	Tube furnace set to 0
12/19/2011	11:25:34 AM	Run finished at 11:25 AM
12/19/2011	11:25:34 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/19/2011	11:27:48 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
12/19/2011	11:28:00 AM	Recipe started at 11:27 AM
12/19/2011	11:28:00 AM	Helium valve closed
12/19/2011	11:28:00 AM	H2 valve closed
12/19/2011	11:28:00 AM	BCl3 valve closed
12/19/2011	11:28:00 AM	PH3 valve closed
12/19/2011	11:28:00 AM	SiCl4 pre valve closed
12/19/2011	11:28:00 AM	SiCl4 post valve closed
12/19/2011	11:28:00 AM	Main Vac valve closed
12/19/2011	11:28:00 AM	Bubbler valve closed
12/19/2011	11:28:00 AM	Bypass valve opened
12/19/2011	11:28:00 AM	Helium MFC set to  0.000000
12/19/2011	11:28:00 AM	H2 MFC set to  0.000000
12/19/2011	11:28:00 AM	BCl3 MFC set to  0.000000
12/19/2011	11:28:00 AM	PHl3 MFC set to  0.000000
12/19/2011	11:28:00 AM	SiCl4 MFC set to  0.000000
12/19/2011	11:28:00 AM	Bypass solenoid MFC set to  0.000000
12/19/2011	11:28:00 AM	Tube furnace set to 0
12/19/2011	11:28:01 AM	Helium valve closed
12/19/2011	11:28:01 AM	H2 valve closed
12/19/2011	11:28:01 AM	BCl3 valve closed
12/19/2011	11:28:01 AM	PH3 valve closed
12/19/2011	11:28:01 AM	SiCl4 pre valve closed
12/19/2011	11:28:01 AM	SiCl4 post valve closed
12/19/2011	11:28:01 AM	Main Vac valve closed
12/19/2011	11:28:01 AM	Bubbler valve closed
12/19/2011	11:28:01 AM	Bypass valve opened
12/19/2011	11:28:01 AM	Helium MFC set to  0.000000
12/19/2011	11:28:01 AM	H2 MFC set to  0.000000
12/19/2011	11:28:01 AM	BCl3 MFC set to  0.000000
12/19/2011	11:28:01 AM	PHl3 MFC set to  0.000000
12/19/2011	11:28:01 AM	SiCl4 MFC set to  0.000000
12/19/2011	11:28:01 AM	Bypass solenoid MFC set to  0.000000
12/19/2011	11:28:01 AM	Tube furnace set to 0
12/19/2011	11:28:02 AM	Helium valve closed
12/19/2011	11:28:02 AM	H2 valve closed
12/19/2011	11:28:02 AM	BCl3 valve closed
12/19/2011	11:28:02 AM	PH3 valve closed
12/19/2011	11:28:02 AM	SiCl4 pre valve closed
12/19/2011	11:28:02 AM	SiCl4 post valve closed
12/19/2011	11:28:02 AM	Bypass valve closed
12/19/2011	11:28:02 AM	Bubbler valve closed
12/19/2011	11:28:02 AM	Main Vac valve opened
12/19/2011	11:28:02 AM	Helium MFC set to  0.000000
12/19/2011	11:28:02 AM	H2 MFC set to  0.000000
12/19/2011	11:28:02 AM	BCl3 MFC set to  0.000000
12/19/2011	11:28:02 AM	PHl3 MFC set to  0.000000
12/19/2011	11:28:02 AM	SiCl4 MFC set to  0.000000
12/19/2011	11:28:02 AM	Bypass solenoid MFC set to  0.000000
12/19/2011	11:28:02 AM	Tube furnace set to 0
12/19/2011	11:28:02 AM	H2 valve closed
12/19/2011	11:28:02 AM	BCl3 valve closed
12/19/2011	11:28:02 AM	PH3 valve closed
12/19/2011	11:28:02 AM	SiCl4 pre valve closed
12/19/2011	11:28:02 AM	SiCl4 post valve closed
12/19/2011	11:28:02 AM	Bypass valve closed
12/19/2011	11:28:02 AM	Bubbler valve closed
12/19/2011	11:28:02 AM	Helium valve opened
12/19/2011	11:28:02 AM	Main Vac valve opened
12/19/2011	11:28:02 AM	Helium MFC set to  20.000000
12/19/2011	11:28:02 AM	H2 MFC set to  0.000000
12/19/2011	11:28:02 AM	BCl3 MFC set to  0.000000
12/19/2011	11:28:02 AM	PHl3 MFC set to  0.000000
12/19/2011	11:28:02 AM	SiCl4 MFC set to  0.000000
12/19/2011	11:28:02 AM	Bypass solenoid MFC set to  0.000000
12/19/2011	11:28:02 AM	Tube furnace set to 0
12/19/2011	11:28:32 AM	Helium valve closed
12/19/2011	11:28:32 AM	H2 valve closed
12/19/2011	11:28:32 AM	BCl3 valve closed
12/19/2011	11:28:32 AM	PH3 valve closed
12/19/2011	11:28:32 AM	SiCl4 pre valve closed
12/19/2011	11:28:32 AM	SiCl4 post valve closed
12/19/2011	11:28:32 AM	Bypass valve closed
12/19/2011	11:28:32 AM	Bubbler valve closed
12/19/2011	11:28:32 AM	Main Vac valve opened
12/19/2011	11:28:32 AM	Helium MFC set to  0.000000
12/19/2011	11:28:32 AM	H2 MFC set to  0.000000
12/19/2011	11:28:32 AM	BCl3 MFC set to  0.000000
12/19/2011	11:28:32 AM	PHl3 MFC set to  0.000000
12/19/2011	11:28:32 AM	SiCl4 MFC set to  0.000000
12/19/2011	11:28:32 AM	Bypass solenoid MFC set to  0.000000
12/19/2011	11:28:33 AM	Tube furnace set to 0
12/19/2011	11:29:03 AM	H2 valve closed
12/19/2011	11:29:03 AM	BCl3 valve closed
12/19/2011	11:29:03 AM	PH3 valve closed
12/19/2011	11:29:03 AM	SiCl4 pre valve closed
12/19/2011	11:29:03 AM	SiCl4 post valve closed
12/19/2011	11:29:03 AM	Bypass valve closed
12/19/2011	11:29:03 AM	Bubbler valve closed
12/19/2011	11:29:03 AM	Helium valve opened
12/19/2011	11:29:03 AM	Main Vac valve opened
12/19/2011	11:29:03 AM	Helium MFC set to  20.000000
12/19/2011	11:29:03 AM	H2 MFC set to  0.000000
12/19/2011	11:29:03 AM	BCl3 MFC set to  0.000000
12/19/2011	11:29:03 AM	PHl3 MFC set to  0.000000
12/19/2011	11:29:03 AM	SiCl4 MFC set to  0.000000
12/19/2011	11:29:03 AM	Bypass solenoid MFC set to  0.000000
12/19/2011	11:29:03 AM	Tube furnace set to 0
12/19/2011	11:29:33 AM	Helium valve closed
12/19/2011	11:29:33 AM	H2 valve closed
12/19/2011	11:29:33 AM	BCl3 valve closed
12/19/2011	11:29:33 AM	PH3 valve closed
12/19/2011	11:29:33 AM	SiCl4 pre valve closed
12/19/2011	11:29:33 AM	SiCl4 post valve closed
12/19/2011	11:29:33 AM	Bypass valve closed
12/19/2011	11:29:33 AM	Bubbler valve closed
12/19/2011	11:29:33 AM	Main Vac valve opened
12/19/2011	11:29:33 AM	Helium MFC set to  0.000000
12/19/2011	11:29:33 AM	H2 MFC set to  0.000000
12/19/2011	11:29:33 AM	BCl3 MFC set to  0.000000
12/19/2011	11:29:33 AM	PHl3 MFC set to  0.000000
12/19/2011	11:29:33 AM	SiCl4 MFC set to  0.000000
12/19/2011	11:29:33 AM	Bypass solenoid MFC set to  0.000000
12/19/2011	11:29:33 AM	Tube furnace set to 0
12/19/2011	11:30:03 AM	H2 valve closed
12/19/2011	11:30:03 AM	BCl3 valve closed
12/19/2011	11:30:03 AM	PH3 valve closed
12/19/2011	11:30:03 AM	SiCl4 pre valve closed
12/19/2011	11:30:03 AM	SiCl4 post valve closed
12/19/2011	11:30:03 AM	Bypass valve closed
12/19/2011	11:30:03 AM	Bubbler valve closed
12/19/2011	11:30:03 AM	Helium valve opened
12/19/2011	11:30:03 AM	Main Vac valve opened
12/19/2011	11:30:03 AM	Helium MFC set to  20.000000
12/19/2011	11:30:03 AM	H2 MFC set to  0.000000
12/19/2011	11:30:03 AM	BCl3 MFC set to  0.000000
12/19/2011	11:30:03 AM	PHl3 MFC set to  0.000000
12/19/2011	11:30:03 AM	SiCl4 MFC set to  0.000000
12/19/2011	11:30:03 AM	Bypass solenoid MFC set to  0.000000
12/19/2011	11:30:03 AM	Tube furnace set to 0
12/19/2011	11:30:33 AM	Helium valve closed
12/19/2011	11:30:33 AM	H2 valve closed
12/19/2011	11:30:33 AM	BCl3 valve closed
12/19/2011	11:30:33 AM	PH3 valve closed
12/19/2011	11:30:33 AM	SiCl4 pre valve closed
12/19/2011	11:30:33 AM	SiCl4 post valve closed
12/19/2011	11:30:33 AM	Bypass valve closed
12/19/2011	11:30:33 AM	Bubbler valve closed
12/19/2011	11:30:33 AM	Main Vac valve opened
12/19/2011	11:30:33 AM	Helium MFC set to  0.000000
12/19/2011	11:30:33 AM	H2 MFC set to  0.000000
12/19/2011	11:30:33 AM	BCl3 MFC set to  0.000000
12/19/2011	11:30:33 AM	PHl3 MFC set to  0.000000
12/19/2011	11:30:33 AM	SiCl4 MFC set to  0.000000
12/19/2011	11:30:33 AM	Bypass solenoid MFC set to  0.000000
12/19/2011	11:30:33 AM	Tube furnace set to 0
12/19/2011	11:31:03 AM	H2 valve closed
12/19/2011	11:31:03 AM	BCl3 valve closed
12/19/2011	11:31:03 AM	PH3 valve closed
12/19/2011	11:31:03 AM	SiCl4 pre valve closed
12/19/2011	11:31:03 AM	SiCl4 post valve closed
12/19/2011	11:31:03 AM	Bypass valve closed
12/19/2011	11:31:03 AM	Bubbler valve closed
12/19/2011	11:31:03 AM	Helium valve opened
12/19/2011	11:31:03 AM	Main Vac valve opened
12/19/2011	11:31:03 AM	Helium MFC set to  20.000000
12/19/2011	11:31:03 AM	H2 MFC set to  0.000000
12/19/2011	11:31:03 AM	BCl3 MFC set to  0.000000
12/19/2011	11:31:03 AM	PHl3 MFC set to  0.000000
12/19/2011	11:31:03 AM	SiCl4 MFC set to  0.000000
12/19/2011	11:31:03 AM	Bypass solenoid MFC set to  0.000000
12/19/2011	11:31:04 AM	Tube furnace set to 0
12/19/2011	11:31:34 AM	Helium valve closed
12/19/2011	11:31:34 AM	H2 valve closed
12/19/2011	11:31:34 AM	BCl3 valve closed
12/19/2011	11:31:34 AM	PH3 valve closed
12/19/2011	11:31:34 AM	SiCl4 pre valve closed
12/19/2011	11:31:34 AM	SiCl4 post valve closed
12/19/2011	11:31:34 AM	Bypass valve closed
12/19/2011	11:31:34 AM	Bubbler valve closed
12/19/2011	11:31:34 AM	Main Vac valve opened
12/19/2011	11:31:34 AM	Helium MFC set to  0.000000
12/19/2011	11:31:34 AM	H2 MFC set to  0.000000
12/19/2011	11:31:34 AM	BCl3 MFC set to  0.000000
12/19/2011	11:31:34 AM	PHl3 MFC set to  0.000000
12/19/2011	11:31:34 AM	SiCl4 MFC set to  0.000000
12/19/2011	11:31:34 AM	Bypass solenoid MFC set to  0.000000
12/19/2011	11:31:34 AM	Tube furnace set to 0
12/19/2011	11:32:04 AM	H2 valve closed
12/19/2011	11:32:04 AM	BCl3 valve closed
12/19/2011	11:32:04 AM	PH3 valve closed
12/19/2011	11:32:04 AM	SiCl4 pre valve closed
12/19/2011	11:32:04 AM	SiCl4 post valve closed
12/19/2011	11:32:04 AM	Bypass valve closed
12/19/2011	11:32:04 AM	Bubbler valve closed
12/19/2011	11:32:04 AM	Helium valve opened
12/19/2011	11:32:04 AM	Main Vac valve opened
12/19/2011	11:32:04 AM	Helium MFC set to  20.000000
12/19/2011	11:32:04 AM	H2 MFC set to  0.000000
12/19/2011	11:32:04 AM	BCl3 MFC set to  0.000000
12/19/2011	11:32:04 AM	PHl3 MFC set to  0.000000
12/19/2011	11:32:04 AM	SiCl4 MFC set to  0.000000
12/19/2011	11:32:04 AM	Bypass solenoid MFC set to  0.000000
12/19/2011	11:32:04 AM	Tube furnace set to 0
12/19/2011	11:32:34 AM	Helium valve closed
12/19/2011	11:32:34 AM	H2 valve closed
12/19/2011	11:32:34 AM	BCl3 valve closed
12/19/2011	11:32:34 AM	PH3 valve closed
12/19/2011	11:32:34 AM	SiCl4 pre valve closed
12/19/2011	11:32:34 AM	SiCl4 post valve closed
12/19/2011	11:32:34 AM	Bypass valve closed
12/19/2011	11:32:34 AM	Bubbler valve closed
12/19/2011	11:32:34 AM	Main Vac valve opened
12/19/2011	11:32:34 AM	Helium MFC set to  0.000000
12/19/2011	11:32:34 AM	H2 MFC set to  0.000000
12/19/2011	11:32:34 AM	BCl3 MFC set to  0.000000
12/19/2011	11:32:34 AM	PHl3 MFC set to  0.000000
12/19/2011	11:32:34 AM	SiCl4 MFC set to  0.000000
12/19/2011	11:32:34 AM	Bypass solenoid MFC set to  0.000000
12/19/2011	11:32:34 AM	Tube furnace set to 0
12/19/2011	11:33:04 AM	H2 valve closed
12/19/2011	11:33:04 AM	BCl3 valve closed
12/19/2011	11:33:04 AM	PH3 valve closed
12/19/2011	11:33:04 AM	SiCl4 pre valve closed
12/19/2011	11:33:04 AM	SiCl4 post valve closed
12/19/2011	11:33:04 AM	Bypass valve closed
12/19/2011	11:33:04 AM	Bubbler valve closed
12/19/2011	11:33:04 AM	Helium valve opened
12/19/2011	11:33:04 AM	Main Vac valve opened
12/19/2011	11:33:04 AM	Helium MFC set to  20.000000
12/19/2011	11:33:04 AM	H2 MFC set to  0.000000
12/19/2011	11:33:04 AM	BCl3 MFC set to  0.000000
12/19/2011	11:33:04 AM	PHl3 MFC set to  0.000000
12/19/2011	11:33:04 AM	SiCl4 MFC set to  0.000000
12/19/2011	11:33:04 AM	Bypass solenoid MFC set to  0.000000
12/19/2011	11:33:04 AM	Tube furnace set to 0
12/19/2011	11:33:34 AM	Helium valve closed
12/19/2011	11:33:34 AM	H2 valve closed
12/19/2011	11:33:34 AM	BCl3 valve closed
12/19/2011	11:33:34 AM	PH3 valve closed
12/19/2011	11:33:34 AM	SiCl4 pre valve closed
12/19/2011	11:33:34 AM	SiCl4 post valve closed
12/19/2011	11:33:34 AM	Bypass valve closed
12/19/2011	11:33:34 AM	Bubbler valve closed
12/19/2011	11:33:34 AM	Main Vac valve opened
12/19/2011	11:33:34 AM	Helium MFC set to  0.000000
12/19/2011	11:33:34 AM	H2 MFC set to  0.000000
12/19/2011	11:33:34 AM	BCl3 MFC set to  0.000000
12/19/2011	11:33:34 AM	PHl3 MFC set to  0.000000
12/19/2011	11:33:34 AM	SiCl4 MFC set to  0.000000
12/19/2011	11:33:34 AM	Bypass solenoid MFC set to  0.000000
12/19/2011	11:33:35 AM	Tube furnace set to 0
12/19/2011	11:34:05 AM	H2 valve closed
12/19/2011	11:34:05 AM	BCl3 valve closed
12/19/2011	11:34:05 AM	PH3 valve closed
12/19/2011	11:34:05 AM	SiCl4 pre valve closed
12/19/2011	11:34:05 AM	SiCl4 post valve closed
12/19/2011	11:34:05 AM	Bypass valve closed
12/19/2011	11:34:05 AM	Bubbler valve closed
12/19/2011	11:34:05 AM	Helium valve opened
12/19/2011	11:34:05 AM	Main Vac valve opened
12/19/2011	11:34:05 AM	Helium MFC set to  20.000000
12/19/2011	11:34:05 AM	H2 MFC set to  0.000000
12/19/2011	11:34:05 AM	BCl3 MFC set to  0.000000
12/19/2011	11:34:05 AM	PHl3 MFC set to  0.000000
12/19/2011	11:34:05 AM	SiCl4 MFC set to  0.000000
12/19/2011	11:34:05 AM	Bypass solenoid MFC set to  0.000000
12/19/2011	11:34:05 AM	Tube furnace set to 0
12/19/2011	11:34:35 AM	Helium valve closed
12/19/2011	11:34:35 AM	H2 valve closed
12/19/2011	11:34:35 AM	BCl3 valve closed
12/19/2011	11:34:35 AM	PH3 valve closed
12/19/2011	11:34:35 AM	SiCl4 pre valve closed
12/19/2011	11:34:35 AM	SiCl4 post valve closed
12/19/2011	11:34:35 AM	Bypass valve closed
12/19/2011	11:34:35 AM	Bubbler valve closed
12/19/2011	11:34:35 AM	Main Vac valve opened
12/19/2011	11:34:35 AM	Helium MFC set to  0.000000
12/19/2011	11:34:35 AM	H2 MFC set to  0.000000
12/19/2011	11:34:35 AM	BCl3 MFC set to  0.000000
12/19/2011	11:34:35 AM	PHl3 MFC set to  0.000000
12/19/2011	11:34:35 AM	SiCl4 MFC set to  0.000000
12/19/2011	11:34:35 AM	Bypass solenoid MFC set to  0.000000
12/19/2011	11:34:35 AM	Tube furnace set to 0
12/19/2011	11:35:05 AM	H2 valve closed
12/19/2011	11:35:05 AM	BCl3 valve closed
12/19/2011	11:35:05 AM	PH3 valve closed
12/19/2011	11:35:05 AM	SiCl4 pre valve closed
12/19/2011	11:35:05 AM	SiCl4 post valve closed
12/19/2011	11:35:05 AM	Bypass valve closed
12/19/2011	11:35:05 AM	Bubbler valve closed
12/19/2011	11:35:05 AM	Helium valve opened
12/19/2011	11:35:05 AM	Main Vac valve opened
12/19/2011	11:35:05 AM	Helium MFC set to  20.000000
12/19/2011	11:35:05 AM	H2 MFC set to  0.000000
12/19/2011	11:35:05 AM	BCl3 MFC set to  0.000000
12/19/2011	11:35:05 AM	PHl3 MFC set to  0.000000
12/19/2011	11:35:05 AM	SiCl4 MFC set to  0.000000
12/19/2011	11:35:05 AM	Bypass solenoid MFC set to  0.000000
12/19/2011	11:35:05 AM	Tube furnace set to 0
12/19/2011	11:35:35 AM	Helium valve closed
12/19/2011	11:35:35 AM	H2 valve closed
12/19/2011	11:35:35 AM	BCl3 valve closed
12/19/2011	11:35:35 AM	PH3 valve closed
12/19/2011	11:35:35 AM	SiCl4 pre valve closed
12/19/2011	11:35:35 AM	SiCl4 post valve closed
12/19/2011	11:35:35 AM	Bypass valve closed
12/19/2011	11:35:35 AM	Bubbler valve closed
12/19/2011	11:35:35 AM	Main Vac valve opened
12/19/2011	11:35:35 AM	Helium MFC set to  0.000000
12/19/2011	11:35:35 AM	H2 MFC set to  0.000000
12/19/2011	11:35:35 AM	BCl3 MFC set to  0.000000
12/19/2011	11:35:35 AM	PHl3 MFC set to  0.000000
12/19/2011	11:35:35 AM	SiCl4 MFC set to  0.000000
12/19/2011	11:35:35 AM	Bypass solenoid MFC set to  0.000000
12/19/2011	11:35:35 AM	Tube furnace set to 0
12/19/2011	11:36:05 AM	H2 valve closed
12/19/2011	11:36:05 AM	BCl3 valve closed
12/19/2011	11:36:05 AM	PH3 valve closed
12/19/2011	11:36:06 AM	SiCl4 pre valve closed
12/19/2011	11:36:06 AM	SiCl4 post valve closed
12/19/2011	11:36:06 AM	Bypass valve closed
12/19/2011	11:36:06 AM	Bubbler valve closed
12/19/2011	11:36:06 AM	Helium valve opened
12/19/2011	11:36:06 AM	Main Vac valve opened
12/19/2011	11:36:06 AM	Helium MFC set to  20.000000
12/19/2011	11:36:06 AM	H2 MFC set to  0.000000
12/19/2011	11:36:06 AM	BCl3 MFC set to  0.000000
12/19/2011	11:36:06 AM	PHl3 MFC set to  0.000000
12/19/2011	11:36:06 AM	SiCl4 MFC set to  0.000000
12/19/2011	11:36:06 AM	Bypass solenoid MFC set to  0.000000
12/19/2011	11:36:06 AM	Tube furnace set to 0
12/19/2011	11:36:36 AM	Helium valve closed
12/19/2011	11:36:36 AM	H2 valve closed
12/19/2011	11:36:36 AM	BCl3 valve closed
12/19/2011	11:36:36 AM	PH3 valve closed
12/19/2011	11:36:36 AM	SiCl4 pre valve closed
12/19/2011	11:36:36 AM	SiCl4 post valve closed
12/19/2011	11:36:36 AM	Bypass valve closed
12/19/2011	11:36:36 AM	Bubbler valve closed
12/19/2011	11:36:36 AM	Main Vac valve opened
12/19/2011	11:36:36 AM	Helium MFC set to  0.000000
12/19/2011	11:36:36 AM	H2 MFC set to  0.000000
12/19/2011	11:36:36 AM	BCl3 MFC set to  0.000000
12/19/2011	11:36:36 AM	PHl3 MFC set to  0.000000
12/19/2011	11:36:36 AM	SiCl4 MFC set to  0.000000
12/19/2011	11:36:36 AM	Bypass solenoid MFC set to  0.000000
12/19/2011	11:36:36 AM	Tube furnace set to 0
12/19/2011	11:37:06 AM	H2 valve closed
12/19/2011	11:37:06 AM	BCl3 valve closed
12/19/2011	11:37:06 AM	PH3 valve closed
12/19/2011	11:37:06 AM	SiCl4 pre valve closed
12/19/2011	11:37:06 AM	SiCl4 post valve closed
12/19/2011	11:37:06 AM	Bypass valve closed
12/19/2011	11:37:06 AM	Bubbler valve closed
12/19/2011	11:37:06 AM	Helium valve opened
12/19/2011	11:37:06 AM	Main Vac valve opened
12/19/2011	11:37:06 AM	Helium MFC set to  20.000000
12/19/2011	11:37:06 AM	H2 MFC set to  0.000000
12/19/2011	11:37:06 AM	BCl3 MFC set to  0.000000
12/19/2011	11:37:06 AM	PHl3 MFC set to  0.000000
12/19/2011	11:37:06 AM	SiCl4 MFC set to  0.000000
12/19/2011	11:37:06 AM	Bypass solenoid MFC set to  0.000000
12/19/2011	11:37:06 AM	Tube furnace set to 0
12/19/2011	11:37:36 AM	Helium valve closed
12/19/2011	11:37:36 AM	H2 valve closed
12/19/2011	11:37:36 AM	BCl3 valve closed
12/19/2011	11:37:36 AM	PH3 valve closed
12/19/2011	11:37:36 AM	SiCl4 pre valve closed
12/19/2011	11:37:36 AM	SiCl4 post valve closed
12/19/2011	11:37:36 AM	Bypass valve closed
12/19/2011	11:37:36 AM	Bubbler valve closed
12/19/2011	11:37:36 AM	Main Vac valve opened
12/19/2011	11:37:36 AM	Helium MFC set to  0.000000
12/19/2011	11:37:36 AM	H2 MFC set to  0.000000
12/19/2011	11:37:36 AM	BCl3 MFC set to  0.000000
12/19/2011	11:37:36 AM	PHl3 MFC set to  0.000000
12/19/2011	11:37:36 AM	SiCl4 MFC set to  0.000000
12/19/2011	11:37:36 AM	Bypass solenoid MFC set to  0.000000
12/19/2011	11:37:36 AM	Tube furnace set to 0
12/19/2011	11:37:37 AM	Run finished at 11:37 AM
12/19/2011	11:37:37 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
12/19/2011	12:32:51 PM	Main Vac valve closed
12/19/2011	12:33:17 PM	Main Vac valve opened
12/19/2011	12:33:48 PM	Recipe started at 12:33 PM
12/19/2011	12:33:48 PM	Helium valve closed
12/19/2011	12:33:48 PM	H2 valve closed
12/19/2011	12:33:48 PM	BCl3 valve closed
12/19/2011	12:33:48 PM	PH3 valve closed
12/19/2011	12:33:48 PM	SiCl4 pre valve closed
12/19/2011	12:33:48 PM	SiCl4 post valve closed
12/19/2011	12:33:48 PM	Main Vac valve closed
12/19/2011	12:33:48 PM	Bypass valve closed
12/19/2011	12:33:48 PM	Bubbler valve closed
12/19/2011	12:33:48 PM	Helium MFC set to  0.000000
12/19/2011	12:33:48 PM	H2 MFC set to  0.000000
12/19/2011	12:33:48 PM	BCl3 MFC set to  0.000000
12/19/2011	12:33:48 PM	PHl3 MFC set to  0.000000
12/19/2011	12:33:48 PM	SiCl4 MFC set to  0.000000
12/19/2011	12:33:48 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	12:33:48 PM	Tube furnace set to 0
12/19/2011	12:33:51 PM	Helium valve closed
12/19/2011	12:33:51 PM	BCl3 valve closed
12/19/2011	12:33:51 PM	PH3 valve closed
12/19/2011	12:33:51 PM	SiCl4 pre valve closed
12/19/2011	12:33:51 PM	SiCl4 post valve closed
12/19/2011	12:33:51 PM	Main Vac valve closed
12/19/2011	12:33:51 PM	Bypass valve closed
12/19/2011	12:33:51 PM	Bubbler valve closed
12/19/2011	12:33:51 PM	H2 valve opened
12/19/2011	12:33:51 PM	Helium MFC set to  0.000000
12/19/2011	12:33:51 PM	H2 MFC set to  500.000000
12/19/2011	12:33:51 PM	BCl3 MFC set to  0.000000
12/19/2011	12:33:51 PM	PHl3 MFC set to  0.000000
12/19/2011	12:33:51 PM	SiCl4 MFC set to  0.000000
12/19/2011	12:33:51 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	12:33:52 PM	Tube furnace set to 0
12/19/2011	12:34:56 PM	Helium valve closed
12/19/2011	12:34:56 PM	BCl3 valve closed
12/19/2011	12:34:56 PM	PH3 valve closed
12/19/2011	12:34:56 PM	SiCl4 pre valve closed
12/19/2011	12:34:56 PM	SiCl4 post valve closed
12/19/2011	12:34:56 PM	Main Vac valve closed
12/19/2011	12:34:56 PM	Bypass valve closed
12/19/2011	12:34:56 PM	H2 valve opened
12/19/2011	12:34:56 PM	Bubbler valve opened
12/19/2011	12:34:56 PM	Helium MFC set to  0.000000
12/19/2011	12:34:56 PM	H2 MFC set to  500.000000
12/19/2011	12:34:56 PM	BCl3 MFC set to  0.000000
12/19/2011	12:34:56 PM	PHl3 MFC set to  0.000000
12/19/2011	12:34:56 PM	SiCl4 MFC set to  0.000000
12/19/2011	12:34:56 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	12:34:57 PM	Tube furnace set to 0
12/19/2011	12:34:58 PM	Helium valve closed
12/19/2011	12:34:58 PM	BCl3 valve closed
12/19/2011	12:34:58 PM	PH3 valve closed
12/19/2011	12:34:58 PM	SiCl4 pre valve closed
12/19/2011	12:34:58 PM	SiCl4 post valve closed
12/19/2011	12:34:58 PM	Main Vac valve closed
12/19/2011	12:34:58 PM	Bypass valve closed
12/19/2011	12:34:58 PM	H2 valve opened
12/19/2011	12:34:58 PM	Bubbler valve opened
12/19/2011	12:34:58 PM	Helium MFC set to  0.000000
12/19/2011	12:34:58 PM	H2 MFC set to  500.000000
12/19/2011	12:34:58 PM	BCl3 MFC set to  0.000000
12/19/2011	12:34:58 PM	PHl3 MFC set to  0.000000
12/19/2011	12:34:58 PM	SiCl4 MFC set to  0.000000
12/19/2011	12:34:58 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	12:34:58 PM	Tube furnace set to 950
12/19/2011	12:49:58 PM	Helium valve closed
12/19/2011	12:49:58 PM	PH3 valve closed
12/19/2011	12:49:58 PM	SiCl4 pre valve closed
12/19/2011	12:49:58 PM	SiCl4 post valve closed
12/19/2011	12:49:58 PM	Main Vac valve closed
12/19/2011	12:49:58 PM	Bypass valve closed
12/19/2011	12:49:58 PM	H2 valve opened
12/19/2011	12:49:58 PM	BCl3 valve opened
12/19/2011	12:49:58 PM	Bubbler valve opened
12/19/2011	12:49:58 PM	Helium MFC set to  0.000000
12/19/2011	12:49:58 PM	H2 MFC set to  400.000000
12/19/2011	12:49:58 PM	BCl3 MFC set to  20.000000
12/19/2011	12:49:58 PM	PHl3 MFC set to  0.000000
12/19/2011	12:49:58 PM	SiCl4 MFC set to  0.000000
12/19/2011	12:49:58 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	12:49:58 PM	Tube furnace set to 950
12/19/2011	1:19:58 PM	Helium valve closed
12/19/2011	1:19:58 PM	BCl3 valve closed
12/19/2011	1:19:58 PM	PH3 valve closed
12/19/2011	1:19:58 PM	SiCl4 pre valve closed
12/19/2011	1:19:58 PM	SiCl4 post valve closed
12/19/2011	1:19:58 PM	Main Vac valve closed
12/19/2011	1:19:58 PM	Bypass valve closed
12/19/2011	1:19:58 PM	H2 valve opened
12/19/2011	1:19:58 PM	Bubbler valve opened
12/19/2011	1:19:58 PM	Helium MFC set to  0.000000
12/19/2011	1:19:58 PM	H2 MFC set to  500.000000
12/19/2011	1:19:58 PM	BCl3 MFC set to  0.000000
12/19/2011	1:19:58 PM	PHl3 MFC set to  0.000000
12/19/2011	1:19:58 PM	SiCl4 MFC set to  0.000000
12/19/2011	1:19:58 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	1:19:58 PM	Tube furnace set to 750
12/19/2011	1:24:58 PM	H2 valve closed
12/19/2011	1:24:58 PM	BCl3 valve closed
12/19/2011	1:24:58 PM	PH3 valve closed
12/19/2011	1:24:58 PM	SiCl4 pre valve closed
12/19/2011	1:24:58 PM	SiCl4 post valve closed
12/19/2011	1:24:58 PM	Main Vac valve closed
12/19/2011	1:24:58 PM	Bypass valve closed
12/19/2011	1:24:58 PM	Helium valve opened
12/19/2011	1:24:58 PM	Bubbler valve opened
12/19/2011	1:24:58 PM	Helium MFC set to  500.000000
12/19/2011	1:24:58 PM	H2 MFC set to  0.000000
12/19/2011	1:24:58 PM	BCl3 MFC set to  0.000000
12/19/2011	1:24:58 PM	PHl3 MFC set to  0.000000
12/19/2011	1:24:58 PM	SiCl4 MFC set to  0.000000
12/19/2011	1:24:58 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	1:24:58 PM	Tube furnace set to 0
12/19/2011	1:44:58 PM	Helium valve closed
12/19/2011	1:44:58 PM	H2 valve closed
12/19/2011	1:44:58 PM	BCl3 valve closed
12/19/2011	1:44:58 PM	PH3 valve closed
12/19/2011	1:44:58 PM	SiCl4 pre valve closed
12/19/2011	1:44:58 PM	SiCl4 post valve closed
12/19/2011	1:44:58 PM	Main Vac valve closed
12/19/2011	1:44:58 PM	Bypass valve closed
12/19/2011	1:44:58 PM	Bubbler valve closed
12/19/2011	1:44:58 PM	Helium MFC set to  0.000000
12/19/2011	1:44:58 PM	H2 MFC set to  0.000000
12/19/2011	1:44:58 PM	BCl3 MFC set to  0.000000
12/19/2011	1:44:58 PM	PHl3 MFC set to  0.000000
12/19/2011	1:44:58 PM	SiCl4 MFC set to  0.000000
12/19/2011	1:44:58 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	1:44:58 PM	Tube furnace set to 0
12/19/2011	1:44:59 PM	Run finished at 1:44 PM
12/19/2011	2:11:18 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/19/2011	2:11:19 PM	Recipe started at 2:11 PM
12/19/2011	2:11:19 PM	Helium valve closed
12/19/2011	2:11:19 PM	H2 valve closed
12/19/2011	2:11:19 PM	BCl3 valve closed
12/19/2011	2:11:19 PM	PH3 valve closed
12/19/2011	2:11:19 PM	SiCl4 pre valve closed
12/19/2011	2:11:19 PM	SiCl4 post valve closed
12/19/2011	2:11:19 PM	Main Vac valve closed
12/19/2011	2:11:19 PM	Bypass valve closed
12/19/2011	2:11:19 PM	Bubbler valve closed
12/19/2011	2:11:19 PM	Helium MFC set to  0.000000
12/19/2011	2:11:19 PM	H2 MFC set to  0.000000
12/19/2011	2:11:19 PM	BCl3 MFC set to  0.000000
12/19/2011	2:11:19 PM	PHl3 MFC set to  0.000000
12/19/2011	2:11:19 PM	SiCl4 MFC set to  0.000000
12/19/2011	2:11:19 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	2:11:19 PM	Tube furnace set to 0
12/19/2011	2:11:22 PM	H2 valve closed
12/19/2011	2:11:22 PM	BCl3 valve closed
12/19/2011	2:11:22 PM	PH3 valve closed
12/19/2011	2:11:22 PM	SiCl4 pre valve closed
12/19/2011	2:11:22 PM	SiCl4 post valve closed
12/19/2011	2:11:22 PM	Main Vac valve closed
12/19/2011	2:11:22 PM	Bypass valve closed
12/19/2011	2:11:22 PM	Bubbler valve closed
12/19/2011	2:11:22 PM	Helium valve opened
12/19/2011	2:11:22 PM	Helium MFC set to  500.000000
12/19/2011	2:11:22 PM	H2 MFC set to  0.000000
12/19/2011	2:11:22 PM	BCl3 MFC set to  0.000000
12/19/2011	2:11:22 PM	PHl3 MFC set to  0.000000
12/19/2011	2:11:22 PM	SiCl4 MFC set to  0.000000
12/19/2011	2:11:22 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	2:11:23 PM	Tube furnace set to 0
12/19/2011	2:11:29 PM	Helium valve closed
12/19/2011	2:11:29 PM	H2 valve closed
12/19/2011	2:11:29 PM	BCl3 valve closed
12/19/2011	2:11:29 PM	PH3 valve closed
12/19/2011	2:11:29 PM	SiCl4 pre valve closed
12/19/2011	2:11:29 PM	SiCl4 post valve closed
12/19/2011	2:11:29 PM	Main Vac valve closed
12/19/2011	2:11:29 PM	Bypass valve closed
12/19/2011	2:11:29 PM	Bubbler valve closed
12/19/2011	2:11:29 PM	Helium MFC set to  0.000000
12/19/2011	2:11:29 PM	H2 MFC set to  0.000000
12/19/2011	2:11:29 PM	BCl3 MFC set to  0.000000
12/19/2011	2:11:29 PM	PHl3 MFC set to  0.000000
12/19/2011	2:11:29 PM	SiCl4 MFC set to  0.000000
12/19/2011	2:11:29 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	2:11:29 PM	Tube furnace set to 0
12/19/2011	2:11:30 PM	Run finished at 2:11 PM
12/19/2011	2:11:30 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/19/2011	2:14:49 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/19/2011	2:14:49 PM	Recipe started at 2:14 PM
12/19/2011	2:14:50 PM	Helium valve closed
12/19/2011	2:14:50 PM	H2 valve closed
12/19/2011	2:14:50 PM	BCl3 valve closed
12/19/2011	2:14:50 PM	PH3 valve closed
12/19/2011	2:14:50 PM	SiCl4 pre valve closed
12/19/2011	2:14:50 PM	SiCl4 post valve closed
12/19/2011	2:14:50 PM	Main Vac valve closed
12/19/2011	2:14:50 PM	Bubbler valve closed
12/19/2011	2:14:50 PM	Bypass valve opened
12/19/2011	2:14:50 PM	Helium MFC set to  0.000000
12/19/2011	2:14:50 PM	H2 MFC set to  0.000000
12/19/2011	2:14:50 PM	BCl3 MFC set to  0.000000
12/19/2011	2:14:50 PM	PHl3 MFC set to  0.000000
12/19/2011	2:14:50 PM	SiCl4 MFC set to  0.000000
12/19/2011	2:14:50 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	2:14:50 PM	Tube furnace set to 0
12/19/2011	2:17:00 PM	Helium valve closed
12/19/2011	2:17:00 PM	H2 valve closed
12/19/2011	2:17:00 PM	BCl3 valve closed
12/19/2011	2:17:00 PM	PH3 valve closed
12/19/2011	2:17:00 PM	SiCl4 pre valve closed
12/19/2011	2:17:00 PM	SiCl4 post valve closed
12/19/2011	2:17:00 PM	Main Vac valve closed
12/19/2011	2:17:00 PM	Bubbler valve closed
12/19/2011	2:17:00 PM	Bypass valve opened
12/19/2011	2:17:00 PM	Helium MFC set to  0.000000
12/19/2011	2:17:00 PM	H2 MFC set to  0.000000
12/19/2011	2:17:00 PM	BCl3 MFC set to  0.000000
12/19/2011	2:17:00 PM	PHl3 MFC set to  0.000000
12/19/2011	2:17:00 PM	SiCl4 MFC set to  0.000000
12/19/2011	2:17:00 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	2:17:00 PM	Tube furnace set to 0
12/19/2011	2:18:00 PM	Helium valve closed
12/19/2011	2:18:00 PM	H2 valve closed
12/19/2011	2:18:00 PM	BCl3 valve closed
12/19/2011	2:18:00 PM	PH3 valve closed
12/19/2011	2:18:00 PM	SiCl4 pre valve closed
12/19/2011	2:18:00 PM	SiCl4 post valve closed
12/19/2011	2:18:00 PM	Bypass valve closed
12/19/2011	2:18:00 PM	Bubbler valve closed
12/19/2011	2:18:00 PM	Main Vac valve opened
12/19/2011	2:18:00 PM	Helium MFC set to  0.000000
12/19/2011	2:18:00 PM	H2 MFC set to  0.000000
12/19/2011	2:18:00 PM	BCl3 MFC set to  0.000000
12/19/2011	2:18:00 PM	PHl3 MFC set to  0.000000
12/19/2011	2:18:00 PM	SiCl4 MFC set to  0.000000
12/19/2011	2:18:00 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	2:18:00 PM	Tube furnace set to 0
12/19/2011	2:18:01 PM	Run finished at 2:18 PM
12/19/2011	2:18:01 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/19/2011	2:22:50 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
12/19/2011	2:23:02 PM	Recipe started at 2:22 PM
12/19/2011	2:23:02 PM	Helium valve closed
12/19/2011	2:23:02 PM	H2 valve closed
12/19/2011	2:23:02 PM	BCl3 valve closed
12/19/2011	2:23:02 PM	PH3 valve closed
12/19/2011	2:23:02 PM	SiCl4 pre valve closed
12/19/2011	2:23:02 PM	SiCl4 post valve closed
12/19/2011	2:23:02 PM	Main Vac valve closed
12/19/2011	2:23:02 PM	Bubbler valve closed
12/19/2011	2:23:02 PM	Bypass valve opened
12/19/2011	2:23:02 PM	Helium MFC set to  0.000000
12/19/2011	2:23:02 PM	H2 MFC set to  0.000000
12/19/2011	2:23:02 PM	BCl3 MFC set to  0.000000
12/19/2011	2:23:02 PM	PHl3 MFC set to  0.000000
12/19/2011	2:23:02 PM	SiCl4 MFC set to  0.000000
12/19/2011	2:23:02 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	2:23:03 PM	Tube furnace set to 0
12/19/2011	2:23:04 PM	Helium valve closed
12/19/2011	2:23:04 PM	H2 valve closed
12/19/2011	2:23:04 PM	BCl3 valve closed
12/19/2011	2:23:04 PM	PH3 valve closed
12/19/2011	2:23:04 PM	SiCl4 pre valve closed
12/19/2011	2:23:04 PM	SiCl4 post valve closed
12/19/2011	2:23:04 PM	Main Vac valve closed
12/19/2011	2:23:04 PM	Bubbler valve closed
12/19/2011	2:23:04 PM	Bypass valve opened
12/19/2011	2:23:04 PM	Helium MFC set to  0.000000
12/19/2011	2:23:04 PM	H2 MFC set to  0.000000
12/19/2011	2:23:04 PM	BCl3 MFC set to  0.000000
12/19/2011	2:23:04 PM	PHl3 MFC set to  0.000000
12/19/2011	2:23:04 PM	SiCl4 MFC set to  0.000000
12/19/2011	2:23:04 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	2:23:04 PM	Tube furnace set to 0
12/19/2011	2:23:05 PM	Helium valve closed
12/19/2011	2:23:05 PM	H2 valve closed
12/19/2011	2:23:05 PM	BCl3 valve closed
12/19/2011	2:23:05 PM	PH3 valve closed
12/19/2011	2:23:05 PM	SiCl4 pre valve closed
12/19/2011	2:23:05 PM	SiCl4 post valve closed
12/19/2011	2:23:05 PM	Bypass valve closed
12/19/2011	2:23:05 PM	Bubbler valve closed
12/19/2011	2:23:05 PM	Main Vac valve opened
12/19/2011	2:23:05 PM	Helium MFC set to  0.000000
12/19/2011	2:23:05 PM	H2 MFC set to  0.000000
12/19/2011	2:23:05 PM	BCl3 MFC set to  0.000000
12/19/2011	2:23:05 PM	PHl3 MFC set to  0.000000
12/19/2011	2:23:05 PM	SiCl4 MFC set to  0.000000
12/19/2011	2:23:05 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	2:23:05 PM	Tube furnace set to 0
12/19/2011	2:23:35 PM	H2 valve closed
12/19/2011	2:23:35 PM	BCl3 valve closed
12/19/2011	2:23:35 PM	PH3 valve closed
12/19/2011	2:23:35 PM	SiCl4 pre valve closed
12/19/2011	2:23:35 PM	SiCl4 post valve closed
12/19/2011	2:23:35 PM	Bypass valve closed
12/19/2011	2:23:35 PM	Bubbler valve closed
12/19/2011	2:23:35 PM	Helium valve opened
12/19/2011	2:23:35 PM	Main Vac valve opened
12/19/2011	2:23:35 PM	Helium MFC set to  20.000000
12/19/2011	2:23:35 PM	H2 MFC set to  0.000000
12/19/2011	2:23:35 PM	BCl3 MFC set to  0.000000
12/19/2011	2:23:35 PM	PHl3 MFC set to  0.000000
12/19/2011	2:23:35 PM	SiCl4 MFC set to  0.000000
12/19/2011	2:23:35 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	2:23:35 PM	Tube furnace set to 0
12/19/2011	2:24:05 PM	Helium valve closed
12/19/2011	2:24:05 PM	H2 valve closed
12/19/2011	2:24:05 PM	BCl3 valve closed
12/19/2011	2:24:05 PM	PH3 valve closed
12/19/2011	2:24:05 PM	SiCl4 pre valve closed
12/19/2011	2:24:05 PM	SiCl4 post valve closed
12/19/2011	2:24:05 PM	Bypass valve closed
12/19/2011	2:24:05 PM	Bubbler valve closed
12/19/2011	2:24:05 PM	Main Vac valve opened
12/19/2011	2:24:05 PM	Helium MFC set to  0.000000
12/19/2011	2:24:05 PM	H2 MFC set to  0.000000
12/19/2011	2:24:05 PM	BCl3 MFC set to  0.000000
12/19/2011	2:24:05 PM	PHl3 MFC set to  0.000000
12/19/2011	2:24:05 PM	SiCl4 MFC set to  0.000000
12/19/2011	2:24:05 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	2:24:05 PM	Tube furnace set to 0
12/19/2011	2:24:35 PM	H2 valve closed
12/19/2011	2:24:35 PM	BCl3 valve closed
12/19/2011	2:24:35 PM	PH3 valve closed
12/19/2011	2:24:35 PM	SiCl4 pre valve closed
12/19/2011	2:24:35 PM	SiCl4 post valve closed
12/19/2011	2:24:35 PM	Bypass valve closed
12/19/2011	2:24:35 PM	Bubbler valve closed
12/19/2011	2:24:35 PM	Helium valve opened
12/19/2011	2:24:35 PM	Main Vac valve opened
12/19/2011	2:24:35 PM	Helium MFC set to  20.000000
12/19/2011	2:24:35 PM	H2 MFC set to  0.000000
12/19/2011	2:24:35 PM	BCl3 MFC set to  0.000000
12/19/2011	2:24:35 PM	PHl3 MFC set to  0.000000
12/19/2011	2:24:35 PM	SiCl4 MFC set to  0.000000
12/19/2011	2:24:35 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	2:24:35 PM	Tube furnace set to 0
12/19/2011	2:25:05 PM	Helium valve closed
12/19/2011	2:25:05 PM	H2 valve closed
12/19/2011	2:25:05 PM	BCl3 valve closed
12/19/2011	2:25:05 PM	PH3 valve closed
12/19/2011	2:25:05 PM	SiCl4 pre valve closed
12/19/2011	2:25:05 PM	SiCl4 post valve closed
12/19/2011	2:25:05 PM	Bypass valve closed
12/19/2011	2:25:05 PM	Bubbler valve closed
12/19/2011	2:25:05 PM	Main Vac valve opened
12/19/2011	2:25:05 PM	Helium MFC set to  0.000000
12/19/2011	2:25:05 PM	H2 MFC set to  0.000000
12/19/2011	2:25:05 PM	BCl3 MFC set to  0.000000
12/19/2011	2:25:05 PM	PHl3 MFC set to  0.000000
12/19/2011	2:25:05 PM	SiCl4 MFC set to  0.000000
12/19/2011	2:25:05 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	2:25:05 PM	Tube furnace set to 0
12/19/2011	2:25:36 PM	H2 valve closed
12/19/2011	2:25:36 PM	BCl3 valve closed
12/19/2011	2:25:36 PM	PH3 valve closed
12/19/2011	2:25:36 PM	SiCl4 pre valve closed
12/19/2011	2:25:36 PM	SiCl4 post valve closed
12/19/2011	2:25:36 PM	Bypass valve closed
12/19/2011	2:25:36 PM	Bubbler valve closed
12/19/2011	2:25:36 PM	Helium valve opened
12/19/2011	2:25:36 PM	Main Vac valve opened
12/19/2011	2:25:36 PM	Helium MFC set to  20.000000
12/19/2011	2:25:36 PM	H2 MFC set to  0.000000
12/19/2011	2:25:36 PM	BCl3 MFC set to  0.000000
12/19/2011	2:25:36 PM	PHl3 MFC set to  0.000000
12/19/2011	2:25:36 PM	SiCl4 MFC set to  0.000000
12/19/2011	2:25:36 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	2:25:36 PM	Tube furnace set to 0
12/19/2011	2:26:06 PM	Helium valve closed
12/19/2011	2:26:06 PM	H2 valve closed
12/19/2011	2:26:06 PM	BCl3 valve closed
12/19/2011	2:26:06 PM	PH3 valve closed
12/19/2011	2:26:06 PM	SiCl4 pre valve closed
12/19/2011	2:26:06 PM	SiCl4 post valve closed
12/19/2011	2:26:06 PM	Bypass valve closed
12/19/2011	2:26:06 PM	Bubbler valve closed
12/19/2011	2:26:06 PM	Main Vac valve opened
12/19/2011	2:26:06 PM	Helium MFC set to  0.000000
12/19/2011	2:26:06 PM	H2 MFC set to  0.000000
12/19/2011	2:26:06 PM	BCl3 MFC set to  0.000000
12/19/2011	2:26:06 PM	PHl3 MFC set to  0.000000
12/19/2011	2:26:06 PM	SiCl4 MFC set to  0.000000
12/19/2011	2:26:06 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	2:26:06 PM	Tube furnace set to 0
12/19/2011	2:26:36 PM	H2 valve closed
12/19/2011	2:26:36 PM	BCl3 valve closed
12/19/2011	2:26:36 PM	PH3 valve closed
12/19/2011	2:26:36 PM	SiCl4 pre valve closed
12/19/2011	2:26:36 PM	SiCl4 post valve closed
12/19/2011	2:26:36 PM	Bypass valve closed
12/19/2011	2:26:36 PM	Bubbler valve closed
12/19/2011	2:26:36 PM	Helium valve opened
12/19/2011	2:26:36 PM	Main Vac valve opened
12/19/2011	2:26:36 PM	Helium MFC set to  20.000000
12/19/2011	2:26:36 PM	H2 MFC set to  0.000000
12/19/2011	2:26:36 PM	BCl3 MFC set to  0.000000
12/19/2011	2:26:36 PM	PHl3 MFC set to  0.000000
12/19/2011	2:26:36 PM	SiCl4 MFC set to  0.000000
12/19/2011	2:26:36 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	2:26:36 PM	Tube furnace set to 0
12/19/2011	2:27:06 PM	Helium valve closed
12/19/2011	2:27:06 PM	H2 valve closed
12/19/2011	2:27:06 PM	BCl3 valve closed
12/19/2011	2:27:06 PM	PH3 valve closed
12/19/2011	2:27:06 PM	SiCl4 pre valve closed
12/19/2011	2:27:06 PM	SiCl4 post valve closed
12/19/2011	2:27:06 PM	Bypass valve closed
12/19/2011	2:27:06 PM	Bubbler valve closed
12/19/2011	2:27:06 PM	Main Vac valve opened
12/19/2011	2:27:06 PM	Helium MFC set to  0.000000
12/19/2011	2:27:06 PM	H2 MFC set to  0.000000
12/19/2011	2:27:06 PM	BCl3 MFC set to  0.000000
12/19/2011	2:27:06 PM	PHl3 MFC set to  0.000000
12/19/2011	2:27:06 PM	SiCl4 MFC set to  0.000000
12/19/2011	2:27:06 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	2:27:06 PM	Tube furnace set to 0
12/19/2011	2:27:36 PM	H2 valve closed
12/19/2011	2:27:36 PM	BCl3 valve closed
12/19/2011	2:27:36 PM	PH3 valve closed
12/19/2011	2:27:36 PM	SiCl4 pre valve closed
12/19/2011	2:27:36 PM	SiCl4 post valve closed
12/19/2011	2:27:36 PM	Bypass valve closed
12/19/2011	2:27:36 PM	Bubbler valve closed
12/19/2011	2:27:36 PM	Helium valve opened
12/19/2011	2:27:36 PM	Main Vac valve opened
12/19/2011	2:27:36 PM	Helium MFC set to  20.000000
12/19/2011	2:27:36 PM	H2 MFC set to  0.000000
12/19/2011	2:27:36 PM	BCl3 MFC set to  0.000000
12/19/2011	2:27:36 PM	PHl3 MFC set to  0.000000
12/19/2011	2:27:36 PM	SiCl4 MFC set to  0.000000
12/19/2011	2:27:36 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	2:27:37 PM	Tube furnace set to 0
12/19/2011	2:28:07 PM	Helium valve closed
12/19/2011	2:28:07 PM	H2 valve closed
12/19/2011	2:28:07 PM	BCl3 valve closed
12/19/2011	2:28:07 PM	PH3 valve closed
12/19/2011	2:28:07 PM	SiCl4 pre valve closed
12/19/2011	2:28:07 PM	SiCl4 post valve closed
12/19/2011	2:28:07 PM	Bypass valve closed
12/19/2011	2:28:07 PM	Bubbler valve closed
12/19/2011	2:28:07 PM	Main Vac valve opened
12/19/2011	2:28:07 PM	Helium MFC set to  0.000000
12/19/2011	2:28:07 PM	H2 MFC set to  0.000000
12/19/2011	2:28:07 PM	BCl3 MFC set to  0.000000
12/19/2011	2:28:07 PM	PHl3 MFC set to  0.000000
12/19/2011	2:28:07 PM	SiCl4 MFC set to  0.000000
12/19/2011	2:28:07 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	2:28:07 PM	Tube furnace set to 0
12/19/2011	2:28:37 PM	H2 valve closed
12/19/2011	2:28:37 PM	BCl3 valve closed
12/19/2011	2:28:37 PM	PH3 valve closed
12/19/2011	2:28:37 PM	SiCl4 pre valve closed
12/19/2011	2:28:37 PM	SiCl4 post valve closed
12/19/2011	2:28:37 PM	Bypass valve closed
12/19/2011	2:28:37 PM	Bubbler valve closed
12/19/2011	2:28:37 PM	Helium valve opened
12/19/2011	2:28:37 PM	Main Vac valve opened
12/19/2011	2:28:37 PM	Helium MFC set to  20.000000
12/19/2011	2:28:37 PM	H2 MFC set to  0.000000
12/19/2011	2:28:37 PM	BCl3 MFC set to  0.000000
12/19/2011	2:28:37 PM	PHl3 MFC set to  0.000000
12/19/2011	2:28:37 PM	SiCl4 MFC set to  0.000000
12/19/2011	2:28:37 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	2:28:37 PM	Tube furnace set to 0
12/19/2011	2:29:07 PM	Helium valve closed
12/19/2011	2:29:07 PM	H2 valve closed
12/19/2011	2:29:07 PM	BCl3 valve closed
12/19/2011	2:29:07 PM	PH3 valve closed
12/19/2011	2:29:07 PM	SiCl4 pre valve closed
12/19/2011	2:29:07 PM	SiCl4 post valve closed
12/19/2011	2:29:07 PM	Bypass valve closed
12/19/2011	2:29:07 PM	Bubbler valve closed
12/19/2011	2:29:07 PM	Main Vac valve opened
12/19/2011	2:29:07 PM	Helium MFC set to  0.000000
12/19/2011	2:29:07 PM	H2 MFC set to  0.000000
12/19/2011	2:29:07 PM	BCl3 MFC set to  0.000000
12/19/2011	2:29:07 PM	PHl3 MFC set to  0.000000
12/19/2011	2:29:07 PM	SiCl4 MFC set to  0.000000
12/19/2011	2:29:07 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	2:29:07 PM	Tube furnace set to 0
12/19/2011	2:29:37 PM	H2 valve closed
12/19/2011	2:29:37 PM	BCl3 valve closed
12/19/2011	2:29:37 PM	PH3 valve closed
12/19/2011	2:29:37 PM	SiCl4 pre valve closed
12/19/2011	2:29:37 PM	SiCl4 post valve closed
12/19/2011	2:29:37 PM	Bypass valve closed
12/19/2011	2:29:37 PM	Bubbler valve closed
12/19/2011	2:29:37 PM	Helium valve opened
12/19/2011	2:29:37 PM	Main Vac valve opened
12/19/2011	2:29:37 PM	Helium MFC set to  20.000000
12/19/2011	2:29:37 PM	H2 MFC set to  0.000000
12/19/2011	2:29:37 PM	BCl3 MFC set to  0.000000
12/19/2011	2:29:37 PM	PHl3 MFC set to  0.000000
12/19/2011	2:29:37 PM	SiCl4 MFC set to  0.000000
12/19/2011	2:29:37 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	2:29:37 PM	Tube furnace set to 0
12/19/2011	2:30:07 PM	Helium valve closed
12/19/2011	2:30:07 PM	H2 valve closed
12/19/2011	2:30:07 PM	BCl3 valve closed
12/19/2011	2:30:07 PM	PH3 valve closed
12/19/2011	2:30:07 PM	SiCl4 pre valve closed
12/19/2011	2:30:07 PM	SiCl4 post valve closed
12/19/2011	2:30:07 PM	Bypass valve closed
12/19/2011	2:30:07 PM	Bubbler valve closed
12/19/2011	2:30:07 PM	Main Vac valve opened
12/19/2011	2:30:07 PM	Helium MFC set to  0.000000
12/19/2011	2:30:07 PM	H2 MFC set to  0.000000
12/19/2011	2:30:07 PM	BCl3 MFC set to  0.000000
12/19/2011	2:30:07 PM	PHl3 MFC set to  0.000000
12/19/2011	2:30:07 PM	SiCl4 MFC set to  0.000000
12/19/2011	2:30:07 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	2:30:08 PM	Tube furnace set to 0
12/19/2011	2:30:38 PM	H2 valve closed
12/19/2011	2:30:38 PM	BCl3 valve closed
12/19/2011	2:30:38 PM	PH3 valve closed
12/19/2011	2:30:38 PM	SiCl4 pre valve closed
12/19/2011	2:30:38 PM	SiCl4 post valve closed
12/19/2011	2:30:38 PM	Bypass valve closed
12/19/2011	2:30:38 PM	Bubbler valve closed
12/19/2011	2:30:38 PM	Helium valve opened
12/19/2011	2:30:38 PM	Main Vac valve opened
12/19/2011	2:30:38 PM	Helium MFC set to  20.000000
12/19/2011	2:30:38 PM	H2 MFC set to  0.000000
12/19/2011	2:30:38 PM	BCl3 MFC set to  0.000000
12/19/2011	2:30:38 PM	PHl3 MFC set to  0.000000
12/19/2011	2:30:38 PM	SiCl4 MFC set to  0.000000
12/19/2011	2:30:38 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	2:30:38 PM	Tube furnace set to 0
12/19/2011	2:31:08 PM	Helium valve closed
12/19/2011	2:31:08 PM	H2 valve closed
12/19/2011	2:31:08 PM	BCl3 valve closed
12/19/2011	2:31:08 PM	PH3 valve closed
12/19/2011	2:31:08 PM	SiCl4 pre valve closed
12/19/2011	2:31:08 PM	SiCl4 post valve closed
12/19/2011	2:31:08 PM	Bypass valve closed
12/19/2011	2:31:08 PM	Bubbler valve closed
12/19/2011	2:31:08 PM	Main Vac valve opened
12/19/2011	2:31:08 PM	Helium MFC set to  0.000000
12/19/2011	2:31:08 PM	H2 MFC set to  0.000000
12/19/2011	2:31:08 PM	BCl3 MFC set to  0.000000
12/19/2011	2:31:08 PM	PHl3 MFC set to  0.000000
12/19/2011	2:31:08 PM	SiCl4 MFC set to  0.000000
12/19/2011	2:31:08 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	2:31:08 PM	Tube furnace set to 0
12/19/2011	2:31:38 PM	H2 valve closed
12/19/2011	2:31:38 PM	BCl3 valve closed
12/19/2011	2:31:38 PM	PH3 valve closed
12/19/2011	2:31:38 PM	SiCl4 pre valve closed
12/19/2011	2:31:38 PM	SiCl4 post valve closed
12/19/2011	2:31:38 PM	Bypass valve closed
12/19/2011	2:31:38 PM	Bubbler valve closed
12/19/2011	2:31:38 PM	Helium valve opened
12/19/2011	2:31:38 PM	Main Vac valve opened
12/19/2011	2:31:38 PM	Helium MFC set to  20.000000
12/19/2011	2:31:38 PM	H2 MFC set to  0.000000
12/19/2011	2:31:38 PM	BCl3 MFC set to  0.000000
12/19/2011	2:31:38 PM	PHl3 MFC set to  0.000000
12/19/2011	2:31:38 PM	SiCl4 MFC set to  0.000000
12/19/2011	2:31:38 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	2:31:38 PM	Tube furnace set to 0
12/19/2011	2:32:08 PM	Helium valve closed
12/19/2011	2:32:08 PM	H2 valve closed
12/19/2011	2:32:08 PM	BCl3 valve closed
12/19/2011	2:32:08 PM	PH3 valve closed
12/19/2011	2:32:08 PM	SiCl4 pre valve closed
12/19/2011	2:32:08 PM	SiCl4 post valve closed
12/19/2011	2:32:08 PM	Bypass valve closed
12/19/2011	2:32:08 PM	Bubbler valve closed
12/19/2011	2:32:08 PM	Main Vac valve opened
12/19/2011	2:32:08 PM	Helium MFC set to  0.000000
12/19/2011	2:32:08 PM	H2 MFC set to  0.000000
12/19/2011	2:32:08 PM	BCl3 MFC set to  0.000000
12/19/2011	2:32:08 PM	PHl3 MFC set to  0.000000
12/19/2011	2:32:08 PM	SiCl4 MFC set to  0.000000
12/19/2011	2:32:08 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	2:32:08 PM	Tube furnace set to 0
12/19/2011	2:32:38 PM	H2 valve closed
12/19/2011	2:32:38 PM	BCl3 valve closed
12/19/2011	2:32:38 PM	PH3 valve closed
12/19/2011	2:32:38 PM	SiCl4 pre valve closed
12/19/2011	2:32:38 PM	SiCl4 post valve closed
12/19/2011	2:32:38 PM	Bypass valve closed
12/19/2011	2:32:38 PM	Bubbler valve closed
12/19/2011	2:32:38 PM	Helium valve opened
12/19/2011	2:32:38 PM	Main Vac valve opened
12/19/2011	2:32:38 PM	Helium MFC set to  20.000000
12/19/2011	2:32:38 PM	H2 MFC set to  0.000000
12/19/2011	2:32:38 PM	BCl3 MFC set to  0.000000
12/19/2011	2:32:38 PM	PHl3 MFC set to  0.000000
12/19/2011	2:32:38 PM	SiCl4 MFC set to  0.000000
12/19/2011	2:32:38 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	2:32:39 PM	Tube furnace set to 0
12/19/2011	2:33:09 PM	Helium valve closed
12/19/2011	2:33:09 PM	H2 valve closed
12/19/2011	2:33:09 PM	BCl3 valve closed
12/19/2011	2:33:09 PM	PH3 valve closed
12/19/2011	2:33:09 PM	SiCl4 pre valve closed
12/19/2011	2:33:09 PM	SiCl4 post valve closed
12/19/2011	2:33:09 PM	Bypass valve closed
12/19/2011	2:33:09 PM	Bubbler valve closed
12/19/2011	2:33:09 PM	Main Vac valve opened
12/19/2011	2:33:09 PM	Helium MFC set to  0.000000
12/19/2011	2:33:09 PM	H2 MFC set to  0.000000
12/19/2011	2:33:09 PM	BCl3 MFC set to  0.000000
12/19/2011	2:33:09 PM	PHl3 MFC set to  0.000000
12/19/2011	2:33:09 PM	SiCl4 MFC set to  0.000000
12/19/2011	2:33:09 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	2:33:09 PM	Tube furnace set to 0
12/19/2011	2:33:10 PM	Run finished at 2:33 PM
12/19/2011	2:33:10 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
12/19/2011	2:37:29 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
12/19/2011	2:37:41 PM	Recipe started at 2:37 PM
12/19/2011	2:37:41 PM	Helium valve closed
12/19/2011	2:37:41 PM	H2 valve closed
12/19/2011	2:37:41 PM	BCl3 valve closed
12/19/2011	2:37:41 PM	PH3 valve closed
12/19/2011	2:37:41 PM	SiCl4 pre valve closed
12/19/2011	2:37:41 PM	SiCl4 post valve closed
12/19/2011	2:37:41 PM	Main Vac valve closed
12/19/2011	2:37:41 PM	Bubbler valve closed
12/19/2011	2:37:41 PM	Bypass valve opened
12/19/2011	2:37:41 PM	Helium MFC set to  0.000000
12/19/2011	2:37:41 PM	H2 MFC set to  0.000000
12/19/2011	2:37:41 PM	BCl3 MFC set to  0.000000
12/19/2011	2:37:41 PM	PHl3 MFC set to  0.000000
12/19/2011	2:37:41 PM	SiCl4 MFC set to  0.000000
12/19/2011	2:37:41 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	2:37:41 PM	Tube furnace set to 0
12/19/2011	2:37:42 PM	Helium valve closed
12/19/2011	2:37:42 PM	H2 valve closed
12/19/2011	2:37:42 PM	BCl3 valve closed
12/19/2011	2:37:42 PM	PH3 valve closed
12/19/2011	2:37:42 PM	SiCl4 pre valve closed
12/19/2011	2:37:42 PM	SiCl4 post valve closed
12/19/2011	2:37:42 PM	Main Vac valve closed
12/19/2011	2:37:42 PM	Bubbler valve closed
12/19/2011	2:37:42 PM	Bypass valve opened
12/19/2011	2:37:42 PM	Helium MFC set to  0.000000
12/19/2011	2:37:42 PM	H2 MFC set to  0.000000
12/19/2011	2:37:42 PM	BCl3 MFC set to  0.000000
12/19/2011	2:37:42 PM	PHl3 MFC set to  0.000000
12/19/2011	2:37:42 PM	SiCl4 MFC set to  0.000000
12/19/2011	2:37:42 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	2:37:42 PM	Tube furnace set to 0
12/19/2011	2:37:43 PM	Helium valve closed
12/19/2011	2:37:43 PM	H2 valve closed
12/19/2011	2:37:43 PM	BCl3 valve closed
12/19/2011	2:37:43 PM	PH3 valve closed
12/19/2011	2:37:43 PM	SiCl4 pre valve closed
12/19/2011	2:37:43 PM	SiCl4 post valve closed
12/19/2011	2:37:43 PM	Bypass valve closed
12/19/2011	2:37:43 PM	Bubbler valve closed
12/19/2011	2:37:43 PM	Main Vac valve opened
12/19/2011	2:37:43 PM	Helium MFC set to  0.000000
12/19/2011	2:37:43 PM	H2 MFC set to  0.000000
12/19/2011	2:37:43 PM	BCl3 MFC set to  0.000000
12/19/2011	2:37:43 PM	PHl3 MFC set to  0.000000
12/19/2011	2:37:43 PM	SiCl4 MFC set to  0.000000
12/19/2011	2:37:43 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	2:37:43 PM	Tube furnace set to 0
12/19/2011	2:37:45 PM	H2 valve closed
12/19/2011	2:37:45 PM	BCl3 valve closed
12/19/2011	2:37:45 PM	PH3 valve closed
12/19/2011	2:37:45 PM	SiCl4 pre valve closed
12/19/2011	2:37:45 PM	SiCl4 post valve closed
12/19/2011	2:37:45 PM	Bypass valve closed
12/19/2011	2:37:45 PM	Bubbler valve closed
12/19/2011	2:37:45 PM	Helium valve opened
12/19/2011	2:37:45 PM	Main Vac valve opened
12/19/2011	2:37:45 PM	Helium MFC set to  20.000000
12/19/2011	2:37:45 PM	H2 MFC set to  0.000000
12/19/2011	2:37:45 PM	BCl3 MFC set to  0.000000
12/19/2011	2:37:45 PM	PHl3 MFC set to  0.000000
12/19/2011	2:37:45 PM	SiCl4 MFC set to  0.000000
12/19/2011	2:37:45 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	2:37:45 PM	Tube furnace set to 0
12/19/2011	2:38:15 PM	Helium valve closed
12/19/2011	2:38:15 PM	H2 valve closed
12/19/2011	2:38:15 PM	BCl3 valve closed
12/19/2011	2:38:15 PM	PH3 valve closed
12/19/2011	2:38:15 PM	SiCl4 pre valve closed
12/19/2011	2:38:15 PM	SiCl4 post valve closed
12/19/2011	2:38:15 PM	Bypass valve closed
12/19/2011	2:38:15 PM	Bubbler valve closed
12/19/2011	2:38:15 PM	Main Vac valve opened
12/19/2011	2:38:15 PM	Helium MFC set to  0.000000
12/19/2011	2:38:15 PM	H2 MFC set to  0.000000
12/19/2011	2:38:15 PM	BCl3 MFC set to  0.000000
12/19/2011	2:38:15 PM	PHl3 MFC set to  0.000000
12/19/2011	2:38:15 PM	SiCl4 MFC set to  0.000000
12/19/2011	2:38:15 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	2:38:15 PM	Tube furnace set to 0
12/19/2011	2:38:45 PM	H2 valve closed
12/19/2011	2:38:45 PM	BCl3 valve closed
12/19/2011	2:38:45 PM	PH3 valve closed
12/19/2011	2:38:45 PM	SiCl4 pre valve closed
12/19/2011	2:38:45 PM	SiCl4 post valve closed
12/19/2011	2:38:45 PM	Bypass valve closed
12/19/2011	2:38:45 PM	Bubbler valve closed
12/19/2011	2:38:45 PM	Helium valve opened
12/19/2011	2:38:45 PM	Main Vac valve opened
12/19/2011	2:38:45 PM	Helium MFC set to  20.000000
12/19/2011	2:38:45 PM	H2 MFC set to  0.000000
12/19/2011	2:38:45 PM	BCl3 MFC set to  0.000000
12/19/2011	2:38:45 PM	PHl3 MFC set to  0.000000
12/19/2011	2:38:45 PM	SiCl4 MFC set to  0.000000
12/19/2011	2:38:45 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	2:38:46 PM	Tube furnace set to 0
12/19/2011	2:39:16 PM	Helium valve closed
12/19/2011	2:39:16 PM	H2 valve closed
12/19/2011	2:39:16 PM	BCl3 valve closed
12/19/2011	2:39:16 PM	PH3 valve closed
12/19/2011	2:39:16 PM	SiCl4 pre valve closed
12/19/2011	2:39:16 PM	SiCl4 post valve closed
12/19/2011	2:39:16 PM	Bypass valve closed
12/19/2011	2:39:16 PM	Bubbler valve closed
12/19/2011	2:39:16 PM	Main Vac valve opened
12/19/2011	2:39:16 PM	Helium MFC set to  0.000000
12/19/2011	2:39:16 PM	H2 MFC set to  0.000000
12/19/2011	2:39:16 PM	BCl3 MFC set to  0.000000
12/19/2011	2:39:16 PM	PHl3 MFC set to  0.000000
12/19/2011	2:39:16 PM	SiCl4 MFC set to  0.000000
12/19/2011	2:39:16 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	2:39:16 PM	Tube furnace set to 0
12/19/2011	2:39:46 PM	H2 valve closed
12/19/2011	2:39:46 PM	BCl3 valve closed
12/19/2011	2:39:46 PM	PH3 valve closed
12/19/2011	2:39:46 PM	SiCl4 pre valve closed
12/19/2011	2:39:46 PM	SiCl4 post valve closed
12/19/2011	2:39:46 PM	Bypass valve closed
12/19/2011	2:39:46 PM	Bubbler valve closed
12/19/2011	2:39:46 PM	Helium valve opened
12/19/2011	2:39:46 PM	Main Vac valve opened
12/19/2011	2:39:46 PM	Helium MFC set to  20.000000
12/19/2011	2:39:46 PM	H2 MFC set to  0.000000
12/19/2011	2:39:46 PM	BCl3 MFC set to  0.000000
12/19/2011	2:39:46 PM	PHl3 MFC set to  0.000000
12/19/2011	2:39:46 PM	SiCl4 MFC set to  0.000000
12/19/2011	2:39:46 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	2:39:46 PM	Tube furnace set to 0
12/19/2011	2:40:16 PM	Helium valve closed
12/19/2011	2:40:16 PM	H2 valve closed
12/19/2011	2:40:16 PM	BCl3 valve closed
12/19/2011	2:40:16 PM	PH3 valve closed
12/19/2011	2:40:16 PM	SiCl4 pre valve closed
12/19/2011	2:40:16 PM	SiCl4 post valve closed
12/19/2011	2:40:16 PM	Bypass valve closed
12/19/2011	2:40:16 PM	Bubbler valve closed
12/19/2011	2:40:16 PM	Main Vac valve opened
12/19/2011	2:40:16 PM	Helium MFC set to  0.000000
12/19/2011	2:40:16 PM	H2 MFC set to  0.000000
12/19/2011	2:40:16 PM	BCl3 MFC set to  0.000000
12/19/2011	2:40:16 PM	PHl3 MFC set to  0.000000
12/19/2011	2:40:16 PM	SiCl4 MFC set to  0.000000
12/19/2011	2:40:16 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	2:40:16 PM	Tube furnace set to 0
12/19/2011	2:40:46 PM	H2 valve closed
12/19/2011	2:40:46 PM	BCl3 valve closed
12/19/2011	2:40:46 PM	PH3 valve closed
12/19/2011	2:40:46 PM	SiCl4 pre valve closed
12/19/2011	2:40:46 PM	SiCl4 post valve closed
12/19/2011	2:40:46 PM	Bypass valve closed
12/19/2011	2:40:46 PM	Bubbler valve closed
12/19/2011	2:40:46 PM	Helium valve opened
12/19/2011	2:40:46 PM	Main Vac valve opened
12/19/2011	2:40:46 PM	Helium MFC set to  20.000000
12/19/2011	2:40:46 PM	H2 MFC set to  0.000000
12/19/2011	2:40:46 PM	BCl3 MFC set to  0.000000
12/19/2011	2:40:46 PM	PHl3 MFC set to  0.000000
12/19/2011	2:40:46 PM	SiCl4 MFC set to  0.000000
12/19/2011	2:40:46 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	2:40:46 PM	Tube furnace set to 0
12/19/2011	2:41:16 PM	Helium valve closed
12/19/2011	2:41:16 PM	H2 valve closed
12/19/2011	2:41:16 PM	BCl3 valve closed
12/19/2011	2:41:16 PM	PH3 valve closed
12/19/2011	2:41:16 PM	SiCl4 pre valve closed
12/19/2011	2:41:16 PM	SiCl4 post valve closed
12/19/2011	2:41:16 PM	Bypass valve closed
12/19/2011	2:41:16 PM	Bubbler valve closed
12/19/2011	2:41:16 PM	Main Vac valve opened
12/19/2011	2:41:16 PM	Helium MFC set to  0.000000
12/19/2011	2:41:16 PM	H2 MFC set to  0.000000
12/19/2011	2:41:16 PM	BCl3 MFC set to  0.000000
12/19/2011	2:41:16 PM	PHl3 MFC set to  0.000000
12/19/2011	2:41:16 PM	SiCl4 MFC set to  0.000000
12/19/2011	2:41:16 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	2:41:16 PM	Tube furnace set to 0
12/19/2011	2:41:46 PM	H2 valve closed
12/19/2011	2:41:46 PM	BCl3 valve closed
12/19/2011	2:41:47 PM	PH3 valve closed
12/19/2011	2:41:47 PM	SiCl4 pre valve closed
12/19/2011	2:41:47 PM	SiCl4 post valve closed
12/19/2011	2:41:47 PM	Bypass valve closed
12/19/2011	2:41:47 PM	Bubbler valve closed
12/19/2011	2:41:47 PM	Helium valve opened
12/19/2011	2:41:47 PM	Main Vac valve opened
12/19/2011	2:41:47 PM	Helium MFC set to  20.000000
12/19/2011	2:41:47 PM	H2 MFC set to  0.000000
12/19/2011	2:41:47 PM	BCl3 MFC set to  0.000000
12/19/2011	2:41:47 PM	PHl3 MFC set to  0.000000
12/19/2011	2:41:47 PM	SiCl4 MFC set to  0.000000
12/19/2011	2:41:47 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	2:41:47 PM	Tube furnace set to 0
12/19/2011	2:42:17 PM	Helium valve closed
12/19/2011	2:42:17 PM	H2 valve closed
12/19/2011	2:42:17 PM	BCl3 valve closed
12/19/2011	2:42:17 PM	PH3 valve closed
12/19/2011	2:42:17 PM	SiCl4 pre valve closed
12/19/2011	2:42:17 PM	SiCl4 post valve closed
12/19/2011	2:42:17 PM	Bypass valve closed
12/19/2011	2:42:17 PM	Bubbler valve closed
12/19/2011	2:42:17 PM	Main Vac valve opened
12/19/2011	2:42:17 PM	Helium MFC set to  0.000000
12/19/2011	2:42:17 PM	H2 MFC set to  0.000000
12/19/2011	2:42:17 PM	BCl3 MFC set to  0.000000
12/19/2011	2:42:17 PM	PHl3 MFC set to  0.000000
12/19/2011	2:42:17 PM	SiCl4 MFC set to  0.000000
12/19/2011	2:42:17 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	2:42:17 PM	Tube furnace set to 0
12/19/2011	2:42:47 PM	H2 valve closed
12/19/2011	2:42:47 PM	BCl3 valve closed
12/19/2011	2:42:47 PM	PH3 valve closed
12/19/2011	2:42:47 PM	SiCl4 pre valve closed
12/19/2011	2:42:47 PM	SiCl4 post valve closed
12/19/2011	2:42:47 PM	Bypass valve closed
12/19/2011	2:42:47 PM	Bubbler valve closed
12/19/2011	2:42:47 PM	Helium valve opened
12/19/2011	2:42:47 PM	Main Vac valve opened
12/19/2011	2:42:47 PM	Helium MFC set to  20.000000
12/19/2011	2:42:47 PM	H2 MFC set to  0.000000
12/19/2011	2:42:47 PM	BCl3 MFC set to  0.000000
12/19/2011	2:42:47 PM	PHl3 MFC set to  0.000000
12/19/2011	2:42:47 PM	SiCl4 MFC set to  0.000000
12/19/2011	2:42:47 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	2:42:47 PM	Tube furnace set to 0
12/19/2011	2:43:17 PM	Helium valve closed
12/19/2011	2:43:17 PM	H2 valve closed
12/19/2011	2:43:17 PM	BCl3 valve closed
12/19/2011	2:43:17 PM	PH3 valve closed
12/19/2011	2:43:17 PM	SiCl4 pre valve closed
12/19/2011	2:43:17 PM	SiCl4 post valve closed
12/19/2011	2:43:17 PM	Bypass valve closed
12/19/2011	2:43:17 PM	Bubbler valve closed
12/19/2011	2:43:17 PM	Main Vac valve opened
12/19/2011	2:43:17 PM	Helium MFC set to  0.000000
12/19/2011	2:43:17 PM	H2 MFC set to  0.000000
12/19/2011	2:43:17 PM	BCl3 MFC set to  0.000000
12/19/2011	2:43:17 PM	PHl3 MFC set to  0.000000
12/19/2011	2:43:17 PM	SiCl4 MFC set to  0.000000
12/19/2011	2:43:17 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	2:43:17 PM	Tube furnace set to 0
12/19/2011	2:43:47 PM	H2 valve closed
12/19/2011	2:43:47 PM	BCl3 valve closed
12/19/2011	2:43:47 PM	PH3 valve closed
12/19/2011	2:43:47 PM	SiCl4 pre valve closed
12/19/2011	2:43:47 PM	SiCl4 post valve closed
12/19/2011	2:43:47 PM	Bypass valve closed
12/19/2011	2:43:47 PM	Bubbler valve closed
12/19/2011	2:43:47 PM	Helium valve opened
12/19/2011	2:43:47 PM	Main Vac valve opened
12/19/2011	2:43:47 PM	Helium MFC set to  20.000000
12/19/2011	2:43:47 PM	H2 MFC set to  0.000000
12/19/2011	2:43:47 PM	BCl3 MFC set to  0.000000
12/19/2011	2:43:47 PM	PHl3 MFC set to  0.000000
12/19/2011	2:43:47 PM	SiCl4 MFC set to  0.000000
12/19/2011	2:43:47 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	2:43:47 PM	Tube furnace set to 0
12/19/2011	2:44:17 PM	Helium valve closed
12/19/2011	2:44:17 PM	H2 valve closed
12/19/2011	2:44:17 PM	BCl3 valve closed
12/19/2011	2:44:17 PM	PH3 valve closed
12/19/2011	2:44:17 PM	SiCl4 pre valve closed
12/19/2011	2:44:17 PM	SiCl4 post valve closed
12/19/2011	2:44:17 PM	Bypass valve closed
12/19/2011	2:44:17 PM	Bubbler valve closed
12/19/2011	2:44:17 PM	Main Vac valve opened
12/19/2011	2:44:17 PM	Helium MFC set to  0.000000
12/19/2011	2:44:17 PM	H2 MFC set to  0.000000
12/19/2011	2:44:17 PM	BCl3 MFC set to  0.000000
12/19/2011	2:44:17 PM	PHl3 MFC set to  0.000000
12/19/2011	2:44:18 PM	SiCl4 MFC set to  0.000000
12/19/2011	2:44:18 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	2:44:18 PM	Tube furnace set to 0
12/19/2011	2:44:48 PM	H2 valve closed
12/19/2011	2:44:48 PM	BCl3 valve closed
12/19/2011	2:44:48 PM	PH3 valve closed
12/19/2011	2:44:48 PM	SiCl4 pre valve closed
12/19/2011	2:44:48 PM	SiCl4 post valve closed
12/19/2011	2:44:48 PM	Bypass valve closed
12/19/2011	2:44:48 PM	Bubbler valve closed
12/19/2011	2:44:48 PM	Helium valve opened
12/19/2011	2:44:48 PM	Main Vac valve opened
12/19/2011	2:44:48 PM	Helium MFC set to  20.000000
12/19/2011	2:44:48 PM	H2 MFC set to  0.000000
12/19/2011	2:44:48 PM	BCl3 MFC set to  0.000000
12/19/2011	2:44:48 PM	PHl3 MFC set to  0.000000
12/19/2011	2:44:48 PM	SiCl4 MFC set to  0.000000
12/19/2011	2:44:48 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	2:44:48 PM	Tube furnace set to 0
12/19/2011	2:45:18 PM	Helium valve closed
12/19/2011	2:45:18 PM	H2 valve closed
12/19/2011	2:45:18 PM	BCl3 valve closed
12/19/2011	2:45:18 PM	PH3 valve closed
12/19/2011	2:45:18 PM	SiCl4 pre valve closed
12/19/2011	2:45:18 PM	SiCl4 post valve closed
12/19/2011	2:45:18 PM	Bypass valve closed
12/19/2011	2:45:18 PM	Bubbler valve closed
12/19/2011	2:45:18 PM	Main Vac valve opened
12/19/2011	2:45:18 PM	Helium MFC set to  0.000000
12/19/2011	2:45:18 PM	H2 MFC set to  0.000000
12/19/2011	2:45:18 PM	BCl3 MFC set to  0.000000
12/19/2011	2:45:18 PM	PHl3 MFC set to  0.000000
12/19/2011	2:45:18 PM	SiCl4 MFC set to  0.000000
12/19/2011	2:45:18 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	2:45:18 PM	Tube furnace set to 0
12/19/2011	2:45:48 PM	H2 valve closed
12/19/2011	2:45:48 PM	BCl3 valve closed
12/19/2011	2:45:48 PM	PH3 valve closed
12/19/2011	2:45:48 PM	SiCl4 pre valve closed
12/19/2011	2:45:48 PM	SiCl4 post valve closed
12/19/2011	2:45:48 PM	Bypass valve closed
12/19/2011	2:45:48 PM	Bubbler valve closed
12/19/2011	2:45:48 PM	Helium valve opened
12/19/2011	2:45:48 PM	Main Vac valve opened
12/19/2011	2:45:48 PM	Helium MFC set to  20.000000
12/19/2011	2:45:48 PM	H2 MFC set to  0.000000
12/19/2011	2:45:48 PM	BCl3 MFC set to  0.000000
12/19/2011	2:45:48 PM	PHl3 MFC set to  0.000000
12/19/2011	2:45:48 PM	SiCl4 MFC set to  0.000000
12/19/2011	2:45:48 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	2:45:48 PM	Tube furnace set to 0
12/19/2011	2:46:18 PM	Helium valve closed
12/19/2011	2:46:18 PM	H2 valve closed
12/19/2011	2:46:18 PM	BCl3 valve closed
12/19/2011	2:46:18 PM	PH3 valve closed
12/19/2011	2:46:18 PM	SiCl4 pre valve closed
12/19/2011	2:46:18 PM	SiCl4 post valve closed
12/19/2011	2:46:18 PM	Bypass valve closed
12/19/2011	2:46:18 PM	Bubbler valve closed
12/19/2011	2:46:18 PM	Main Vac valve opened
12/19/2011	2:46:18 PM	Helium MFC set to  0.000000
12/19/2011	2:46:18 PM	H2 MFC set to  0.000000
12/19/2011	2:46:18 PM	BCl3 MFC set to  0.000000
12/19/2011	2:46:18 PM	PHl3 MFC set to  0.000000
12/19/2011	2:46:18 PM	SiCl4 MFC set to  0.000000
12/19/2011	2:46:18 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	2:46:18 PM	Tube furnace set to 0
12/19/2011	2:46:40 PM	H2 valve closed
12/19/2011	2:46:40 PM	BCl3 valve closed
12/19/2011	2:46:40 PM	PH3 valve closed
12/19/2011	2:46:40 PM	SiCl4 pre valve closed
12/19/2011	2:46:40 PM	SiCl4 post valve closed
12/19/2011	2:46:40 PM	Bypass valve closed
12/19/2011	2:46:40 PM	Bubbler valve closed
12/19/2011	2:46:40 PM	Helium valve opened
12/19/2011	2:46:40 PM	Main Vac valve opened
12/19/2011	2:46:40 PM	Helium MFC set to  20.000000
12/19/2011	2:46:40 PM	H2 MFC set to  0.000000
12/19/2011	2:46:40 PM	BCl3 MFC set to  0.000000
12/19/2011	2:46:40 PM	PHl3 MFC set to  0.000000
12/19/2011	2:46:40 PM	SiCl4 MFC set to  0.000000
12/19/2011	2:46:40 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	2:46:40 PM	Tube furnace set to 0
12/19/2011	2:46:40 PM	Helium valve closed
12/19/2011	2:46:40 PM	H2 valve closed
12/19/2011	2:46:40 PM	BCl3 valve closed
12/19/2011	2:46:40 PM	PH3 valve closed
12/19/2011	2:46:40 PM	SiCl4 pre valve closed
12/19/2011	2:46:40 PM	SiCl4 post valve closed
12/19/2011	2:46:40 PM	Bypass valve closed
12/19/2011	2:46:40 PM	Bubbler valve closed
12/19/2011	2:46:40 PM	Main Vac valve opened
12/19/2011	2:46:40 PM	Helium MFC set to  0.000000
12/19/2011	2:46:40 PM	H2 MFC set to  0.000000
12/19/2011	2:46:40 PM	BCl3 MFC set to  0.000000
12/19/2011	2:46:40 PM	PHl3 MFC set to  0.000000
12/19/2011	2:46:40 PM	SiCl4 MFC set to  0.000000
12/19/2011	2:46:40 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	2:46:40 PM	Tube furnace set to 0
12/19/2011	2:46:41 PM	Run finished at 2:46 PM
12/19/2011	2:46:41 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
12/19/2011	2:47:12 PM	Main Vac valve closed
12/19/2011	2:47:32 PM	Main Vac valve opened
12/19/2011	2:48:12 PM	Recipe started at 2:48 PM
12/19/2011	2:48:12 PM	Helium valve closed
12/19/2011	2:48:12 PM	H2 valve closed
12/19/2011	2:48:12 PM	BCl3 valve closed
12/19/2011	2:48:12 PM	PH3 valve closed
12/19/2011	2:48:12 PM	SiCl4 pre valve closed
12/19/2011	2:48:12 PM	SiCl4 post valve closed
12/19/2011	2:48:12 PM	Main Vac valve closed
12/19/2011	2:48:12 PM	Bypass valve closed
12/19/2011	2:48:12 PM	Bubbler valve closed
12/19/2011	2:48:12 PM	Helium MFC set to  0.000000
12/19/2011	2:48:12 PM	H2 MFC set to  0.000000
12/19/2011	2:48:12 PM	BCl3 MFC set to  0.000000
12/19/2011	2:48:12 PM	PHl3 MFC set to  0.000000
12/19/2011	2:48:12 PM	SiCl4 MFC set to  0.000000
12/19/2011	2:48:12 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	2:48:13 PM	Tube furnace set to 0
12/19/2011	2:48:16 PM	Helium valve closed
12/19/2011	2:48:16 PM	BCl3 valve closed
12/19/2011	2:48:16 PM	PH3 valve closed
12/19/2011	2:48:16 PM	SiCl4 pre valve closed
12/19/2011	2:48:16 PM	SiCl4 post valve closed
12/19/2011	2:48:16 PM	Main Vac valve closed
12/19/2011	2:48:16 PM	Bypass valve closed
12/19/2011	2:48:16 PM	Bubbler valve closed
12/19/2011	2:48:16 PM	H2 valve opened
12/19/2011	2:48:16 PM	Helium MFC set to  0.000000
12/19/2011	2:48:16 PM	H2 MFC set to  500.000000
12/19/2011	2:48:16 PM	BCl3 MFC set to  0.000000
12/19/2011	2:48:16 PM	PHl3 MFC set to  0.000000
12/19/2011	2:48:16 PM	SiCl4 MFC set to  0.000000
12/19/2011	2:48:16 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	2:48:16 PM	Tube furnace set to 0
12/19/2011	2:49:20 PM	Helium valve closed
12/19/2011	2:49:20 PM	BCl3 valve closed
12/19/2011	2:49:20 PM	PH3 valve closed
12/19/2011	2:49:20 PM	SiCl4 pre valve closed
12/19/2011	2:49:20 PM	SiCl4 post valve closed
12/19/2011	2:49:20 PM	Main Vac valve closed
12/19/2011	2:49:20 PM	Bypass valve closed
12/19/2011	2:49:20 PM	H2 valve opened
12/19/2011	2:49:20 PM	Bubbler valve opened
12/19/2011	2:49:20 PM	Helium MFC set to  0.000000
12/19/2011	2:49:20 PM	H2 MFC set to  500.000000
12/19/2011	2:49:20 PM	BCl3 MFC set to  0.000000
12/19/2011	2:49:20 PM	PHl3 MFC set to  0.000000
12/19/2011	2:49:20 PM	SiCl4 MFC set to  0.000000
12/19/2011	2:49:20 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	2:49:20 PM	Tube furnace set to 0
12/19/2011	2:49:21 PM	Helium valve closed
12/19/2011	2:49:21 PM	BCl3 valve closed
12/19/2011	2:49:21 PM	PH3 valve closed
12/19/2011	2:49:21 PM	SiCl4 pre valve closed
12/19/2011	2:49:21 PM	SiCl4 post valve closed
12/19/2011	2:49:21 PM	Main Vac valve closed
12/19/2011	2:49:21 PM	Bypass valve closed
12/19/2011	2:49:21 PM	H2 valve opened
12/19/2011	2:49:21 PM	Bubbler valve opened
12/19/2011	2:49:21 PM	Helium MFC set to  0.000000
12/19/2011	2:49:21 PM	H2 MFC set to  500.000000
12/19/2011	2:49:21 PM	BCl3 MFC set to  0.000000
12/19/2011	2:49:21 PM	PHl3 MFC set to  0.000000
12/19/2011	2:49:21 PM	SiCl4 MFC set to  0.000000
12/19/2011	2:49:21 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	2:49:21 PM	Tube furnace set to 950
12/19/2011	3:04:21 PM	Helium valve closed
12/19/2011	3:04:21 PM	PH3 valve closed
12/19/2011	3:04:21 PM	SiCl4 pre valve closed
12/19/2011	3:04:21 PM	SiCl4 post valve closed
12/19/2011	3:04:21 PM	Main Vac valve closed
12/19/2011	3:04:21 PM	Bypass valve closed
12/19/2011	3:04:21 PM	H2 valve opened
12/19/2011	3:04:21 PM	BCl3 valve opened
12/19/2011	3:04:21 PM	Bubbler valve opened
12/19/2011	3:04:21 PM	Helium MFC set to  0.000000
12/19/2011	3:04:21 PM	H2 MFC set to  350.000000
12/19/2011	3:04:21 PM	BCl3 MFC set to  20.000000
12/19/2011	3:04:21 PM	PHl3 MFC set to  0.000000
12/19/2011	3:04:21 PM	SiCl4 MFC set to  0.000000
12/19/2011	3:04:21 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	3:04:21 PM	Tube furnace set to 950
12/19/2011	3:34:21 PM	Helium valve closed
12/19/2011	3:34:21 PM	BCl3 valve closed
12/19/2011	3:34:21 PM	PH3 valve closed
12/19/2011	3:34:21 PM	SiCl4 pre valve closed
12/19/2011	3:34:21 PM	SiCl4 post valve closed
12/19/2011	3:34:21 PM	Main Vac valve closed
12/19/2011	3:34:21 PM	Bypass valve closed
12/19/2011	3:34:21 PM	H2 valve opened
12/19/2011	3:34:21 PM	Bubbler valve opened
12/19/2011	3:34:21 PM	Helium MFC set to  0.000000
12/19/2011	3:34:21 PM	H2 MFC set to  500.000000
12/19/2011	3:34:21 PM	BCl3 MFC set to  0.000000
12/19/2011	3:34:21 PM	PHl3 MFC set to  0.000000
12/19/2011	3:34:21 PM	SiCl4 MFC set to  0.000000
12/19/2011	3:34:21 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	3:34:21 PM	Tube furnace set to 750
12/19/2011	3:39:21 PM	H2 valve closed
12/19/2011	3:39:21 PM	BCl3 valve closed
12/19/2011	3:39:21 PM	PH3 valve closed
12/19/2011	3:39:21 PM	SiCl4 pre valve closed
12/19/2011	3:39:21 PM	SiCl4 post valve closed
12/19/2011	3:39:21 PM	Main Vac valve closed
12/19/2011	3:39:21 PM	Bypass valve closed
12/19/2011	3:39:21 PM	Helium valve opened
12/19/2011	3:39:21 PM	Bubbler valve opened
12/19/2011	3:39:21 PM	Helium MFC set to  500.000000
12/19/2011	3:39:21 PM	H2 MFC set to  0.000000
12/19/2011	3:39:21 PM	BCl3 MFC set to  0.000000
12/19/2011	3:39:21 PM	PHl3 MFC set to  0.000000
12/19/2011	3:39:21 PM	SiCl4 MFC set to  0.000000
12/19/2011	3:39:21 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	3:39:22 PM	Tube furnace set to 0
12/19/2011	3:59:22 PM	Helium valve closed
12/19/2011	3:59:22 PM	H2 valve closed
12/19/2011	3:59:22 PM	BCl3 valve closed
12/19/2011	3:59:22 PM	PH3 valve closed
12/19/2011	3:59:22 PM	SiCl4 pre valve closed
12/19/2011	3:59:22 PM	SiCl4 post valve closed
12/19/2011	3:59:22 PM	Main Vac valve closed
12/19/2011	3:59:22 PM	Bypass valve closed
12/19/2011	3:59:22 PM	Bubbler valve closed
12/19/2011	3:59:22 PM	Helium MFC set to  0.000000
12/19/2011	3:59:22 PM	H2 MFC set to  0.000000
12/19/2011	3:59:22 PM	BCl3 MFC set to  0.000000
12/19/2011	3:59:22 PM	PHl3 MFC set to  0.000000
12/19/2011	3:59:22 PM	SiCl4 MFC set to  0.000000
12/19/2011	3:59:22 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	3:59:22 PM	Tube furnace set to 0
12/19/2011	3:59:23 PM	Run finished at 3:59 PM
12/19/2011	4:09:11 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/19/2011	4:09:12 PM	Recipe started at 4:09 PM
12/19/2011	4:09:12 PM	Helium valve closed
12/19/2011	4:09:12 PM	H2 valve closed
12/19/2011	4:09:12 PM	BCl3 valve closed
12/19/2011	4:09:12 PM	PH3 valve closed
12/19/2011	4:09:12 PM	SiCl4 pre valve closed
12/19/2011	4:09:12 PM	SiCl4 post valve closed
12/19/2011	4:09:12 PM	Main Vac valve closed
12/19/2011	4:09:12 PM	Bypass valve closed
12/19/2011	4:09:12 PM	Bubbler valve closed
12/19/2011	4:09:12 PM	Helium MFC set to  0.000000
12/19/2011	4:09:12 PM	H2 MFC set to  0.000000
12/19/2011	4:09:12 PM	BCl3 MFC set to  0.000000
12/19/2011	4:09:12 PM	PHl3 MFC set to  0.000000
12/19/2011	4:09:12 PM	SiCl4 MFC set to  0.000000
12/19/2011	4:09:12 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	4:09:12 PM	Tube furnace set to 0
12/19/2011	4:09:15 PM	H2 valve closed
12/19/2011	4:09:15 PM	BCl3 valve closed
12/19/2011	4:09:15 PM	PH3 valve closed
12/19/2011	4:09:15 PM	SiCl4 pre valve closed
12/19/2011	4:09:15 PM	SiCl4 post valve closed
12/19/2011	4:09:15 PM	Main Vac valve closed
12/19/2011	4:09:15 PM	Bypass valve closed
12/19/2011	4:09:15 PM	Bubbler valve closed
12/19/2011	4:09:15 PM	Helium valve opened
12/19/2011	4:09:15 PM	Helium MFC set to  500.000000
12/19/2011	4:09:15 PM	H2 MFC set to  0.000000
12/19/2011	4:09:15 PM	BCl3 MFC set to  0.000000
12/19/2011	4:09:15 PM	PHl3 MFC set to  0.000000
12/19/2011	4:09:15 PM	SiCl4 MFC set to  0.000000
12/19/2011	4:09:15 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	4:09:16 PM	Tube furnace set to 0
12/19/2011	4:09:17 PM	Helium valve closed
12/19/2011	4:09:17 PM	H2 valve closed
12/19/2011	4:09:17 PM	BCl3 valve closed
12/19/2011	4:09:17 PM	PH3 valve closed
12/19/2011	4:09:17 PM	SiCl4 pre valve closed
12/19/2011	4:09:17 PM	SiCl4 post valve closed
12/19/2011	4:09:17 PM	Main Vac valve closed
12/19/2011	4:09:17 PM	Bypass valve closed
12/19/2011	4:09:17 PM	Bubbler valve closed
12/19/2011	4:09:17 PM	Helium MFC set to  0.000000
12/19/2011	4:09:17 PM	H2 MFC set to  0.000000
12/19/2011	4:09:17 PM	BCl3 MFC set to  0.000000
12/19/2011	4:09:17 PM	PHl3 MFC set to  0.000000
12/19/2011	4:09:17 PM	SiCl4 MFC set to  0.000000
12/19/2011	4:09:17 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	4:09:17 PM	Tube furnace set to 0
12/19/2011	4:09:18 PM	Run finished at 4:09 PM
12/19/2011	4:09:18 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/19/2011	4:11:29 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/19/2011	4:11:30 PM	Recipe started at 4:11 PM
12/19/2011	4:11:30 PM	Helium valve closed
12/19/2011	4:11:30 PM	H2 valve closed
12/19/2011	4:11:30 PM	BCl3 valve closed
12/19/2011	4:11:30 PM	PH3 valve closed
12/19/2011	4:11:30 PM	SiCl4 pre valve closed
12/19/2011	4:11:30 PM	SiCl4 post valve closed
12/19/2011	4:11:30 PM	Main Vac valve closed
12/19/2011	4:11:30 PM	Bubbler valve closed
12/19/2011	4:11:30 PM	Bypass valve opened
12/19/2011	4:11:30 PM	Helium MFC set to  0.000000
12/19/2011	4:11:30 PM	H2 MFC set to  0.000000
12/19/2011	4:11:30 PM	BCl3 MFC set to  0.000000
12/19/2011	4:11:30 PM	PHl3 MFC set to  0.000000
12/19/2011	4:11:30 PM	SiCl4 MFC set to  0.000000
12/19/2011	4:11:30 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	4:11:30 PM	Tube furnace set to 0
12/19/2011	4:13:52 PM	Helium valve closed
12/19/2011	4:13:52 PM	H2 valve closed
12/19/2011	4:13:52 PM	BCl3 valve closed
12/19/2011	4:13:52 PM	PH3 valve closed
12/19/2011	4:13:52 PM	SiCl4 pre valve closed
12/19/2011	4:13:52 PM	SiCl4 post valve closed
12/19/2011	4:13:52 PM	Main Vac valve closed
12/19/2011	4:13:52 PM	Bubbler valve closed
12/19/2011	4:13:52 PM	Bypass valve opened
12/19/2011	4:13:52 PM	Helium MFC set to  0.000000
12/19/2011	4:13:52 PM	H2 MFC set to  0.000000
12/19/2011	4:13:52 PM	BCl3 MFC set to  0.000000
12/19/2011	4:13:52 PM	PHl3 MFC set to  0.000000
12/19/2011	4:13:52 PM	SiCl4 MFC set to  0.000000
12/19/2011	4:13:52 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	4:13:52 PM	Tube furnace set to 0
12/19/2011	4:14:52 PM	Helium valve closed
12/19/2011	4:14:52 PM	H2 valve closed
12/19/2011	4:14:52 PM	BCl3 valve closed
12/19/2011	4:14:52 PM	PH3 valve closed
12/19/2011	4:14:52 PM	SiCl4 pre valve closed
12/19/2011	4:14:52 PM	SiCl4 post valve closed
12/19/2011	4:14:52 PM	Bypass valve closed
12/19/2011	4:14:52 PM	Bubbler valve closed
12/19/2011	4:14:52 PM	Main Vac valve opened
12/19/2011	4:14:52 PM	Helium MFC set to  0.000000
12/19/2011	4:14:52 PM	H2 MFC set to  0.000000
12/19/2011	4:14:52 PM	BCl3 MFC set to  0.000000
12/19/2011	4:14:52 PM	PHl3 MFC set to  0.000000
12/19/2011	4:14:52 PM	SiCl4 MFC set to  0.000000
12/19/2011	4:14:52 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	4:14:52 PM	Tube furnace set to 0
12/19/2011	4:14:53 PM	Run finished at 4:14 PM
12/19/2011	4:14:53 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/19/2011	5:07:24 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
12/19/2011	5:07:37 PM	Recipe started at 5:07 PM
12/19/2011	5:07:37 PM	Helium valve closed
12/19/2011	5:07:37 PM	H2 valve closed
12/19/2011	5:07:37 PM	BCl3 valve closed
12/19/2011	5:07:37 PM	PH3 valve closed
12/19/2011	5:07:37 PM	SiCl4 pre valve closed
12/19/2011	5:07:37 PM	SiCl4 post valve closed
12/19/2011	5:07:37 PM	Main Vac valve closed
12/19/2011	5:07:37 PM	Bubbler valve closed
12/19/2011	5:07:37 PM	Bypass valve opened
12/19/2011	5:07:37 PM	Helium MFC set to  0.000000
12/19/2011	5:07:37 PM	H2 MFC set to  0.000000
12/19/2011	5:07:37 PM	BCl3 MFC set to  0.000000
12/19/2011	5:07:37 PM	PHl3 MFC set to  0.000000
12/19/2011	5:07:37 PM	SiCl4 MFC set to  0.000000
12/19/2011	5:07:37 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	5:07:37 PM	Tube furnace set to 0
12/19/2011	5:07:38 PM	Helium valve closed
12/19/2011	5:07:38 PM	H2 valve closed
12/19/2011	5:07:38 PM	BCl3 valve closed
12/19/2011	5:07:38 PM	PH3 valve closed
12/19/2011	5:07:38 PM	SiCl4 pre valve closed
12/19/2011	5:07:38 PM	SiCl4 post valve closed
12/19/2011	5:07:38 PM	Main Vac valve closed
12/19/2011	5:07:38 PM	Bubbler valve closed
12/19/2011	5:07:38 PM	Bypass valve opened
12/19/2011	5:07:38 PM	Helium MFC set to  0.000000
12/19/2011	5:07:38 PM	H2 MFC set to  0.000000
12/19/2011	5:07:38 PM	BCl3 MFC set to  0.000000
12/19/2011	5:07:38 PM	PHl3 MFC set to  0.000000
12/19/2011	5:07:38 PM	SiCl4 MFC set to  0.000000
12/19/2011	5:07:38 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	5:07:38 PM	Tube furnace set to 0
12/19/2011	5:07:38 PM	Helium valve closed
12/19/2011	5:07:38 PM	H2 valve closed
12/19/2011	5:07:38 PM	BCl3 valve closed
12/19/2011	5:07:38 PM	PH3 valve closed
12/19/2011	5:07:38 PM	SiCl4 pre valve closed
12/19/2011	5:07:38 PM	SiCl4 post valve closed
12/19/2011	5:07:38 PM	Bypass valve closed
12/19/2011	5:07:38 PM	Bubbler valve closed
12/19/2011	5:07:38 PM	Main Vac valve opened
12/19/2011	5:07:38 PM	Helium MFC set to  0.000000
12/19/2011	5:07:38 PM	H2 MFC set to  0.000000
12/19/2011	5:07:38 PM	BCl3 MFC set to  0.000000
12/19/2011	5:07:38 PM	PHl3 MFC set to  0.000000
12/19/2011	5:07:38 PM	SiCl4 MFC set to  0.000000
12/19/2011	5:07:38 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	5:07:38 PM	Tube furnace set to 0
12/19/2011	5:07:39 PM	H2 valve closed
12/19/2011	5:07:39 PM	BCl3 valve closed
12/19/2011	5:07:39 PM	PH3 valve closed
12/19/2011	5:07:39 PM	SiCl4 pre valve closed
12/19/2011	5:07:39 PM	SiCl4 post valve closed
12/19/2011	5:07:39 PM	Bypass valve closed
12/19/2011	5:07:39 PM	Bubbler valve closed
12/19/2011	5:07:39 PM	Helium valve opened
12/19/2011	5:07:39 PM	Main Vac valve opened
12/19/2011	5:07:39 PM	Helium MFC set to  20.000000
12/19/2011	5:07:39 PM	H2 MFC set to  0.000000
12/19/2011	5:07:39 PM	BCl3 MFC set to  0.000000
12/19/2011	5:07:39 PM	PHl3 MFC set to  0.000000
12/19/2011	5:07:39 PM	SiCl4 MFC set to  0.000000
12/19/2011	5:07:39 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	5:07:39 PM	Tube furnace set to 0
12/19/2011	5:08:09 PM	Helium valve closed
12/19/2011	5:08:09 PM	H2 valve closed
12/19/2011	5:08:09 PM	BCl3 valve closed
12/19/2011	5:08:09 PM	PH3 valve closed
12/19/2011	5:08:09 PM	SiCl4 pre valve closed
12/19/2011	5:08:09 PM	SiCl4 post valve closed
12/19/2011	5:08:09 PM	Bypass valve closed
12/19/2011	5:08:09 PM	Bubbler valve closed
12/19/2011	5:08:09 PM	Main Vac valve opened
12/19/2011	5:08:09 PM	Helium MFC set to  0.000000
12/19/2011	5:08:09 PM	H2 MFC set to  0.000000
12/19/2011	5:08:09 PM	BCl3 MFC set to  0.000000
12/19/2011	5:08:09 PM	PHl3 MFC set to  0.000000
12/19/2011	5:08:09 PM	SiCl4 MFC set to  0.000000
12/19/2011	5:08:10 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	5:08:10 PM	Tube furnace set to 0
12/19/2011	5:08:40 PM	H2 valve closed
12/19/2011	5:08:40 PM	BCl3 valve closed
12/19/2011	5:08:40 PM	PH3 valve closed
12/19/2011	5:08:40 PM	SiCl4 pre valve closed
12/19/2011	5:08:40 PM	SiCl4 post valve closed
12/19/2011	5:08:40 PM	Bypass valve closed
12/19/2011	5:08:40 PM	Bubbler valve closed
12/19/2011	5:08:40 PM	Helium valve opened
12/19/2011	5:08:40 PM	Main Vac valve opened
12/19/2011	5:08:40 PM	Helium MFC set to  20.000000
12/19/2011	5:08:40 PM	H2 MFC set to  0.000000
12/19/2011	5:08:40 PM	BCl3 MFC set to  0.000000
12/19/2011	5:08:40 PM	PHl3 MFC set to  0.000000
12/19/2011	5:08:40 PM	SiCl4 MFC set to  0.000000
12/19/2011	5:08:40 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	5:08:40 PM	Tube furnace set to 0
12/19/2011	5:09:10 PM	Helium valve closed
12/19/2011	5:09:10 PM	H2 valve closed
12/19/2011	5:09:10 PM	BCl3 valve closed
12/19/2011	5:09:10 PM	PH3 valve closed
12/19/2011	5:09:10 PM	SiCl4 pre valve closed
12/19/2011	5:09:10 PM	SiCl4 post valve closed
12/19/2011	5:09:10 PM	Bypass valve closed
12/19/2011	5:09:10 PM	Bubbler valve closed
12/19/2011	5:09:10 PM	Main Vac valve opened
12/19/2011	5:09:10 PM	Helium MFC set to  0.000000
12/19/2011	5:09:10 PM	H2 MFC set to  0.000000
12/19/2011	5:09:10 PM	BCl3 MFC set to  0.000000
12/19/2011	5:09:10 PM	PHl3 MFC set to  0.000000
12/19/2011	5:09:10 PM	SiCl4 MFC set to  0.000000
12/19/2011	5:09:10 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	5:09:10 PM	Tube furnace set to 0
12/19/2011	5:09:40 PM	H2 valve closed
12/19/2011	5:09:40 PM	BCl3 valve closed
12/19/2011	5:09:40 PM	PH3 valve closed
12/19/2011	5:09:40 PM	SiCl4 pre valve closed
12/19/2011	5:09:40 PM	SiCl4 post valve closed
12/19/2011	5:09:40 PM	Bypass valve closed
12/19/2011	5:09:40 PM	Bubbler valve closed
12/19/2011	5:09:40 PM	Helium valve opened
12/19/2011	5:09:40 PM	Main Vac valve opened
12/19/2011	5:09:40 PM	Helium MFC set to  20.000000
12/19/2011	5:09:40 PM	H2 MFC set to  0.000000
12/19/2011	5:09:40 PM	BCl3 MFC set to  0.000000
12/19/2011	5:09:40 PM	PHl3 MFC set to  0.000000
12/19/2011	5:09:40 PM	SiCl4 MFC set to  0.000000
12/19/2011	5:09:40 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	5:09:40 PM	Tube furnace set to 0
12/19/2011	5:10:10 PM	Helium valve closed
12/19/2011	5:10:10 PM	H2 valve closed
12/19/2011	5:10:10 PM	BCl3 valve closed
12/19/2011	5:10:10 PM	PH3 valve closed
12/19/2011	5:10:10 PM	SiCl4 pre valve closed
12/19/2011	5:10:10 PM	SiCl4 post valve closed
12/19/2011	5:10:10 PM	Bypass valve closed
12/19/2011	5:10:10 PM	Bubbler valve closed
12/19/2011	5:10:10 PM	Main Vac valve opened
12/19/2011	5:10:10 PM	Helium MFC set to  0.000000
12/19/2011	5:10:10 PM	H2 MFC set to  0.000000
12/19/2011	5:10:10 PM	BCl3 MFC set to  0.000000
12/19/2011	5:10:10 PM	PHl3 MFC set to  0.000000
12/19/2011	5:10:10 PM	SiCl4 MFC set to  0.000000
12/19/2011	5:10:10 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	5:10:10 PM	Tube furnace set to 0
12/19/2011	5:10:40 PM	H2 valve closed
12/19/2011	5:10:40 PM	BCl3 valve closed
12/19/2011	5:10:40 PM	PH3 valve closed
12/19/2011	5:10:40 PM	SiCl4 pre valve closed
12/19/2011	5:10:40 PM	SiCl4 post valve closed
12/19/2011	5:10:40 PM	Bypass valve closed
12/19/2011	5:10:40 PM	Bubbler valve closed
12/19/2011	5:10:40 PM	Helium valve opened
12/19/2011	5:10:40 PM	Main Vac valve opened
12/19/2011	5:10:40 PM	Helium MFC set to  20.000000
12/19/2011	5:10:40 PM	H2 MFC set to  0.000000
12/19/2011	5:10:40 PM	BCl3 MFC set to  0.000000
12/19/2011	5:10:40 PM	PHl3 MFC set to  0.000000
12/19/2011	5:10:40 PM	SiCl4 MFC set to  0.000000
12/19/2011	5:10:40 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	5:10:41 PM	Tube furnace set to 0
12/19/2011	5:11:11 PM	Helium valve closed
12/19/2011	5:11:11 PM	H2 valve closed
12/19/2011	5:11:11 PM	BCl3 valve closed
12/19/2011	5:11:11 PM	PH3 valve closed
12/19/2011	5:11:11 PM	SiCl4 pre valve closed
12/19/2011	5:11:11 PM	SiCl4 post valve closed
12/19/2011	5:11:11 PM	Bypass valve closed
12/19/2011	5:11:11 PM	Bubbler valve closed
12/19/2011	5:11:11 PM	Main Vac valve opened
12/19/2011	5:11:11 PM	Helium MFC set to  0.000000
12/19/2011	5:11:11 PM	H2 MFC set to  0.000000
12/19/2011	5:11:11 PM	BCl3 MFC set to  0.000000
12/19/2011	5:11:11 PM	PHl3 MFC set to  0.000000
12/19/2011	5:11:11 PM	SiCl4 MFC set to  0.000000
12/19/2011	5:11:11 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	5:11:11 PM	Tube furnace set to 0
12/19/2011	5:11:41 PM	H2 valve closed
12/19/2011	5:11:41 PM	BCl3 valve closed
12/19/2011	5:11:41 PM	PH3 valve closed
12/19/2011	5:11:41 PM	SiCl4 pre valve closed
12/19/2011	5:11:41 PM	SiCl4 post valve closed
12/19/2011	5:11:41 PM	Bypass valve closed
12/19/2011	5:11:41 PM	Bubbler valve closed
12/19/2011	5:11:41 PM	Helium valve opened
12/19/2011	5:11:41 PM	Main Vac valve opened
12/19/2011	5:11:41 PM	Helium MFC set to  20.000000
12/19/2011	5:11:41 PM	H2 MFC set to  0.000000
12/19/2011	5:11:41 PM	BCl3 MFC set to  0.000000
12/19/2011	5:11:41 PM	PHl3 MFC set to  0.000000
12/19/2011	5:11:41 PM	SiCl4 MFC set to  0.000000
12/19/2011	5:11:41 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	5:11:41 PM	Tube furnace set to 0
12/19/2011	5:12:11 PM	Helium valve closed
12/19/2011	5:12:11 PM	H2 valve closed
12/19/2011	5:12:11 PM	BCl3 valve closed
12/19/2011	5:12:11 PM	PH3 valve closed
12/19/2011	5:12:11 PM	SiCl4 pre valve closed
12/19/2011	5:12:11 PM	SiCl4 post valve closed
12/19/2011	5:12:11 PM	Bypass valve closed
12/19/2011	5:12:11 PM	Bubbler valve closed
12/19/2011	5:12:11 PM	Main Vac valve opened
12/19/2011	5:12:11 PM	Helium MFC set to  0.000000
12/19/2011	5:12:11 PM	H2 MFC set to  0.000000
12/19/2011	5:12:11 PM	BCl3 MFC set to  0.000000
12/19/2011	5:12:11 PM	PHl3 MFC set to  0.000000
12/19/2011	5:12:11 PM	SiCl4 MFC set to  0.000000
12/19/2011	5:12:11 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	5:12:11 PM	Tube furnace set to 0
12/19/2011	5:12:41 PM	H2 valve closed
12/19/2011	5:12:41 PM	BCl3 valve closed
12/19/2011	5:12:41 PM	PH3 valve closed
12/19/2011	5:12:41 PM	SiCl4 pre valve closed
12/19/2011	5:12:41 PM	SiCl4 post valve closed
12/19/2011	5:12:41 PM	Bypass valve closed
12/19/2011	5:12:41 PM	Bubbler valve closed
12/19/2011	5:12:41 PM	Helium valve opened
12/19/2011	5:12:41 PM	Main Vac valve opened
12/19/2011	5:12:41 PM	Helium MFC set to  20.000000
12/19/2011	5:12:41 PM	H2 MFC set to  0.000000
12/19/2011	5:12:41 PM	BCl3 MFC set to  0.000000
12/19/2011	5:12:41 PM	PHl3 MFC set to  0.000000
12/19/2011	5:12:41 PM	SiCl4 MFC set to  0.000000
12/19/2011	5:12:41 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	5:12:41 PM	Tube furnace set to 0
12/19/2011	5:13:11 PM	Helium valve closed
12/19/2011	5:13:11 PM	H2 valve closed
12/19/2011	5:13:11 PM	BCl3 valve closed
12/19/2011	5:13:11 PM	PH3 valve closed
12/19/2011	5:13:11 PM	SiCl4 pre valve closed
12/19/2011	5:13:11 PM	SiCl4 post valve closed
12/19/2011	5:13:11 PM	Bypass valve closed
12/19/2011	5:13:11 PM	Bubbler valve closed
12/19/2011	5:13:11 PM	Main Vac valve opened
12/19/2011	5:13:11 PM	Helium MFC set to  0.000000
12/19/2011	5:13:12 PM	H2 MFC set to  0.000000
12/19/2011	5:13:12 PM	BCl3 MFC set to  0.000000
12/19/2011	5:13:12 PM	PHl3 MFC set to  0.000000
12/19/2011	5:13:12 PM	SiCl4 MFC set to  0.000000
12/19/2011	5:13:12 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	5:13:12 PM	Tube furnace set to 0
12/19/2011	5:13:42 PM	H2 valve closed
12/19/2011	5:13:42 PM	BCl3 valve closed
12/19/2011	5:13:42 PM	PH3 valve closed
12/19/2011	5:13:42 PM	SiCl4 pre valve closed
12/19/2011	5:13:42 PM	SiCl4 post valve closed
12/19/2011	5:13:42 PM	Bypass valve closed
12/19/2011	5:13:42 PM	Bubbler valve closed
12/19/2011	5:13:42 PM	Helium valve opened
12/19/2011	5:13:42 PM	Main Vac valve opened
12/19/2011	5:13:42 PM	Helium MFC set to  20.000000
12/19/2011	5:13:42 PM	H2 MFC set to  0.000000
12/19/2011	5:13:42 PM	BCl3 MFC set to  0.000000
12/19/2011	5:13:42 PM	PHl3 MFC set to  0.000000
12/19/2011	5:13:42 PM	SiCl4 MFC set to  0.000000
12/19/2011	5:13:42 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	5:13:42 PM	Tube furnace set to 0
12/19/2011	5:14:12 PM	Helium valve closed
12/19/2011	5:14:12 PM	H2 valve closed
12/19/2011	5:14:12 PM	BCl3 valve closed
12/19/2011	5:14:12 PM	PH3 valve closed
12/19/2011	5:14:12 PM	SiCl4 pre valve closed
12/19/2011	5:14:12 PM	SiCl4 post valve closed
12/19/2011	5:14:12 PM	Bypass valve closed
12/19/2011	5:14:12 PM	Bubbler valve closed
12/19/2011	5:14:12 PM	Main Vac valve opened
12/19/2011	5:14:12 PM	Helium MFC set to  0.000000
12/19/2011	5:14:12 PM	H2 MFC set to  0.000000
12/19/2011	5:14:12 PM	BCl3 MFC set to  0.000000
12/19/2011	5:14:12 PM	PHl3 MFC set to  0.000000
12/19/2011	5:14:12 PM	SiCl4 MFC set to  0.000000
12/19/2011	5:14:12 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	5:14:12 PM	Tube furnace set to 0
12/19/2011	5:14:42 PM	H2 valve closed
12/19/2011	5:14:42 PM	BCl3 valve closed
12/19/2011	5:14:42 PM	PH3 valve closed
12/19/2011	5:14:42 PM	SiCl4 pre valve closed
12/19/2011	5:14:42 PM	SiCl4 post valve closed
12/19/2011	5:14:42 PM	Bypass valve closed
12/19/2011	5:14:42 PM	Bubbler valve closed
12/19/2011	5:14:42 PM	Helium valve opened
12/19/2011	5:14:42 PM	Main Vac valve opened
12/19/2011	5:14:42 PM	Helium MFC set to  20.000000
12/19/2011	5:14:42 PM	H2 MFC set to  0.000000
12/19/2011	5:14:42 PM	BCl3 MFC set to  0.000000
12/19/2011	5:14:42 PM	PHl3 MFC set to  0.000000
12/19/2011	5:14:42 PM	SiCl4 MFC set to  0.000000
12/19/2011	5:14:42 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	5:14:42 PM	Tube furnace set to 0
12/19/2011	5:15:12 PM	Helium valve closed
12/19/2011	5:15:12 PM	H2 valve closed
12/19/2011	5:15:12 PM	BCl3 valve closed
12/19/2011	5:15:12 PM	PH3 valve closed
12/19/2011	5:15:12 PM	SiCl4 pre valve closed
12/19/2011	5:15:12 PM	SiCl4 post valve closed
12/19/2011	5:15:12 PM	Bypass valve closed
12/19/2011	5:15:12 PM	Bubbler valve closed
12/19/2011	5:15:12 PM	Main Vac valve opened
12/19/2011	5:15:12 PM	Helium MFC set to  0.000000
12/19/2011	5:15:12 PM	H2 MFC set to  0.000000
12/19/2011	5:15:12 PM	BCl3 MFC set to  0.000000
12/19/2011	5:15:12 PM	PHl3 MFC set to  0.000000
12/19/2011	5:15:12 PM	SiCl4 MFC set to  0.000000
12/19/2011	5:15:12 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	5:15:13 PM	Tube furnace set to 0
12/19/2011	5:15:43 PM	H2 valve closed
12/19/2011	5:15:43 PM	BCl3 valve closed
12/19/2011	5:15:43 PM	PH3 valve closed
12/19/2011	5:15:43 PM	SiCl4 pre valve closed
12/19/2011	5:15:43 PM	SiCl4 post valve closed
12/19/2011	5:15:43 PM	Bypass valve closed
12/19/2011	5:15:43 PM	Bubbler valve closed
12/19/2011	5:15:43 PM	Helium valve opened
12/19/2011	5:15:43 PM	Main Vac valve opened
12/19/2011	5:15:43 PM	Helium MFC set to  20.000000
12/19/2011	5:15:43 PM	H2 MFC set to  0.000000
12/19/2011	5:15:43 PM	BCl3 MFC set to  0.000000
12/19/2011	5:15:43 PM	PHl3 MFC set to  0.000000
12/19/2011	5:15:43 PM	SiCl4 MFC set to  0.000000
12/19/2011	5:15:43 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	5:15:43 PM	Tube furnace set to 0
12/19/2011	5:16:13 PM	Helium valve closed
12/19/2011	5:16:13 PM	H2 valve closed
12/19/2011	5:16:13 PM	BCl3 valve closed
12/19/2011	5:16:13 PM	PH3 valve closed
12/19/2011	5:16:13 PM	SiCl4 pre valve closed
12/19/2011	5:16:13 PM	SiCl4 post valve closed
12/19/2011	5:16:13 PM	Bypass valve closed
12/19/2011	5:16:13 PM	Bubbler valve closed
12/19/2011	5:16:13 PM	Main Vac valve opened
12/19/2011	5:16:13 PM	Helium MFC set to  0.000000
12/19/2011	5:16:13 PM	H2 MFC set to  0.000000
12/19/2011	5:16:13 PM	BCl3 MFC set to  0.000000
12/19/2011	5:16:13 PM	PHl3 MFC set to  0.000000
12/19/2011	5:16:13 PM	SiCl4 MFC set to  0.000000
12/19/2011	5:16:13 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	5:16:13 PM	Tube furnace set to 0
12/19/2011	5:16:43 PM	H2 valve closed
12/19/2011	5:16:43 PM	BCl3 valve closed
12/19/2011	5:16:43 PM	PH3 valve closed
12/19/2011	5:16:43 PM	SiCl4 pre valve closed
12/19/2011	5:16:43 PM	SiCl4 post valve closed
12/19/2011	5:16:43 PM	Bypass valve closed
12/19/2011	5:16:43 PM	Bubbler valve closed
12/19/2011	5:16:43 PM	Helium valve opened
12/19/2011	5:16:43 PM	Main Vac valve opened
12/19/2011	5:16:43 PM	Helium MFC set to  20.000000
12/19/2011	5:16:43 PM	H2 MFC set to  0.000000
12/19/2011	5:16:43 PM	BCl3 MFC set to  0.000000
12/19/2011	5:16:43 PM	PHl3 MFC set to  0.000000
12/19/2011	5:16:43 PM	SiCl4 MFC set to  0.000000
12/19/2011	5:16:43 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	5:16:43 PM	Tube furnace set to 0
12/19/2011	5:17:13 PM	Helium valve closed
12/19/2011	5:17:13 PM	H2 valve closed
12/19/2011	5:17:13 PM	BCl3 valve closed
12/19/2011	5:17:13 PM	PH3 valve closed
12/19/2011	5:17:13 PM	SiCl4 pre valve closed
12/19/2011	5:17:13 PM	SiCl4 post valve closed
12/19/2011	5:17:13 PM	Bypass valve closed
12/19/2011	5:17:13 PM	Bubbler valve closed
12/19/2011	5:17:13 PM	Main Vac valve opened
12/19/2011	5:17:13 PM	Helium MFC set to  0.000000
12/19/2011	5:17:13 PM	H2 MFC set to  0.000000
12/19/2011	5:17:13 PM	BCl3 MFC set to  0.000000
12/19/2011	5:17:13 PM	PHl3 MFC set to  0.000000
12/19/2011	5:17:13 PM	SiCl4 MFC set to  0.000000
12/19/2011	5:17:13 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	5:17:13 PM	Tube furnace set to 0
12/19/2011	5:17:14 PM	Run finished at 5:17 PM
12/19/2011	5:17:14 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
12/19/2011	5:23:34 PM	Main Vac valve closed
12/19/2011	5:23:54 PM	Main Vac valve opened
12/19/2011	5:24:31 PM	Recipe started at 5:24 PM
12/19/2011	5:24:31 PM	Helium valve closed
12/19/2011	5:24:31 PM	H2 valve closed
12/19/2011	5:24:31 PM	BCl3 valve closed
12/19/2011	5:24:31 PM	PH3 valve closed
12/19/2011	5:24:31 PM	SiCl4 pre valve closed
12/19/2011	5:24:31 PM	SiCl4 post valve closed
12/19/2011	5:24:31 PM	Main Vac valve closed
12/19/2011	5:24:31 PM	Bypass valve closed
12/19/2011	5:24:31 PM	Bubbler valve closed
12/19/2011	5:24:31 PM	Helium MFC set to  0.000000
12/19/2011	5:24:31 PM	H2 MFC set to  0.000000
12/19/2011	5:24:31 PM	BCl3 MFC set to  0.000000
12/19/2011	5:24:31 PM	PHl3 MFC set to  0.000000
12/19/2011	5:24:31 PM	SiCl4 MFC set to  0.000000
12/19/2011	5:24:31 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	5:24:31 PM	Tube furnace set to 0
12/19/2011	5:24:34 PM	Helium valve closed
12/19/2011	5:24:34 PM	BCl3 valve closed
12/19/2011	5:24:34 PM	PH3 valve closed
12/19/2011	5:24:34 PM	SiCl4 pre valve closed
12/19/2011	5:24:34 PM	SiCl4 post valve closed
12/19/2011	5:24:34 PM	Main Vac valve closed
12/19/2011	5:24:34 PM	Bypass valve closed
12/19/2011	5:24:34 PM	Bubbler valve closed
12/19/2011	5:24:34 PM	H2 valve opened
12/19/2011	5:24:34 PM	Helium MFC set to  0.000000
12/19/2011	5:24:34 PM	H2 MFC set to  500.000000
12/19/2011	5:24:34 PM	BCl3 MFC set to  0.000000
12/19/2011	5:24:34 PM	PHl3 MFC set to  0.000000
12/19/2011	5:24:34 PM	SiCl4 MFC set to  0.000000
12/19/2011	5:24:34 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	5:24:35 PM	Tube furnace set to 0
12/19/2011	5:25:41 PM	Helium valve closed
12/19/2011	5:25:41 PM	BCl3 valve closed
12/19/2011	5:25:41 PM	PH3 valve closed
12/19/2011	5:25:41 PM	SiCl4 pre valve closed
12/19/2011	5:25:41 PM	SiCl4 post valve closed
12/19/2011	5:25:41 PM	Main Vac valve closed
12/19/2011	5:25:41 PM	Bypass valve closed
12/19/2011	5:25:41 PM	H2 valve opened
12/19/2011	5:25:41 PM	Bubbler valve opened
12/19/2011	5:25:41 PM	Helium MFC set to  0.000000
12/19/2011	5:25:41 PM	H2 MFC set to  500.000000
12/19/2011	5:25:41 PM	BCl3 MFC set to  0.000000
12/19/2011	5:25:41 PM	PHl3 MFC set to  0.000000
12/19/2011	5:25:41 PM	SiCl4 MFC set to  0.000000
12/19/2011	5:25:41 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	5:25:42 PM	Tube furnace set to 0
12/19/2011	5:25:43 PM	Helium valve closed
12/19/2011	5:25:43 PM	BCl3 valve closed
12/19/2011	5:25:43 PM	PH3 valve closed
12/19/2011	5:25:43 PM	SiCl4 pre valve closed
12/19/2011	5:25:43 PM	SiCl4 post valve closed
12/19/2011	5:25:43 PM	Main Vac valve closed
12/19/2011	5:25:43 PM	Bypass valve closed
12/19/2011	5:25:43 PM	H2 valve opened
12/19/2011	5:25:43 PM	Bubbler valve opened
12/19/2011	5:25:43 PM	Helium MFC set to  0.000000
12/19/2011	5:25:43 PM	H2 MFC set to  500.000000
12/19/2011	5:25:43 PM	BCl3 MFC set to  0.000000
12/19/2011	5:25:43 PM	PHl3 MFC set to  0.000000
12/19/2011	5:25:43 PM	SiCl4 MFC set to  0.000000
12/19/2011	5:25:43 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	5:25:43 PM	Tube furnace set to 950
12/19/2011	5:40:43 PM	Helium valve closed
12/19/2011	5:40:43 PM	PH3 valve closed
12/19/2011	5:40:43 PM	SiCl4 pre valve closed
12/19/2011	5:40:43 PM	SiCl4 post valve closed
12/19/2011	5:40:43 PM	Main Vac valve closed
12/19/2011	5:40:43 PM	Bypass valve closed
12/19/2011	5:40:43 PM	H2 valve opened
12/19/2011	5:40:43 PM	BCl3 valve opened
12/19/2011	5:40:43 PM	Bubbler valve opened
12/19/2011	5:40:43 PM	Helium MFC set to  0.000000
12/19/2011	5:40:43 PM	H2 MFC set to  350.000000
12/19/2011	5:40:43 PM	BCl3 MFC set to  20.000000
12/19/2011	5:40:43 PM	PHl3 MFC set to  0.000000
12/19/2011	5:40:43 PM	SiCl4 MFC set to  0.000000
12/19/2011	5:40:43 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	5:40:43 PM	Tube furnace set to 950
12/19/2011	6:10:43 PM	Helium valve closed
12/19/2011	6:10:43 PM	BCl3 valve closed
12/19/2011	6:10:43 PM	PH3 valve closed
12/19/2011	6:10:43 PM	SiCl4 pre valve closed
12/19/2011	6:10:43 PM	SiCl4 post valve closed
12/19/2011	6:10:43 PM	Main Vac valve closed
12/19/2011	6:10:43 PM	Bypass valve closed
12/19/2011	6:10:43 PM	H2 valve opened
12/19/2011	6:10:43 PM	Bubbler valve opened
12/19/2011	6:10:43 PM	Helium MFC set to  0.000000
12/19/2011	6:10:43 PM	H2 MFC set to  500.000000
12/19/2011	6:10:43 PM	BCl3 MFC set to  0.000000
12/19/2011	6:10:43 PM	PHl3 MFC set to  0.000000
12/19/2011	6:10:43 PM	SiCl4 MFC set to  0.000000
12/19/2011	6:10:43 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	6:10:43 PM	Tube furnace set to 750
12/19/2011	6:15:43 PM	H2 valve closed
12/19/2011	6:15:43 PM	BCl3 valve closed
12/19/2011	6:15:43 PM	PH3 valve closed
12/19/2011	6:15:43 PM	SiCl4 pre valve closed
12/19/2011	6:15:43 PM	SiCl4 post valve closed
12/19/2011	6:15:43 PM	Main Vac valve closed
12/19/2011	6:15:43 PM	Bypass valve closed
12/19/2011	6:15:43 PM	Helium valve opened
12/19/2011	6:15:43 PM	Bubbler valve opened
12/19/2011	6:15:43 PM	Helium MFC set to  500.000000
12/19/2011	6:15:43 PM	H2 MFC set to  0.000000
12/19/2011	6:15:43 PM	BCl3 MFC set to  0.000000
12/19/2011	6:15:43 PM	PHl3 MFC set to  0.000000
12/19/2011	6:15:43 PM	SiCl4 MFC set to  0.000000
12/19/2011	6:15:43 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	6:15:43 PM	Tube furnace set to 0
12/19/2011	6:35:43 PM	Helium valve closed
12/19/2011	6:35:43 PM	H2 valve closed
12/19/2011	6:35:43 PM	BCl3 valve closed
12/19/2011	6:35:43 PM	PH3 valve closed
12/19/2011	6:35:43 PM	SiCl4 pre valve closed
12/19/2011	6:35:43 PM	SiCl4 post valve closed
12/19/2011	6:35:43 PM	Main Vac valve closed
12/19/2011	6:35:43 PM	Bypass valve closed
12/19/2011	6:35:43 PM	Bubbler valve closed
12/19/2011	6:35:43 PM	Helium MFC set to  0.000000
12/19/2011	6:35:43 PM	H2 MFC set to  0.000000
12/19/2011	6:35:43 PM	BCl3 MFC set to  0.000000
12/19/2011	6:35:43 PM	PHl3 MFC set to  0.000000
12/19/2011	6:35:43 PM	SiCl4 MFC set to  0.000000
12/19/2011	6:35:43 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	6:35:43 PM	Tube furnace set to 0
12/19/2011	6:35:44 PM	Run finished at 6:35 PM
12/19/2011	6:48:39 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/19/2011	6:48:40 PM	Recipe started at 6:48 PM
12/19/2011	6:48:40 PM	Helium valve closed
12/19/2011	6:48:40 PM	H2 valve closed
12/19/2011	6:48:40 PM	BCl3 valve closed
12/19/2011	6:48:40 PM	PH3 valve closed
12/19/2011	6:48:40 PM	SiCl4 pre valve closed
12/19/2011	6:48:40 PM	SiCl4 post valve closed
12/19/2011	6:48:40 PM	Main Vac valve closed
12/19/2011	6:48:40 PM	Bypass valve closed
12/19/2011	6:48:40 PM	Bubbler valve closed
12/19/2011	6:48:40 PM	Helium MFC set to  0.000000
12/19/2011	6:48:40 PM	H2 MFC set to  0.000000
12/19/2011	6:48:40 PM	BCl3 MFC set to  0.000000
12/19/2011	6:48:40 PM	PHl3 MFC set to  0.000000
12/19/2011	6:48:40 PM	SiCl4 MFC set to  0.000000
12/19/2011	6:48:40 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	6:48:40 PM	Tube furnace set to 0
12/19/2011	6:48:43 PM	H2 valve closed
12/19/2011	6:48:43 PM	BCl3 valve closed
12/19/2011	6:48:43 PM	PH3 valve closed
12/19/2011	6:48:43 PM	SiCl4 pre valve closed
12/19/2011	6:48:43 PM	SiCl4 post valve closed
12/19/2011	6:48:43 PM	Main Vac valve closed
12/19/2011	6:48:43 PM	Bypass valve closed
12/19/2011	6:48:43 PM	Bubbler valve closed
12/19/2011	6:48:43 PM	Helium valve opened
12/19/2011	6:48:43 PM	Helium MFC set to  500.000000
12/19/2011	6:48:43 PM	H2 MFC set to  0.000000
12/19/2011	6:48:43 PM	BCl3 MFC set to  0.000000
12/19/2011	6:48:43 PM	PHl3 MFC set to  0.000000
12/19/2011	6:48:43 PM	SiCl4 MFC set to  0.000000
12/19/2011	6:48:43 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	6:48:43 PM	Tube furnace set to 0
12/19/2011	6:48:48 PM	Helium valve closed
12/19/2011	6:48:48 PM	H2 valve closed
12/19/2011	6:48:48 PM	BCl3 valve closed
12/19/2011	6:48:48 PM	PH3 valve closed
12/19/2011	6:48:48 PM	SiCl4 pre valve closed
12/19/2011	6:48:48 PM	SiCl4 post valve closed
12/19/2011	6:48:48 PM	Main Vac valve closed
12/19/2011	6:48:48 PM	Bypass valve closed
12/19/2011	6:48:48 PM	Bubbler valve closed
12/19/2011	6:48:48 PM	Helium MFC set to  0.000000
12/19/2011	6:48:48 PM	H2 MFC set to  0.000000
12/19/2011	6:48:48 PM	BCl3 MFC set to  0.000000
12/19/2011	6:48:48 PM	PHl3 MFC set to  0.000000
12/19/2011	6:48:48 PM	SiCl4 MFC set to  0.000000
12/19/2011	6:48:48 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	6:48:49 PM	Tube furnace set to 0
12/19/2011	6:48:50 PM	Run finished at 6:48 PM
12/19/2011	6:48:50 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/19/2011	6:55:09 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/19/2011	6:55:10 PM	Recipe started at 6:55 PM
12/19/2011	6:55:10 PM	Helium valve closed
12/19/2011	6:55:10 PM	H2 valve closed
12/19/2011	6:55:10 PM	BCl3 valve closed
12/19/2011	6:55:10 PM	PH3 valve closed
12/19/2011	6:55:10 PM	SiCl4 pre valve closed
12/19/2011	6:55:10 PM	SiCl4 post valve closed
12/19/2011	6:55:10 PM	Main Vac valve closed
12/19/2011	6:55:10 PM	Bubbler valve closed
12/19/2011	6:55:10 PM	Bypass valve opened
12/19/2011	6:55:10 PM	Helium MFC set to  0.000000
12/19/2011	6:55:10 PM	H2 MFC set to  0.000000
12/19/2011	6:55:10 PM	BCl3 MFC set to  0.000000
12/19/2011	6:55:10 PM	PHl3 MFC set to  0.000000
12/19/2011	6:55:10 PM	SiCl4 MFC set to  0.000000
12/19/2011	6:55:10 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	6:55:10 PM	Tube furnace set to 0
12/19/2011	6:57:45 PM	Helium valve closed
12/19/2011	6:57:45 PM	H2 valve closed
12/19/2011	6:57:45 PM	BCl3 valve closed
12/19/2011	6:57:45 PM	PH3 valve closed
12/19/2011	6:57:45 PM	SiCl4 pre valve closed
12/19/2011	6:57:45 PM	SiCl4 post valve closed
12/19/2011	6:57:45 PM	Main Vac valve closed
12/19/2011	6:57:45 PM	Bubbler valve closed
12/19/2011	6:57:45 PM	Bypass valve opened
12/19/2011	6:57:45 PM	Helium MFC set to  0.000000
12/19/2011	6:57:45 PM	H2 MFC set to  0.000000
12/19/2011	6:57:45 PM	BCl3 MFC set to  0.000000
12/19/2011	6:57:45 PM	PHl3 MFC set to  0.000000
12/19/2011	6:57:45 PM	SiCl4 MFC set to  0.000000
12/19/2011	6:57:45 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	6:57:45 PM	Tube furnace set to 0
12/19/2011	6:58:45 PM	Helium valve closed
12/19/2011	6:58:45 PM	H2 valve closed
12/19/2011	6:58:45 PM	BCl3 valve closed
12/19/2011	6:58:45 PM	PH3 valve closed
12/19/2011	6:58:45 PM	SiCl4 pre valve closed
12/19/2011	6:58:45 PM	SiCl4 post valve closed
12/19/2011	6:58:45 PM	Bypass valve closed
12/19/2011	6:58:45 PM	Bubbler valve closed
12/19/2011	6:58:45 PM	Main Vac valve opened
12/19/2011	6:58:45 PM	Helium MFC set to  0.000000
12/19/2011	6:58:45 PM	H2 MFC set to  0.000000
12/19/2011	6:58:45 PM	BCl3 MFC set to  0.000000
12/19/2011	6:58:45 PM	PHl3 MFC set to  0.000000
12/19/2011	6:58:45 PM	SiCl4 MFC set to  0.000000
12/19/2011	6:58:45 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	6:58:45 PM	Tube furnace set to 0
12/19/2011	6:58:46 PM	Run finished at 6:58 PM
12/19/2011	6:58:46 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/19/2011	7:55:36 PM	Main Vac valve closed
12/19/2011	7:56:01 PM	Main Vac valve opened
12/19/2011	7:57:01 PM	Recipe started at 7:57 PM
12/19/2011	7:57:01 PM	Helium valve closed
12/19/2011	7:57:01 PM	H2 valve closed
12/19/2011	7:57:01 PM	BCl3 valve closed
12/19/2011	7:57:01 PM	PH3 valve closed
12/19/2011	7:57:01 PM	SiCl4 pre valve closed
12/19/2011	7:57:01 PM	SiCl4 post valve closed
12/19/2011	7:57:01 PM	Main Vac valve closed
12/19/2011	7:57:01 PM	Bypass valve closed
12/19/2011	7:57:01 PM	Bubbler valve closed
12/19/2011	7:57:01 PM	Helium MFC set to  0.000000
12/19/2011	7:57:01 PM	H2 MFC set to  0.000000
12/19/2011	7:57:01 PM	BCl3 MFC set to  0.000000
12/19/2011	7:57:01 PM	PHl3 MFC set to  0.000000
12/19/2011	7:57:01 PM	SiCl4 MFC set to  0.000000
12/19/2011	7:57:01 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	7:57:01 PM	Tube furnace set to 0
12/19/2011	7:57:05 PM	Helium valve closed
12/19/2011	7:57:05 PM	BCl3 valve closed
12/19/2011	7:57:05 PM	PH3 valve closed
12/19/2011	7:57:05 PM	SiCl4 pre valve closed
12/19/2011	7:57:05 PM	SiCl4 post valve closed
12/19/2011	7:57:05 PM	Main Vac valve closed
12/19/2011	7:57:05 PM	Bypass valve closed
12/19/2011	7:57:05 PM	Bubbler valve closed
12/19/2011	7:57:05 PM	H2 valve opened
12/19/2011	7:57:05 PM	Helium MFC set to  0.000000
12/19/2011	7:57:05 PM	H2 MFC set to  500.000000
12/19/2011	7:57:05 PM	BCl3 MFC set to  0.000000
12/19/2011	7:57:05 PM	PHl3 MFC set to  0.000000
12/19/2011	7:57:05 PM	SiCl4 MFC set to  0.000000
12/19/2011	7:57:05 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	7:57:05 PM	Tube furnace set to 0
12/19/2011	7:58:12 PM	Helium valve closed
12/19/2011	7:58:12 PM	BCl3 valve closed
12/19/2011	7:58:12 PM	PH3 valve closed
12/19/2011	7:58:12 PM	SiCl4 pre valve closed
12/19/2011	7:58:12 PM	SiCl4 post valve closed
12/19/2011	7:58:12 PM	Main Vac valve closed
12/19/2011	7:58:12 PM	Bypass valve closed
12/19/2011	7:58:12 PM	H2 valve opened
12/19/2011	7:58:12 PM	Bubbler valve opened
12/19/2011	7:58:12 PM	Helium MFC set to  0.000000
12/19/2011	7:58:12 PM	H2 MFC set to  500.000000
12/19/2011	7:58:12 PM	BCl3 MFC set to  0.000000
12/19/2011	7:58:12 PM	PHl3 MFC set to  0.000000
12/19/2011	7:58:12 PM	SiCl4 MFC set to  0.000000
12/19/2011	7:58:12 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	7:58:12 PM	Tube furnace set to 0
12/19/2011	7:58:13 PM	Helium valve closed
12/19/2011	7:58:13 PM	BCl3 valve closed
12/19/2011	7:58:13 PM	PH3 valve closed
12/19/2011	7:58:13 PM	SiCl4 pre valve closed
12/19/2011	7:58:13 PM	SiCl4 post valve closed
12/19/2011	7:58:13 PM	Main Vac valve closed
12/19/2011	7:58:13 PM	Bypass valve closed
12/19/2011	7:58:13 PM	H2 valve opened
12/19/2011	7:58:13 PM	Bubbler valve opened
12/19/2011	7:58:13 PM	Helium MFC set to  0.000000
12/19/2011	7:58:13 PM	H2 MFC set to  500.000000
12/19/2011	7:58:13 PM	BCl3 MFC set to  0.000000
12/19/2011	7:58:13 PM	PHl3 MFC set to  0.000000
12/19/2011	7:58:13 PM	SiCl4 MFC set to  0.000000
12/19/2011	7:58:13 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	7:58:13 PM	Tube furnace set to 950
12/19/2011	8:13:13 PM	Helium valve closed
12/19/2011	8:13:13 PM	PH3 valve closed
12/19/2011	8:13:13 PM	SiCl4 pre valve closed
12/19/2011	8:13:13 PM	SiCl4 post valve closed
12/19/2011	8:13:13 PM	Main Vac valve closed
12/19/2011	8:13:13 PM	Bypass valve closed
12/19/2011	8:13:13 PM	H2 valve opened
12/19/2011	8:13:13 PM	BCl3 valve opened
12/19/2011	8:13:13 PM	Bubbler valve opened
12/19/2011	8:13:13 PM	Helium MFC set to  0.000000
12/19/2011	8:13:13 PM	H2 MFC set to  450.000000
12/19/2011	8:13:13 PM	BCl3 MFC set to  20.000000
12/19/2011	8:13:13 PM	PHl3 MFC set to  0.000000
12/19/2011	8:13:13 PM	SiCl4 MFC set to  0.000000
12/19/2011	8:13:13 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	8:13:13 PM	Tube furnace set to 950
12/19/2011	8:43:13 PM	Helium valve closed
12/19/2011	8:43:13 PM	BCl3 valve closed
12/19/2011	8:43:13 PM	PH3 valve closed
12/19/2011	8:43:13 PM	SiCl4 pre valve closed
12/19/2011	8:43:13 PM	SiCl4 post valve closed
12/19/2011	8:43:13 PM	Main Vac valve closed
12/19/2011	8:43:13 PM	Bypass valve closed
12/19/2011	8:43:13 PM	H2 valve opened
12/19/2011	8:43:13 PM	Bubbler valve opened
12/19/2011	8:43:13 PM	Helium MFC set to  0.000000
12/19/2011	8:43:13 PM	H2 MFC set to  500.000000
12/19/2011	8:43:13 PM	BCl3 MFC set to  0.000000
12/19/2011	8:43:13 PM	PHl3 MFC set to  0.000000
12/19/2011	8:43:13 PM	SiCl4 MFC set to  0.000000
12/19/2011	8:43:13 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	8:43:14 PM	Tube furnace set to 750
12/19/2011	8:48:14 PM	H2 valve closed
12/19/2011	8:48:14 PM	BCl3 valve closed
12/19/2011	8:48:14 PM	PH3 valve closed
12/19/2011	8:48:14 PM	SiCl4 pre valve closed
12/19/2011	8:48:14 PM	SiCl4 post valve closed
12/19/2011	8:48:14 PM	Main Vac valve closed
12/19/2011	8:48:14 PM	Bypass valve closed
12/19/2011	8:48:14 PM	Helium valve opened
12/19/2011	8:48:14 PM	Bubbler valve opened
12/19/2011	8:48:14 PM	Helium MFC set to  500.000000
12/19/2011	8:48:14 PM	H2 MFC set to  0.000000
12/19/2011	8:48:14 PM	BCl3 MFC set to  0.000000
12/19/2011	8:48:14 PM	PHl3 MFC set to  0.000000
12/19/2011	8:48:14 PM	SiCl4 MFC set to  0.000000
12/19/2011	8:48:14 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	8:48:14 PM	Tube furnace set to 0
12/19/2011	9:08:14 PM	Helium valve closed
12/19/2011	9:08:14 PM	H2 valve closed
12/19/2011	9:08:14 PM	BCl3 valve closed
12/19/2011	9:08:14 PM	PH3 valve closed
12/19/2011	9:08:14 PM	SiCl4 pre valve closed
12/19/2011	9:08:14 PM	SiCl4 post valve closed
12/19/2011	9:08:14 PM	Main Vac valve closed
12/19/2011	9:08:14 PM	Bypass valve closed
12/19/2011	9:08:14 PM	Bubbler valve closed
12/19/2011	9:08:14 PM	Helium MFC set to  0.000000
12/19/2011	9:08:14 PM	H2 MFC set to  0.000000
12/19/2011	9:08:14 PM	BCl3 MFC set to  0.000000
12/19/2011	9:08:14 PM	PHl3 MFC set to  0.000000
12/19/2011	9:08:14 PM	SiCl4 MFC set to  0.000000
12/19/2011	9:08:14 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	9:08:14 PM	Tube furnace set to 0
12/19/2011	9:08:15 PM	Run finished at 9:08 PM
12/19/2011	9:24:37 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/19/2011	9:24:38 PM	Recipe started at 9:24 PM
12/19/2011	9:24:38 PM	Helium valve closed
12/19/2011	9:24:38 PM	H2 valve closed
12/19/2011	9:24:38 PM	BCl3 valve closed
12/19/2011	9:24:38 PM	PH3 valve closed
12/19/2011	9:24:38 PM	SiCl4 pre valve closed
12/19/2011	9:24:38 PM	SiCl4 post valve closed
12/19/2011	9:24:38 PM	Main Vac valve closed
12/19/2011	9:24:38 PM	Bypass valve closed
12/19/2011	9:24:38 PM	Bubbler valve closed
12/19/2011	9:24:38 PM	Helium MFC set to  0.000000
12/19/2011	9:24:38 PM	H2 MFC set to  0.000000
12/19/2011	9:24:38 PM	BCl3 MFC set to  0.000000
12/19/2011	9:24:38 PM	PHl3 MFC set to  0.000000
12/19/2011	9:24:38 PM	SiCl4 MFC set to  0.000000
12/19/2011	9:24:38 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	9:24:38 PM	Tube furnace set to 0
12/19/2011	9:24:41 PM	H2 valve closed
12/19/2011	9:24:41 PM	BCl3 valve closed
12/19/2011	9:24:41 PM	PH3 valve closed
12/19/2011	9:24:41 PM	SiCl4 pre valve closed
12/19/2011	9:24:41 PM	SiCl4 post valve closed
12/19/2011	9:24:41 PM	Main Vac valve closed
12/19/2011	9:24:41 PM	Bypass valve closed
12/19/2011	9:24:41 PM	Bubbler valve closed
12/19/2011	9:24:41 PM	Helium valve opened
12/19/2011	9:24:41 PM	Helium MFC set to  500.000000
12/19/2011	9:24:41 PM	H2 MFC set to  0.000000
12/19/2011	9:24:41 PM	BCl3 MFC set to  0.000000
12/19/2011	9:24:41 PM	PHl3 MFC set to  0.000000
12/19/2011	9:24:41 PM	SiCl4 MFC set to  0.000000
12/19/2011	9:24:41 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	9:24:41 PM	Tube furnace set to 0
12/19/2011	9:24:47 PM	Helium valve closed
12/19/2011	9:24:47 PM	H2 valve closed
12/19/2011	9:24:47 PM	BCl3 valve closed
12/19/2011	9:24:47 PM	PH3 valve closed
12/19/2011	9:24:47 PM	SiCl4 pre valve closed
12/19/2011	9:24:47 PM	SiCl4 post valve closed
12/19/2011	9:24:47 PM	Main Vac valve closed
12/19/2011	9:24:47 PM	Bypass valve closed
12/19/2011	9:24:47 PM	Bubbler valve closed
12/19/2011	9:24:47 PM	Helium MFC set to  0.000000
12/19/2011	9:24:47 PM	H2 MFC set to  0.000000
12/19/2011	9:24:47 PM	BCl3 MFC set to  0.000000
12/19/2011	9:24:47 PM	PHl3 MFC set to  0.000000
12/19/2011	9:24:47 PM	SiCl4 MFC set to  0.000000
12/19/2011	9:24:47 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	9:24:47 PM	Tube furnace set to 0
12/19/2011	9:24:48 PM	Run finished at 9:24 PM
12/19/2011	9:24:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/19/2011	9:26:10 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/19/2011	9:26:10 PM	Recipe started at 9:26 PM
12/19/2011	9:26:10 PM	Helium valve closed
12/19/2011	9:26:10 PM	H2 valve closed
12/19/2011	9:26:10 PM	BCl3 valve closed
12/19/2011	9:26:10 PM	PH3 valve closed
12/19/2011	9:26:10 PM	SiCl4 pre valve closed
12/19/2011	9:26:10 PM	SiCl4 post valve closed
12/19/2011	9:26:10 PM	Main Vac valve closed
12/19/2011	9:26:10 PM	Bubbler valve closed
12/19/2011	9:26:10 PM	Bypass valve opened
12/19/2011	9:26:10 PM	Helium MFC set to  0.000000
12/19/2011	9:26:10 PM	H2 MFC set to  0.000000
12/19/2011	9:26:10 PM	BCl3 MFC set to  0.000000
12/19/2011	9:26:10 PM	PHl3 MFC set to  0.000000
12/19/2011	9:26:10 PM	SiCl4 MFC set to  0.000000
12/19/2011	9:26:10 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	9:26:11 PM	Tube furnace set to 0
12/19/2011	9:28:01 PM	Helium valve closed
12/19/2011	9:28:01 PM	H2 valve closed
12/19/2011	9:28:01 PM	BCl3 valve closed
12/19/2011	9:28:01 PM	PH3 valve closed
12/19/2011	9:28:01 PM	SiCl4 pre valve closed
12/19/2011	9:28:01 PM	SiCl4 post valve closed
12/19/2011	9:28:01 PM	Main Vac valve closed
12/19/2011	9:28:01 PM	Bubbler valve closed
12/19/2011	9:28:01 PM	Bypass valve opened
12/19/2011	9:28:01 PM	Helium MFC set to  0.000000
12/19/2011	9:28:01 PM	H2 MFC set to  0.000000
12/19/2011	9:28:01 PM	BCl3 MFC set to  0.000000
12/19/2011	9:28:01 PM	PHl3 MFC set to  0.000000
12/19/2011	9:28:01 PM	SiCl4 MFC set to  0.000000
12/19/2011	9:28:01 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	9:28:01 PM	Tube furnace set to 0
12/19/2011	9:29:01 PM	Helium valve closed
12/19/2011	9:29:01 PM	H2 valve closed
12/19/2011	9:29:01 PM	BCl3 valve closed
12/19/2011	9:29:01 PM	PH3 valve closed
12/19/2011	9:29:01 PM	SiCl4 pre valve closed
12/19/2011	9:29:01 PM	SiCl4 post valve closed
12/19/2011	9:29:01 PM	Bypass valve closed
12/19/2011	9:29:01 PM	Bubbler valve closed
12/19/2011	9:29:01 PM	Main Vac valve opened
12/19/2011	9:29:01 PM	Helium MFC set to  0.000000
12/19/2011	9:29:01 PM	H2 MFC set to  0.000000
12/19/2011	9:29:01 PM	BCl3 MFC set to  0.000000
12/19/2011	9:29:01 PM	PHl3 MFC set to  0.000000
12/19/2011	9:29:01 PM	SiCl4 MFC set to  0.000000
12/19/2011	9:29:01 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	9:29:01 PM	Tube furnace set to 0
12/19/2011	9:29:02 PM	Run finished at 9:29 PM
12/19/2011	9:29:02 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/19/2011	11:01:09 PM	Main Vac valve closed
12/19/2011	11:02:32 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/19/2011	11:02:33 PM	Recipe started at 11:02 PM
12/19/2011	11:02:33 PM	Helium valve closed
12/19/2011	11:02:33 PM	H2 valve closed
12/19/2011	11:02:33 PM	BCl3 valve closed
12/19/2011	11:02:33 PM	PH3 valve closed
12/19/2011	11:02:33 PM	SiCl4 pre valve closed
12/19/2011	11:02:33 PM	SiCl4 post valve closed
12/19/2011	11:02:33 PM	Main Vac valve closed
12/19/2011	11:02:33 PM	Bubbler valve closed
12/19/2011	11:02:33 PM	Bypass valve opened
12/19/2011	11:02:33 PM	Helium MFC set to  0.000000
12/19/2011	11:02:33 PM	H2 MFC set to  0.000000
12/19/2011	11:02:33 PM	BCl3 MFC set to  0.000000
12/19/2011	11:02:33 PM	PHl3 MFC set to  0.000000
12/19/2011	11:02:33 PM	SiCl4 MFC set to  0.000000
12/19/2011	11:02:33 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	11:02:34 PM	Tube furnace set to 0
12/19/2011	11:04:00 PM	Run aborted at 11:04 PM
12/19/2011	11:04:00 PM	Helium valve closed
12/19/2011	11:04:00 PM	H2 valve closed
12/19/2011	11:04:00 PM	BCl3 valve closed
12/19/2011	11:04:00 PM	PH3 valve closed
12/19/2011	11:04:00 PM	SiCl4 pre valve closed
12/19/2011	11:04:00 PM	SiCl4 post valve closed
12/19/2011	11:04:00 PM	Bypass valve closed
12/19/2011	11:04:00 PM	Main Vac valve closed
12/19/2011	11:04:00 PM	Bubbler valve closed
12/19/2011	11:04:00 PM	Helium MFC set to  0.000000
12/19/2011	11:04:00 PM	H2 MFC set to  0.000000
12/19/2011	11:04:00 PM	BCl3 MFC set to  0.000000
12/19/2011	11:04:00 PM	PHl3 MFC set to  0.000000
12/19/2011	11:04:00 PM	SiCl4 MFC set to  0.000000
12/19/2011	11:04:00 PM	Tube furnace set to 0
12/19/2011	11:04:00 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/19/2011	11:05:08 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/19/2011	11:05:09 PM	Recipe started at 11:05 PM
12/19/2011	11:05:09 PM	Helium valve closed
12/19/2011	11:05:09 PM	H2 valve closed
12/19/2011	11:05:09 PM	BCl3 valve closed
12/19/2011	11:05:09 PM	PH3 valve closed
12/19/2011	11:05:09 PM	SiCl4 pre valve closed
12/19/2011	11:05:09 PM	SiCl4 post valve closed
12/19/2011	11:05:09 PM	Main Vac valve closed
12/19/2011	11:05:09 PM	Bubbler valve closed
12/19/2011	11:05:09 PM	Bypass valve opened
12/19/2011	11:05:09 PM	Helium MFC set to  0.000000
12/19/2011	11:05:09 PM	H2 MFC set to  0.000000
12/19/2011	11:05:09 PM	BCl3 MFC set to  0.000000
12/19/2011	11:05:09 PM	PHl3 MFC set to  0.000000
12/19/2011	11:05:09 PM	SiCl4 MFC set to  0.000000
12/19/2011	11:05:09 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	11:05:09 PM	Tube furnace set to 0
12/19/2011	11:05:47 PM	Run aborted at 11:05 PM
12/19/2011	11:05:47 PM	Helium valve closed
12/19/2011	11:05:47 PM	H2 valve closed
12/19/2011	11:05:47 PM	BCl3 valve closed
12/19/2011	11:05:47 PM	PH3 valve closed
12/19/2011	11:05:47 PM	SiCl4 pre valve closed
12/19/2011	11:05:47 PM	SiCl4 post valve closed
12/19/2011	11:05:47 PM	Bypass valve closed
12/19/2011	11:05:47 PM	Main Vac valve closed
12/19/2011	11:05:47 PM	Bubbler valve closed
12/19/2011	11:05:47 PM	Helium MFC set to  0.000000
12/19/2011	11:05:47 PM	H2 MFC set to  0.000000
12/19/2011	11:05:47 PM	BCl3 MFC set to  0.000000
12/19/2011	11:05:47 PM	PHl3 MFC set to  0.000000
12/19/2011	11:05:47 PM	SiCl4 MFC set to  0.000000
12/19/2011	11:05:47 PM	Tube furnace set to 0
12/19/2011	11:05:47 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/19/2011	11:09:21 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/19/2011	11:09:22 PM	Recipe started at 11:09 PM
12/19/2011	11:09:22 PM	Helium valve closed
12/19/2011	11:09:22 PM	H2 valve closed
12/19/2011	11:09:22 PM	BCl3 valve closed
12/19/2011	11:09:22 PM	PH3 valve closed
12/19/2011	11:09:22 PM	SiCl4 pre valve closed
12/19/2011	11:09:22 PM	SiCl4 post valve closed
12/19/2011	11:09:22 PM	Main Vac valve closed
12/19/2011	11:09:22 PM	Bubbler valve closed
12/19/2011	11:09:22 PM	Bypass valve opened
12/19/2011	11:09:22 PM	Helium MFC set to  0.000000
12/19/2011	11:09:22 PM	H2 MFC set to  0.000000
12/19/2011	11:09:22 PM	BCl3 MFC set to  0.000000
12/19/2011	11:09:22 PM	PHl3 MFC set to  0.000000
12/19/2011	11:09:22 PM	SiCl4 MFC set to  0.000000
12/19/2011	11:09:22 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	11:09:22 PM	Tube furnace set to 0
12/19/2011	11:14:13 PM	Helium valve closed
12/19/2011	11:14:13 PM	H2 valve closed
12/19/2011	11:14:13 PM	BCl3 valve closed
12/19/2011	11:14:13 PM	PH3 valve closed
12/19/2011	11:14:13 PM	SiCl4 pre valve closed
12/19/2011	11:14:13 PM	SiCl4 post valve closed
12/19/2011	11:14:13 PM	Main Vac valve closed
12/19/2011	11:14:13 PM	Bubbler valve closed
12/19/2011	11:14:13 PM	Bypass valve opened
12/19/2011	11:14:13 PM	Helium MFC set to  0.000000
12/19/2011	11:14:13 PM	H2 MFC set to  0.000000
12/19/2011	11:14:13 PM	BCl3 MFC set to  0.000000
12/19/2011	11:14:13 PM	PHl3 MFC set to  0.000000
12/19/2011	11:14:13 PM	SiCl4 MFC set to  0.000000
12/19/2011	11:14:13 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	11:14:13 PM	Tube furnace set to 0
12/19/2011	11:15:13 PM	Helium valve closed
12/19/2011	11:15:13 PM	H2 valve closed
12/19/2011	11:15:13 PM	BCl3 valve closed
12/19/2011	11:15:13 PM	PH3 valve closed
12/19/2011	11:15:13 PM	SiCl4 pre valve closed
12/19/2011	11:15:13 PM	SiCl4 post valve closed
12/19/2011	11:15:13 PM	Bypass valve closed
12/19/2011	11:15:13 PM	Bubbler valve closed
12/19/2011	11:15:13 PM	Main Vac valve opened
12/19/2011	11:15:13 PM	Helium MFC set to  0.000000
12/19/2011	11:15:13 PM	H2 MFC set to  0.000000
12/19/2011	11:15:13 PM	BCl3 MFC set to  0.000000
12/19/2011	11:15:13 PM	PHl3 MFC set to  0.000000
12/19/2011	11:15:13 PM	SiCl4 MFC set to  0.000000
12/19/2011	11:15:13 PM	Bypass solenoid MFC set to  0.000000
12/19/2011	11:15:13 PM	Tube furnace set to 0
12/19/2011	11:15:14 PM	Run finished at 11:15 PM
12/19/2011	11:15:14 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
